Deposition of a nanocomposite (Ti,Al, Si)N coating with high thickness by high-speed physical vapor deposition

Nanocomposite coatings such as (Ti, Al, Si)N have been demonstrated as promising candidates for the use as protection against solid particle erosion for compressor blades. Typically, nanocomposite (Ti, Al, Si)N coatings are deposited by different physical vapor deposition (PVD) techniques. However, the relatively low coating thickness up to a few micrometers due to low deposition rates leads to a limited lifetime of the coatings under erosive particle bombardment. In this study, the deposition of a nanocomposite (Ti, Al, Si)N coating was performed by a hollow cathode gas flow sputtering method, the high-speed physical vapor deposition, which enables the high-rate deposition of thick coatings. Morphology and microstructure of the coating were investigated via scanning electron microscopy and transmission electron microscopy, respectively. Tribological characterization by impact tests and erosion tests demonstrates that the nanocomposite (Ti, Al, Si)N coated sample reveals a promising resistance against impact loads and the solid particle erosion. Summarily, nanocomposite (Ti, Al, Si)N coatings deposited by the high-speed physical vapor deposition provide a high potential for the erosion protection of compressor blades.     

离子束辅助沉积对TiAlSiN薄膜性能的影响

分别利用真空电弧沉积技术与等离子体辅助真空电弧沉积技术在不锈钢片、高速钢片和单晶硅片上沉积TiAlSiN多元薄膜，通过X射线衍射和扫描电镜对采用两种方法制备的薄膜物相及表面形貌进行了分析比较，测定了高速钢片上薄膜的显微硬度，进行了耐磨性实验。结果表明，采用离子束辅助沉积制备的薄膜，有（200）面的择优取向，薄膜的表面形貌得到改善，硬度和耐磨性提高。     

磁过滤沉积TiAlSiN纳米薄膜的摩擦磨损与腐蚀磨损行为

目的 研究磁过滤沉积方法制备的TiAlSiN纳米薄膜的结构及力学性能对摩擦学性能及腐蚀磨损行为的影响。方法 采用磁过滤阴极真空弧沉积技术,在6×10^–2～15×10^–2 Pa的N₂气压条件下,将316L不锈钢作为基底,制备出TiAlSiN薄膜。利用SEM、XRD、XPS对薄膜的结构成分形貌进行表征分析,使用摩擦磨损仪分析测试薄膜的摩擦磨损行为,并且使用电化学工作站分析测试薄膜在3.5%(质量分数)人工海水环境下的摩擦磨损及开路电位变化曲线,通过台阶仪测得磨损后磨痕轮廓曲线,并计算磨损率。结果 TiAlSiN薄膜具有典型的非晶包覆纳米晶的复合结构,薄膜表面细致光滑,截面无明显柱状晶结构。随着气压的增大,薄膜晶粒尺寸从26 nm降至12 nm。在0.08 Pa气压下制备的TiAlSiN薄膜的力学性能最佳,纳米硬度为22 GPa,基膜结合力达到28 N,干摩擦系数为0.412,磨损率为0.5×10^–6 mm³/(N·m)。在3.5%人工海水介质中,TiAlSiN薄膜的摩擦系数为0.3...     

环境温度对磁控溅射Ti-Al-Si-N涂层摩擦学性能的影响

目的探索磁控溅射制备的Ti-Al-Si-N涂层在不同环境温度下的摩擦学性能。方法利用磁控溅射技术,在AISI304不锈钢表面制备了Ti-Al-Si-N涂层,采用扫描电镜、能谱仪和X射线衍射仪研究了涂层的成分与微观结构,利用HT-1000型高温摩擦磨损试验机,以直径为5 mm的Al_2O_3球作为摩擦副,研究了Ti-Al-Si-N涂层在室温、200、400、600℃时的摩擦学性能。结果磁控溅射制得的Ti-Al-Si-N涂层表面平整、致密,具有典型的柱状晶结构;在室温、200、400、600℃的环境温度下,涂层的摩擦系数分别为0.6、0.35、0.25和0.2,磨损体积分别为0.319、0.232、0.0149和0.0136 mm~3。涂层的摩擦系数和磨损体积均随温度的升高而降低。结论随着测试温度的升高,磨痕区域生成越多的以氧化钛和氧化铝为主的氧化物,其具有一定的减摩作用。在室温下,涂层的磨损机理主要为疲劳剥落,200℃时为磨粒磨损,400℃时为磨粒磨损和氧化磨损,600℃时主要为氧化磨损。     

PVD涂层刀具高速铣削CoCrMo合金的性能研究

目的为了提高涂层硬质合金刀具的切削性能,研究了物理气相沉积PVD法制备的涂层硬质合金铣刀在高速干式环境下的铣削性能。方法采用阴极电弧技术制备了TiN、TiAlN以及TiAlSiN涂层硬质合金铣刀刀头,通过一同沉积涂层的硬质合金圆片,间接测量得出涂层的显微硬度、厚度和平均摩擦系数,并以CoCrMo合金为切削对象,进行了PVD涂层与无涂层刀具高速铣削下的对比试验。结果TiAlSiN显微硬度最高达3800HV,摩擦系数达0.3,TiAlN涂层平均膜厚为2μm,间接测得TiN、TiAlN以及TiAlSiN涂层的结合力依次为60、58、42N。在三者的切削性能中,TiAlSiN涂层的切削性能比TiAlN和TiN涂层的好,同等切削参数时,TiN刀具的高速铣削时间最短,TiAlSiN涂层的平均磨损值为0.1895,TiN的平均磨损值为0.3047。结论涂层中添加Al、Si,极大地提高了刀具的使用性能,改善了刀具切削过程中的耐磨性、红硬性,极大地延长了刀具的使用寿命。TiAlSiN涂层的硬度高,耐磨损性好,切削性能好,适合高速铣削加工。     

