湿法刻蚀FI CD均一性的影响因素及提高刻蚀均一性的研究

随着高分辨率产品导入,TFT-LCD阵列段各项参数范围越来越小,工艺要求更为严格,为了更好地管控湿法刻蚀各项参数,本文以湿法刻蚀FI CD(Final Inspection Critical Dimension)均一性的影响因素及如何提高FI CD均一性为目的进行研究。首先,通过对湿法刻蚀设备参数(主要包括刻蚀液温度、流量、压力、浓度、Nozzle Sliding、Oscillation Speed、刻蚀时间等)进行试验,验证各项参数对FI CD均一性的影响。其次,对沉积工序、曝光工序以及产品设计等进行试验,获悉影响因素并进行改善。通过对湿法刻蚀设备自身参数的调整,如减少设备温度、流量、压力波动,使参数保持相对稳定状态,可有效改善湿法刻蚀FI CD均一性,FI CD的均一性可从1.0降低至0.5。通过对湿法刻蚀设备参数进行试验并做相应调整,湿法刻蚀FI CD均一性改善效果显著。     

用于各向同性湿法刻蚀中的氮化硅掩膜

在硅的各向同性湿法刻蚀过程中,一般选用HNA溶液(即氢氟酸、硝酸和乙酸的混合溶液)作为刻蚀液,而氮化硅以其很好的耐刻蚀性而优先被选为顶层掩膜材料.在硅片上刻蚀不同的结构,通常需要选择不同的刻蚀液配比.而不同配比对于氮化硅掩膜的刻蚀速率也不一样.分别用PECVD和LPCVD两种方法在<111>型硅片上沉积了厚度为560和210 nm的氮化硅薄膜,研究和对比了它们在8种典型配比刻蚀液下的刻蚀速率,为合理制作所需要厚度的氮化硅掩膜提供有益参考.     

HgCdTe器件中pn结结区扩展的表征方法

报道了液氮温度下激光束诱导电流(LBIC)和I-V测试两种在HgCdTe器件中pn结结区扩展的表征方法.通过LBIC和I-V测试,发现了p型HgCdTe材料中由B+离子注入成结和干法刻蚀成结对材料造成的损伤使得有效结区范围大于注入和刻蚀面积,并获得n区横向扩展.同时,通过对比,相互印证两种方法得到的测试结果一致.     

基于MATLAB的硅各向异性腐蚀过程模拟

根据硅各向异性腐蚀特点,在硅各向异性腐蚀速率图基础上,提出算法,利用数学软件MATLAB模拟了几种简单掩膜图形的腐蚀过程.程序从二维掩膜描述出发,找到相关晶面,产生动态的三维几何结构的输出.并推导出凸角补偿时补偿条的相关尺寸.其结果对MEMS加工有一定参考价值.     

一种用于药物释控系统的微针阵列及其制作方法的研究

 通过皮肤输送药物最大的障碍是皮肤最外层的角质层．传统的静脉注射用针只有刺透皮肤深入到深层组织内部,才能有效地输送药物,这容易引起感染和疼痛,给患者造成很大的不适．介绍了一种采用硅微加工技术制作的微针,它长度适中,既能穿透皮肤的角质层,又刺激不到深层组织的神经,实现无痛注射的目的．其加工工艺是采用硅的HNA(硝酸+氢氟酸+乙酸)腐蚀系统,是一种硅的各项同性的湿法腐蚀方法．     

纳米金属银、铜辅助化学刻蚀制绒金刚线切割多晶硅的研究

以金刚线切割多晶硅为原料,研究不同纳米金属催化剂(银、铜)辅助化学刻蚀对纳米结构引入及多晶硅片表面制绒效果的影响。研究结果表明:不同纳米金属物种诱导刻蚀对硅片表面形貌结构的影响巨大,相比于纳米银辅助刻蚀形成的硅纳米线阵列结构而言,纳米铜辅助刻蚀形成的倒金字塔结构在各方面的性能均比较突出,大面积微尺度的倒金字塔阵列结构可以更完美地融合表面低反射率和钝化不佳之间的矛盾,且硅片表面切割纹去除效果明显。当金属铜辅助化学刻蚀制绒15 min时,倒金字塔结构最规则、均匀,且在300~1 100 nm波段范围内,反射率由原片的41.8%降低至5.8%。同时倒金字塔形貌具有优越的减反效果和去除切割纹能力,使得制绒金刚线切割多晶硅片有望用来制备高效率的太阳能电池。     

