无掩模激光干涉光刻技术研究

介绍了一种不用掩模的光刻技术———激光干涉光刻技术的基本原理,给出了干涉光刻技术的主要特点及一些可能的应用,并对实验系统和初步实验结果进行了分析。研究表明,激光干涉光刻具有大视场和分辨率高和视场宽等优点。     

NO emission characteristics in counterflow diffusion flame of blended fuel of H2/CO2/Ar

Flame structure and NO emission characteristics in counterflow diffusion flame of blended fuel of H₂/CO₂/Ar have been numerically simulated with detailed chemistry. The combination of H₂, CO₂ and Ar as fuel is selected to clearly display the contribution of hydrocarbon products to flame structure and NO emission characteristics due to the breakdown of CO₂. A radiative heat loss term is involved to correctly describe the flame dynamics especially at low strain rates. The detailed chemistry adopts the reaction mechanism of GRI 2.11, which consists of 49 species and 279 elementary reactions. All mechanisms including thermal, NO₂, N₂O and Fenimore are taken into account to separately evaluate the effects of CO₂ addition on NO emission characteristics. The increase of added CO₂ quantity causes flame temperature to fall since at high strain rates a diluent effect is prevailing and at low strain rates the breakdown of CO₂ produces relatively populous hydrocarbon products and thus the existence of hydrocarbon products inhibits chain branching. It is also found that the contribution of NO production by N₂O and NO₂ mechanisms are negligible and that thermal mechanism is concentrated on only the reaction zone. As strain rate and CO₂ quantity increase, NO production is remarkably augmented. Copyright © 2002 John Wiley & Sons, Ltd.     

Growth Stresses in the Oxide Scales on TiAl Alloys at 800 and 900°C

In the oxidation of TiAl alloys, the role of scale-growth stresses formed during oxidation has, thus far, been unknown. In the present paper the oxide-growth stresses were investigated by the deflection-test method in monofacial oxidation (DTMO) accompanied by acoustic-emission measurements. On unmodified surfaces the growth stresses are compressive and reach levels of around –100 MPa. At the same time, significant acoustic emission occurs indicating that even under isothermal conditions, stresses are relieved by a scale-cracking mechanism. For oxide scales on TiAl surfaces, which had been ion implanted with chlorine before oxidation, a very thin protective alumina layer is formed which, however, develops growth stresses in the range of several GPa, accompanied by intensive acoustic emission. In all stress–time curves, a dynamic situation is observed. This consists of phases of stress relief by scale microcracking and phases of stresses increase due to crack healing and further oxide growth. As a result, the level of stress as a function of oxidation time, is characterized by an oscillating course.     

功率电子器件用AlN陶瓷基板的研制

阐述了AlN陶瓷的烧结原理 ,分析了烧结工艺参数对大面积AlN基板性能的影响 ,成功研制出了高热导率(190W /m·K)、大面积 (14 0mm× 90mm)、翘曲度为 2 0 μm/5 0mm的AlN陶瓷基板。     

Acoustic emission method for research and control of friction pairs

One of the new physical methods that provides much information about the processes going on in a friction contact zone in real time is acoustic emission (AE). Basic experimental results of AE in friction are presented and analysed. Using AE signals we can get an indication about the state of the friction processes, about the quality of solid and liquid layers on the contacting surfaces in real time, sometimes about intensity of wear, changing of wear and friction regimes and so on. The influence of sliding velocity, load, roughness and some physical and mechanical properties of the body on the parameters of AE are also given. Some attention to the practical implementation of these techniques for control of capability for work of friction pairs in real conditions are given. Modern methods and devices enable condition monitoring of sliding and rolling bearings.     

The Clausius inequality corrected for heat transfer involving radiation

The objective of this paper is to prove that the Clausius inequality must be re-stated to have general applicability for heat transfer involving radiative fluxes. The integrand (đQ/T) of the Clausius expression applies to heat conduction and convection, but does not hold for most radiative transfer scenarios, with the exception of reversible infinitesimal net blackbody radiation transfer. In other cases involving radiative transfer, the equality holds for a cycle even though irreversible heat addition by radiative transfer occurs. This is without the erroneous presumption of entropy destruction anywhere in the cycle. Thus, the Clausius inequality indicates reversibility for a cycle that includes an irreversible process. Further, in some radiative cases the quantity đQ/T, where T is the boundary temperature, is not the entropy transfer at the system boundary, and in fact, primarily represents entropy production within the system. It is also clear that in another case considered, the quantity đQ/T had no physical meaning whatsoever. Consequently, the Clausius expression has been re-stated so that it is applicable to cycles with processes involving any form of heat transfer. A new integrand (đQ_cc/T + đS_Net,Rad) is presented, allowing the Clausius inequality to generally apply to all heat transfer scenarios. The work in this paper emphasizes the need to re-state other fundamental equations allowing applicability to all heat transfer processes, and draws attention to the unique character of radiative entropy calculations.     

