A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication

The defect of process equipments is a major factor that impairs the yields in the mass production of semiconductor wafer fabrication and it is a main supervision means to use high-resolution defect inspection tools to detect and monitor the defect damage. Due to the high investment costs of these inspection tools and the resulting decrease in the throughput, how to improve the sampling rate is an important issue for the associated inspection strategy. This paper proposes a new concept and implementation of virtual inspection (VI) to enhance the detection and monitoring of defect in semiconductor production process. The underlying theory of the VI concept is that the state variables identifications (SVIDs) of process equipments can reflect the process quality effectively and loyally. The approach of VI is to combine the application of the fault detection and classification (FDC), and the defect library and the re-engineering of inspection procedure to reach the full-scope of strategic objective. VI enables the defect monitoring to enter a new era by promoting the monitoring level of defect inspection from the previous lot-sampling basis to the wafer-sampling level, and hence upgrades the sampling strategy from random-sampling to full and right-sampling. In this study, various typical defect cases are utilized to illustrate how to create VI models and verify the reliability of the proposed approach. Furthermore, a feasible architecture of the VI implementation for mass production in semiconductor factory is presented in the paper.     

基于灰色关联分析法的软件缺陷类型预测

灰色关联分析法是一种描述元素之间影响程度的分析法,适合于小项目数据集。小项目数据集制约着传统的软件缺陷类型的预测方法,使得预测的结果往往不够准确和可靠。因此在灰色关联分析法的基础上提出了特征子集选择、异常工程检测以及软件缺陷类型预测3种方法。通过实验的分析对比,验证了在灰色关联分析法的基础上,提出的软件缺陷类型预测方法的准确性和可靠性。     

阿海水电站围堰防渗墙缺陷修补施工

阿海水电站截流采用了大量的块石和钢筋石笼,在后续上游防渗墙施工过程中,因成槽部位地层结构复杂导致卡钻且处理困难,围堰无法闭气。经研究,采用了高压旋喷灌桨技术进行了缺陷部位的防渗处理。介绍了在特珠地层条件下,高喷施工参数的选择,以及浆液的调整与组合,并对关键技术处理措施及质量控制方法进行了阐述。施工完成后,防渗墙已经过两个汛期的运行,证明防渗效果满足工程需要,为同类基础的施工积累了经验。     

我国刑事被害人权利保护在执法上存在的缺陷及其完善

目前，我国刑事被害人的权利保护状况已得到了很大的改善，然而，在执法实践中公安司法机关对被害人权利的保护仍存有许多缺陷，包括立案、侦查直至审判、执行等诉讼环节都还有系列需改进之处。针对执法之现状，我们必须采取有效措施去加以完善。     

UV-vis and photoluminescent spectra of TiO<Subscript>2</Subscript> films

TiO₂ fims have been deposited on glass substrates using DC reactive magnetron sputtering at different oxygen partial pressures from 0. 10 Pa.to 0.65 Pa. The transmittance (UV-vis) and photoluminescence (PL) spectra of the films were recorded. The results of the UV-vis spectra show that the deposition rate of the films decreased at oxygen partial pressure P(O₂)≥0.15 Pa, the band gap increased from 3.48 eV to 3.68eV for direct transition and from 3.27 eV to 3.34 eV for indirect transition with increasing the oxygen partial pressure. The PL spectra show convincingly that the transition for films was indirect, and there were some oxygen defect energy levels at the band gap of the films. With increasing the O₂ partial pressure, the defect energy levels decreased. For the films sputtered at 0.35 and 0.65 Pa there were two defect energy levels at 2.63 eV and 2.41 eV, corresponding to 0.72 eV and 0.94 eV below the conduction band for a band gap of 3.35 eV, respectively. For the films sputtered at 0.10 Pa and 0.15 Pa, there was an energy band formed between 3.12 eV and 2.06 eV, corresponding to 0.23 eV and 1.29 eV below the conduction band. ZHAO Qing-nan : Born in 1963 Funded by Natural Science Foundation of Hubei Province, China.     

斜面焊口超声波探伤中的缺陷定位

详细介绍了在斜面焊口超声波探伤中采用声程调节扫描比例进行缺陷定位的计算方法，并给出了计算公式。     

夯扩桩桩头质量的控制

通过工程实例分析了影响夯扩桩桩头质量的因素,提出了控制夯扩桩桩头质量的措施,以进一步提高夯扩桩的质量.     

62A钢丝冷拔断裂问题分析

利用扫描电镜(SEM)、能谱分析仪(EDS)等手段,对62A钢丝在拉拔过程中出现的断裂问题进行了研究。通过对不同类型断口的分析结果发现,钢丝断口形貌主要分为平面状和杯锥状2大类,根据不同的断口形貌其断裂类型可分为脆性断裂和韧性断裂。在拉拔过程中的断裂主要是由钢丝内存在较大的夹杂物、元素偏析以及钢丝表面缺陷等原因造成的。     

核电用宽厚钢板探伤不格合原因分析

通过对宽厚钢板探伤不格合的缺陷分析,提出探伤不格合产生的主要原因是浇注过程中存在非正常减流、中心疏松和外来夹杂.于是对浇注过程作了改进,使宽厚钢板探伤合格率提高.     

MgO－CoO－NiO氧敏材料的缺陷化学及电导特性研究

本文用点缺陷理论分析了ＭｇＯ－ＣｏＯ－ＮｉＯ系氧敏材料的缺陷模型．并测量了ＭｇＯ－ＣｏＯ－ＮｉＯ材料的高温电导与氧分压的关系．在实验的基础上，研究了该材料的缺陷化学及电导特性，对其禁带宽度及缺陷的热力学参数进行了理论估算．实验结果与理论分析吻合得较好．