Adhesion Science and Surface Analysis. Typical Examples

A number of surface modification methods using mechanical, chemical, electrochemical or physical processes have commonly been employed to treat adherend surfaces and improve adhesion in various bi- or multi-layered systems which play a key role in many advanced technologies. Results reported in this review paper deal more particularly with components of polymer-metal systems and provide typical examples of surface analysis obtained by x-ray photoelectron spectrometry (XPS), ion scattering spectrometry (ISS), low-energy electron induced x-ray spectrometry (LEEIXS), optically stimulated electron emission (OSEE) and Fourier transform infra-red spectrometry (FTIR). These examples concern, on the one hand, metallic adherends (aluminum, stainless steel, zinc-coated steel, gold) the surfaces of which were modified by cleaning, etching, oxidation, conversion or chemical grafting and, on the other hand, bonded joints (polyester-steel and epoxy-aluminum systems) which were delaminated using a peel test and a three-point flexure test, respectively.     

Comparison of methanol/hydrochloric,ferric chloride acid versus tribochemical silica coating for adhesion of resin cement to zirconium dioxide

This study compared air-abrasion and etching regimens on adhesion of resin luting agent to zirconium dioxide. Ceramic specimens (LAVA, 3 M ESPE) (N = 16) were embedded in acrylic resin and exposed surfaces were polished. The specimens were randomly assigned into four groups (n = 12, 3 specimens for each disc): SC: Air-borne particle abrasion (30 μm aluminum oxide particles coated with silica, CoJet, 3 M ESPE); MH: Heated chemical solution (Methanol-800 mL; 37% Hydrochloric Acid-200 mL; Ferric Chloride-2 g) at 100 °C for 30 min, MHP: Primer (Metal/Zirconia Primer, Ivoclar Vivadent) + MH, P: Primer only (Metal/Zirconia Primer). Cylindrical molds (internal diameter: 0.7 mm; height: 1.5 mm) were placed on each conditioned specimen, filled with resin cement (Multilink Automix) and photo-polymerized for 60 s. After 24 h, the molds were removed and the specimens were stored in distilled water at 37 °C for six months). Microshear test was performed in a Universal Testing Machine (1 mm/min). Failures types were classified as adhesive, mixed, or cohesive. In another set of specimens (n = 2 per group) contact angle measurements were recorded. Data were analyzed statistically using Kruskal–Wallis and Dunn’s tests (α = 0.05). The surface conditioning method significantly affected the mean bond strength (MPa) (p < 0.0001): SC(18.3 ± 0.3)^a < P(5.00 ± 0.07)^b < MHP(4.7 ± 0.08)^c < MH(0.84 ± 0.01)^c. While Group SC showed mainly adhesive (58%) and mixed (41.7%) failure types, groups MH, MHP, and P presented exclusively adhesive failures. SC, MHP, and P (29–32°) showed lower contact angle than MH (78.9°). Volume loss was the highest with MHP (9.92 μl) followed by SC (9.67 μl).     

Superficial modification in recycled PET by plasma etching for food packaging

An oxygen plasma treatment has been used to improve the adhesion of amorphous hydrogenated carbon (a‐C:H) films onto surfaces of recycled poly(ethylene terephthalate) (PET). Modifications produced by the oxygen plasma on the PET surface in chemical bonds and morphology were investigated by X‐ray photoelectron spectroscopy and atomic force microscopy, respectively. Contact angle measurements were used to study the changes in the surface wettability. Adhesion of the a‐C:H film onto the PET surface was investigated by the tape test method. It was observed that the improvement in film adhesion is in good correlation with the increase in surface roughness, due to plasma etching, and with the appearance of oxygen‐related functional groups at the surface. The results of this study indicate that a‐C:H‐coated recycled PET can be used in food packaging. The a‐C:H film could be used as a functional barrier to reduce or prevent migration of contaminants from the polymer to the package content. © 2009 Wiley Periodicals, Inc. J Appl Polym Sci, 2010     

FeCl_3溶液中影响Cu蚀刻速度的因素

采用喷蚀的方法,研究了Ｃｕ在２．５ｍｏｌ／ＬＦｅＣｌ３溶液中影响蚀刻速度的几个因素。用ＸＲＤ方法分析了Ｃｕ蚀刻表面的成分,证实了蚀刻过程中ＣｕＣｌ钝化膜的形成;研究了蚀刻速度随蚀刻时间的变化规律,给出了初步的解释;同时研究了蚀刻液中不同氯化物添加剂对蚀刻速度的影响,结果表明阴离子不是影响蚀刻速度的唯一因素,不能排除阳离子的影响;同时对蚀刻液的溶铜能力及失效蚀刻液的再生进行了初步的研究。