Towards implementation of a nickel silicide process for CMOS technologies

In this paper, we review some of the advantages and disadvantages of nickel silicide as a material for the electrical contacts to the source, drain and gate of current and future CMOS devices. We first present some of the limitations imposed on the current cobalt silicide process because of the constant scaling, of the introduction of new substrate geometries (i.e. thin silicon on insulator) and of the modifications to the substrate material (i.e. SiGe). We then discuss the advantages of NiSi and for each of the CoSi₂ limitations, we point out why Ni is believed to be superior from the point of view of material properties, miscibility of phases and formation mechanisms. Discussion follows on the expected limitations of NiSi and some of the possible solutions to palliate these limitations.     

低密度微泡沫压井液的研究与应用

吐哈油田部分区块地层压力系数小于0.9,常规水基压井液对储层伤害大,若使用油基压井液成本高,环境污染严重。通过实验优选出了一种低密度水基微泡沫压井液。该压井液具有密度低、泡沫强度高、稳定性好、携砂能力强等优点。现场应用表明,低密度微泡沫压井液稳定时间大于48 h,密度在0.70~0.99 g/cm3之间可调,抗油污染能力强,抗油大于8%,抗温在100℃以上,岩心污染后渗透率恢复值大于80%;并且施工方便,成本低,具有储层保护能力,使用微泡沫压井液的井表皮系数在0.20~2.34之间。     

WuM1-1羽状分支水平井充气钻井液技术

WuM1-1井由1口多分支水平井和1口采气的直井组成。该井斜井段短,井斜率在30°/100 m以上,主井眼和10个分支井段总进尺6182 m,98%以上在煤层中钻进,煤层脆、压实性较好,更易发生掉块。为满足钻井对井壁稳定性、润滑性、井眼净化以及煤层保护等的要求,采用钾铵基聚合物防塌钻井液进行充气欠平衡钻井,在钻进中保持钻井液有合适的粘度、切力,选用合适的注气压力和注气量以及当量钻井液密度;每钻完一个立柱坚持循环几分钟,上下划眼一次,并泵入CMC高粘钻井液,配合有效使用固控设备,尽量使井眼干净;复配使用粉末状固体润滑剂和液体润滑剂。该钻井液性能稳定,易于维护,悬浮携岩能力强,润滑性好,井眼畅通,保证了WuM1-1井安全、快速、优质施工。该井在煤层钻进中无阻卡现象,井壁稳定,没有出现井壁掉块或井垮现象,水平连通一次成功,10口分支井悬空侧钻一次成功,只用57 d即顺利完井,比该地区常规钻井快49倍。     

Chemische Zusammensetzung und Mikrostruktur polymerabgeleiteter Gläser und Keramiken im System Si–C–O. Teil 2: Charakterisierung der Gefügeausbildung mittels hochauflösender Durchstrahlungselektronenmikroskopie und Feinbereichsbeugung

Chemical Composition and Microstructure of Polymer‐Derived Glasses and Ceramics in the Si–C–O System. Part 2: Characterization of microstructure formation by means of high‐resolution transmission electron microscopy and selected area diffraction Liquid or solid silicone resins represent the economically most interesting class of organic precursors for the pyrolytic production of glass and ceramics materials on silicon basis. As dense, dimensionally stable components can be cost‐effectively achieved by admixing reactive filler powders, chemical composition and microstructure development of the polymer‐derived residues must be exactly known during thermal decomposition. Thus, in the present work, glasses and ceramics produced by pyrolysis of the model precursor polymethylsiloxane at temperatures from 525 to 1550 °C are investigated. In part 1, by means of analytical electron microscopy, the bonding state of silicon was determined on a nanometre scale and the phase separation of the metastable Si–C–O matrix into SiO₂, C and SiC was proved. The in‐situ crystallization could be considerably accelerated by adding fine‐grained powder of inert fillers, such as Al₂O₃ or SiC, which permits effective process control. In part 2, the microstructure is characterized by high‐resolution transmission electron microscopy and selected area diffraction. Turbostratic carbon and cubic β‐SiC precipitate as crystallization products. Theses phases are embedded in an amorphous matrix. Inert fillers reduce the crystallization temperature by several hundred °C. In this case, the polymer‐derived Si–C–O material acts as a binding agent between the powder particles. Reaction layer formation does not occur. On the investigated pyrolysis conditions, no crystallization of SiO₂ was observed.     

Heavy Metals Bioremediation from Polluted Water by Glass-Ceramic Materials

The objective of this research was to study the removal of cadmium and lead from an aqueous solution through a biological treatment. For this purpose a glass-ceramic material was manufactured from industrial and urban wastes. Biofilms of microorganisms found in wastewater were developed on its surface, and continuous tests were conducted in the presence and absence of the biofilm to analyze the glass-ceramic's ability to remove the heavy metals from an aqueous environment. The results suggest that this bioremediation process, developed on an industrial scale, could represent an alternative to the chemical processes currently used.     

Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

The effect of a thin RuO_x layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuO_x/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuO_x/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no formation of a thin RuO_x layer at the RuO_x surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film by pre-annealing leads to the formation of a thin RuO_x layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity of diffusion paths. In particular, the RuO_x layer in a nonstoichiometric state is changed to the RuO₂-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer. Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the RuO_x/TiN/poly-Si/Si contact system.     

NSA-500-1型氩弧焊机VD9不同接法对引弧和稳弧的影响

从一起NSA－500－1型氩弧焊机故障，分析其高压脉冲旁路二极管VD9不同接法对引弧、稳弧及设备安全的影响。     

热作模具钢表面激光堆焊耐磨合金层的研究

本文主要通过在H13钢上用大功率CO_2激光束进行堆焊,阐述了激光堆焊工艺变化对堆焊组织和性能的影响,在本试验条件下,得到了高密度弥散金属化合物组织的激光堆焊层,平均硬度为HV800,与基体呈冶金结合,耐磨性比H13模具钢提高149%。     

用于高频谐振器的PbTiO_3基压电陶瓷

传统的PZT压电陶瓷的相对介电常数较大,一般为1 000以上,用于高频谐振器不易与线路匹配;而PbTiO3基压电陶瓷的相对介电常数较小,一般仅为200左右,对于10 MHz以上频率的谐振器,用PbTiO3基压电陶瓷作为压电振子是最佳的选择。本文主要研究用于高频谐振器的MnO2和Nd2O3改性PbTiO3基压电陶瓷的性质。PbTiO3基压电陶瓷的性质的改善是与此种陶瓷的制备工艺,显微结构和电导机制紧密相关的。     

Microstructure of Feta Cheese Made Using Different Cultures as Determined by Confocal Scanning Laser Microscopy

ABSTRACT: The objective of this work was to observe the microstructure of feta cheese using confocal scanning laser microscopy. Low fat cheese and cheese containing capsule-producing cultures were made. The protein network was observed using the reflectance mode of the confocal microscope. Fat was stained by Nile red dye diluted with whey. More even distribution of fat with a larger number of smaller globules was observed in cheese made with noncapsule-forming culture compared to that made with the capsule-forming culture. Nonfat cheese had compact structure when made with noncapsule-forming culture which contrasted with the open structure observed in cheese made with the capsule-forming culture