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41.
Jae-Ou CHAE Young-Jun JEONG V. M. SHMELEV A. A. DENICAEV V.M. POUTCHKOV V. RAVI 《等离子体科学和技术》2006,8(4):443-446
A plasma discharge initiation system for the explosive volumetric combustion charge was designed, investigated and developed for practical application. Laboratory scale experiments were carried out before conducting the large scale field tests. The resultant explosions gave rise to less noise, insignificant seismic vibrations and good specific explosive consumption for rock blasting. Importantly, the technique was found to be safe and environmentally friendly. 相似文献
42.
介绍了ICP等离子体光谱仪的原理及测定高纯氧化铁中铝、钙、硫、钾、镁、锰、钠和钛等8种杂质元素的分析方法,考察了样品的溶解方案及工作曲线的选择,确定了仪器最佳工作条件和方法检出限。 相似文献
43.
Advanced high-energy plasma systems are being used to achieve the benefits of the high-velocity oxy-fuel (HVOF) system without
losing the inherent advantages of plasma for coating of gas turbine parts. MCrAlY coatings play a very important role in the
performance and reliability of gas turbine components. One of the important considerations for next generation of gas turbines,
which have more demanding conditions and need to withstand ever increasing operating temperatures, is that they should possess
very low oxygen content levels in the coating. Low oxygen content coatings are applied by the expensive low-pressure plasma
spray (LPPS)/vacuum plasma spray (VPS) technique for critical components in aero- and land-based gas turbines. This work deals
with the development of low-cost LPPS equivalent coatings (having low oxygen content) using the high-energy high-velocity
plasma spray (HEHVPS) gun and inert gas shroud. A comparison has also been made with CoNiCrAlY coatings by HVOF. 相似文献
44.
Microwave plasma synthesis of TiN and ZrN nanopowders 总被引:2,自引:0,他引:2
This work demonstrates that TiN and ZrN nanopowders can be prepared by microwave plasma synthesis method. The effects of flow rate of plasma forming gas, flow rate of carrier gas and feeding rate of precursor raw material to the average particle size were studied. The TiN and ZrN nanopowders were characterized by means of transmission electron microscopy (TEM) and X-ray diffraction (XRD). 相似文献
45.
生物材料用于人体必须要具备生物相容性。尤其是与血液相接触的材料如血管内支架必须要具备血液相容性。材料的表面特性直接影响血液系统中是否会出现血栓。本文针对金属血管内支架的表面特性、与血液的界面反应以及用于提高血液相容性的低温等离子表面改性进行了简要综述 相似文献
46.
Ultra-fine aluminum nitride has been synthesized by the evaporation of aluminum powder at atmospheric-pressure nitrogen plasma in a hot-wall reactor.The average size of aluminum nitride particle is 0.11μm measured by scanning electric mirror(SEM),and the purity is at least over90% evaluated by X-Ray diffraction(XRD).The conversion of Al powder to aluminum nitride is strongly depended on the injection of NH3.Typical experimental parameters such as the feed rate of raw material,the flow rate of ammonia and the position of injecting aluminum powder into the reactor are given. 相似文献
47.
48.
本文研究了采用锁定放大相干检测技术的等离子体光发射谱检测系统。用该系统检测了仅用CF4作为刻蚀气体刻蚀非晶硅基薄膜的等离子体光发射谱。分析了检测结果和刻蚀机理。 相似文献
49.
Xiang Lu S. Sundar Kumar Iyer Jin Lee Brian Doyle Zhineng Fan Paul K. Chu Chenming Hu Nathan W. Cheung 《Journal of Electronic Materials》1998,27(9):1059-1066
We have demonstrated feasibility to form silicon-on-insulator (SOI) substrates using plasma immersion ion implantation (PIII)
for both separation by implantation of oxygen and ion-cut. This high throughput technique can substantially lower the high
cost of SOI substrates due to the simpler implanter design as well as ease of maintenance. For separation by plasma implantation
of oxygen wafers, secondary ion mass spectrometry analysis and cross-sectional transmission electron micrographs show continuous
buried oxide formation under a single-crystal silicon overlayer with sharp Si/SiO2 interfaces after oxygen plasma implantation and high-temperature (1300°C) annealing. Ion-cut SOI wafer fabrication technique
is implemented for the first time using PIII. The hydrogen plasma can be optimized so that only one ion species is dominant
in concentration and there are minimal effects by other residual ions on the ion-cut process. The physical mechanism of hydrogen
induced silicon surface layer cleavage has been investigated. An ideal gas law model of the microcavity internal pressure
combined with a two-dimensional finite element fracture mechanics model is used to approximate the fracture driving force
which is sufficient to overcome the silicon fracture resistance. 相似文献
50.
N‐(4‐Acetoxyphenyl) maleimide (APMI) and three kinds of comonomers bearing a trimethylsilyl group were copolymerized at 60°C in the presence of azobisisobutyronitrile (AIBN) as an initiator in 1,4‐dioxane to obtain the three IP, IIP, and IIIP copolymers. These copolymers were removed from the acetoxy group in a transesterification process into new IVP, VP, and VIP copolymers with a pendant hydroxyl group. Two modified processes were adopted to prepare photoresists using these copolymers. The first process involved mixing the dissolution inhibitor, o‐nitrobenzyl cholate, with the new copolymers. Second, o‐nitrobenzyl cholate was introduced into the copolymers using 1,8‐diazabicyclo[5.4.0]undec‐7‐ene (DBU) in dimethylformamide (DMF). The cyclic maleimide structure is responsible for the high thermal stability of these copolymers. After irradiation using deep–UV light and development with aqueous Na2CO3 (0.01 wt %), the developed patterns showed positive images and exhibited good adhesion to the silicon wafer without using any adhesion promoter. The resolution of these resists was at least 0.8 μm and an oxygen‐plasma etching rate was 1/5.3 to that of hard‐baked HPR‐204. © 2002 Wiley Periodicals, Inc. J Appl Polym Sci 83: 2791–2798, 2002; DOI 10.1002/app.10255 相似文献