Cutting Performance and Wear Behavior of AlTiN-and TiAlSiN-Coated Carbide Tools During Dry Milling of Ti-6Al-4V

Machining, especially dry machining of titanium alloys, has been one of the most significant challenges for carbide cutting tools. In this study, aluminum-rich AlTiN coating, as well as TiAlSiN nanocomposite coating, were successfully employed for dry milling of Ti-6Al-4V alloy with high efficiency and long tool life. At the cutting speeds of 150 m/min and 200 m/min, the tool life of the TiAlSiN-coated tool exceeds that of AlTiN-coated tool by 32 and 66%, respectively. The wear modes for both coated tools include the uniform flank wear, smooth wear, chipping, coating and substrate flaking, crater and notch wear, and the wear mechanisms include adhesion, diffusion, oxidation and crack. Among them, the wear mechanism is dominated by the adhesion and oxidation wear. As compared with AlTiN coating, TiAlSiN coating exhibits better mechanical properties and oxidation resistance, which contribute to a better cutting performance, fewer thermal cracks and smaller and uniform workpiece chips during the dry milling of Ti-6Al-4V alloy.     

电弧离子镀偏压对TiAlSiN涂层结构及性能的影响

目的 探究脉冲偏压对TiAlSiN涂层结构及力学性能、耐磨性能、抗氧化性能的影响规律及机制。方法 采用阴极电弧离子镀膜技术,调控偏压参数并在M2高速钢上沉积TiAlSiN涂层,利用SEM、XRD、3D轮廓仪、金相显微镜、划痕仪、摩擦磨损试验仪等仪器及高温氧化试验,对涂层结构及性能进行分析表征。结果 偏压为50 V时,涂层主要为AlN相;偏压高于75 V时,涂层以固溶的(Ti,Al)N相为主,TiAlSiN涂层存在较强的(200)面择优取向。偏压由50 V增大至150 V时,涂层的致密性增加,表面粗糙度先降低后上升,涂层结合力先增大后降低。TiAlSiN涂层的磨损方式主要是磨粒磨损,受物相结构、涂层致密性的影响,偏压为100~150 V时,涂层的耐磨性能优异。涂层1000 ℃氧化4 h后,表面氧化程度不同,主要受物相结构、致密性、表面孔隙的多重影响,hcp-AlN相比(Ti,Al)N相更易氧化;偏压增大使得涂层沉积更为致密,氧化层深度变浅;涂层孔隙增加,表面形成的Al2O3团簇增多。结论 偏压100 V下TiAlSiN涂层的综合性能最优,涂层结合力为46.7 V,硬度为3276HV0.025,表面粗糙度最低,耐磨性能较好且高温下抗氧化性能最强。     

C 掺杂方式对 TiAlSiN 膜层组织及性能的影响

采用电弧离子镀与磁控溅射联合沉积技术,以不同的C掺杂方式在高速钢基体表面制备了C/TiAlSiN多元复合硬质膜层,对膜层的成分、组织结构、显微硬度及摩擦磨损性能进行了表征,并与相同条件下制备的未掺杂TiAlSiN膜进行了对比。结果表明,不同的掺杂方式使得膜层的组织与性能不同,在TiAlSiN硬质膜层的制备过程中实施C掺杂,能够显著优化该膜层体系的组织结构及显微硬度,并大大改善其摩擦磨损性能。     

Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology

TiAlSiN coatings with different Si content were prepared by hollow cathode discharge (HCD) and mid-frequency magnetron sputtering (MFMS) hybrid coating deposition technology. The chemical composition, microstructure, mechanical properties of these coatings were systematically investigated by means of energy dispersive spectrometry (EDS), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nanoindentation measurement, scratch and high speed milling hardened steel tests. The coatings prepared by this method showed the structure of crystalline phase was corresponding to that of TiAlN, however, different preferred orientation with addition of Si. Proper content of Si into TiAlN led to increase of microhardness and adhesion. TiAlSiN coated end mill with Si content of 4.78 at.% had the least flank wear, which was improved about 20% milling distance than TiAlN coated end mill.     

0Cr15Ni5Cu2Ti钢表面多弧离子镀TiAlSiN涂层的性能研究

采用多弧离子镀技术在0Cr15Ni5Cu2Ti钢表层制备TiAlSiN涂层;采用X射线衍射分析膜层的物相成分;利用显微硬度计检测涂层的硬度;利用扫描电镜观察TiAlSiN涂层的形貌;利用能谱仪对涂层表面的组成及含量采取分析;采用自动划痕仪测定涂层结合力;用高温热处理炉对涂层进行高温抗氧化实验。结果表明:基材经多弧离子镀膜,其表面均匀平整、致密度高,但有一定量的微孔洞和大颗粒。镀有TiAlSiN涂层的试样平均硬度达到1971.4HV_0.2。镀有TiAlSiN涂层的试样与原始0Cr15Ni5Cu2Ti钢的相比,其氧化速率远低于原始0Cr15Ni5Cu2Ti钢的,而高温抗氧化性优于原始0Cr15Ni5Cu2Ti钢。划痕实验结果表明:膜基结合力约10N,此次实验涂层与基材的结合力较低。