Thermal-lens and photo-acoustic methods for the determination of SiC thermal properties

In this paper we report the use of photothermal techniques such as Thermal lens (TL) spectrometry, Photoacoustic and heat capacity, ρc_p, to determine the thermo-optical parameters, such as thermal conductivity (K), thermal diffusivity (D), specific heat (c_p) and the optical path dependence with temperature (ds/dT), of an undoped polycrystalline 3C-SiC. To our knowledge, this is the first time that Thermal lens technique is used for wide band-gap systems. Results obtained for the polycrystalline sample with TL technique indicates that ds/dT is negative at room temperature. Moreover, the obtained values of thermal diffusivity and thermal conductivity are in good agreement with that found in the literature, indicating that the phototermal techniques can be used to obtain the referred parameters in circumstances where other techniques cannot be used, for example, in harsh environments.     

降低发电装置CO2排放的对策初探

分析了老式与新式发电装置每度电产生CO_2的量,并提出了相应的对策。     

Study of hot air generator with quasi-uniform temperature using concentrated solar radiation: Influence of the shape parameters

The non-uniformity of the air temperatures and the slow flow rate at the plane collector exit constitute the main cause of the limitations of the solar drying systems. In order to obtain an uniform and a variable flow rate for different uses, a hot air generator using concentrated solar radiation is proposed. To improve the thermal efficiency of the generator, a study of the influence of different shape parameters is realized. The generator is simulated in the laboratory while investigating the flow induced by a circular disc heated uniformly by Joule effect at constant temperature. This disc is placed at the entrance of an open ended vertical cylinder of a larger diameter. Thermal radiation emitted by the hot disc heats the cylinder wall. The heating of the fluid at the cylinder-inlet generates a thermosiphon flow around the one created by the hot disc. The comparison of the velocity and the temperature profiles of the resulting flow permits to determine the influence of the cylinder height, the vertical source-cylinder spacing and the radius ratio, on the resulting flow at the system exit. Thus, a judicious choice of the shape parameters entails an improvement of the flow rate as well as the thermal flux absorbed by the air and a good homogenization of the air temperature at the generator exit.     

Investigation of Centreline Segregation and Centreline Porosity in CC ‐ Slabs

Improvements of solidification processing in conventional or near net shape casting depend on sophisticated methods of macroscopic examination of central unsoundness and inhomogeneity of the cast material. As long as remarkable deviations referring to the quality features exist between the slab centre and the bulk material such methods should be looked after. Two semi‐macroscopic methods of segregation analysis are discussed in this paper: firstly, the potential of the emission spectral analysis combined with sectioning of a sample and secondly, the computer aided micro‐probe analysis. Both methods are restricted to small local areas. The proneness of elements and steel grades with respect to micro‐ and macrosegregation as well as distribution‐ and segregation coefficients are determined. The effect of a diffusion anneal on homogenisation of segregation is studied. Last not least the precipitation of sulphides, phosphides or carbonitrides is estimated. Ultrasonic detection of the central unsoundness of conventional slabs or thin slabs is a new approach towards a quantitative macroscopic examination. The sample size is 400 mm x 300 mm x 30 mm. To achieve a low ultrasonic noise using a 5 MHz‐transducer the samples are heat treated for grain refinement. “Dog bone porosity”, macroscopic topographical misfit between the upper and lower solidifying shells, periodical corner cracks or systematic transverse centre cracks are detected. Obviously, segregations do not reflect the ultrasonic beam. However, it can be presumed that an interrelation exists between porosity and segregation, although these might be locally apart from each other. This new ultrasonic test of the central unsoundness of continuous cast (c.c.) slabs gives valuable arguments to machine builders and maintenance people to decide on the right concepts for strand guidance, support rollers and secondary cooling. Soft reduction can be optimized and variations in casting speed counteracted by dynamic means. R&D service of this kind can help steelmakers when decisions are impending to build new casting machines or revamp old ones.