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991.
本文描述了产生在软真空中的电子束及其特性,这种成本低廉的大功率电子束在微电子、光电子加工和等离子体化学方面有很大应用价值。文中给出了电子束的放电特性、强度空间分布和能谱的实测结果,对这种电子束的形成机理提出了新的见解。 相似文献
992.
As the minimum feature size of interconnect lines decreases below 0.5 urn, the need to control the line microstructure becomes
increasingly important. The alloy content, deposition process, fabrication method, and thermal history all determine the microstructure
of an interconnect, which, in turn, affects its performance and reliability. The motivation for this work was to characterize
the microstructure of various sputtered Al-Pd alloys (Al-0.3wt.%Pd, Al-2Cu-0.3Pd, and Al-0.3Nb-0.3Pd) vs sputtered Al-Cu control
samples (Al-0.5Cu and Al-2Cu) and to assess the role of grain size, mechanical stress, and crystallographic texture on the
electromigration behavior of submicrometer wide lines. The grain size, mechanical stress, and texture of blanket films were
measured as a function of annealing. The as-deposited film stress was tensile and followed a similar stress history on heating
for all of the films; on cooling, however, significant differences were observed between the Al-Pd and Al-Cu films in the
shape of their stress-temperature-curves. A strong (111) crystallographic texture was typically found for Al-Cu films deposited
on SiO2. A stronger (111) texture resulted when Al-Cu was deposited on 25 nm titanium. Al-0.3Pd films, however, exhibited either
a weak (111) or (220) texture when deposited on SiO2, which reverted to a strong (111) texture when deposited on 25 nm titanium. The electromigration lifetimes of passivated,
≈0.7 μm wide lines at 250°C and 2.5 × 106 A/cm2 for both single and multi-level samples (separated with W studs) are reported. The electromigration behavior of Al-0.3Pd
was found to be less dependent on film microstructure than on the annealing atmosphere used, i.e. forming gas (90% N2-10%H2) annealed Al-0.3Pd films were superior to all of the alloys investigated, while annealing in only N2 resulted in poor lifetimes. 相似文献
993.
Hall and drift mobilities in molecular beam epitaxial grown GaAs 总被引:1,自引:0,他引:1
V. W. L. Chin T. Osotchan M. R. Vaughan T. L. Tansley G. J. Griffiths Z. Kachwalla 《Journal of Electronic Materials》1993,22(11):1317-1321
A series of nominally undoped and Si-doped GaAs samples have been grown by molecular beam epitaxy (MBE) with Hall concentrations
ranging from 1015 to 1019 cm−3 and mobilities measured at 77 and 300K by Hall-van der Pauw methods. Drift mobilities were calculated using the variational
principle method and Hall scattering factors obtained from a relaxation-time approximation to permit cross-correlation of
experimental data with drift or Hall mobilities and actual or Hall electron concentrations. At 77K, both high purity and heavily
doped samples are well represented by either drift or Hall values since piezoelectric acoustic phonon scattering and strongly
screened ionized impurity scattering hold the Hall factor close to unity in the respective regimes. Between n≊1015 and 1017 cm−3, where lightly screened ionized impority scattering predominates, Hall mobility overestimates drift mobility by up to 50
percent and Hall concentration similarly underestimates n. At 300K, polar optical phonons limit mobility and a Hall factor
up to 1.4 is found in the lowest doped material, falling close to unity above about 1016 cm−3. Our calculation also agrees remarkably well with the Hall mobility of the highest purity MBE grown sample reported to date. 相似文献
994.
In this paper, we present some deterministic properties of separable and cross median filters. It is proved that in the absence of vertical binary oscillations, the roots of a separable median filter are included in a subset of root signals of the corresponding cross median filter. Moreover, the sufficient and necessary condition is given for a point to be invariant to cross median filtering. On the root structures of cross median filters, we indicate that there exist three different types of regions based on the one-dimensional features of rows and columns. Finally, an application example is discussed where the roots of separable and cross median filters are used in block truncation coding (BTC) for image compression. 相似文献
995.
996.
F. G. Johnson B. L. Olmsted Samuel Chen G. W. Wicks 《Journal of Electronic Materials》1993,22(3):331-334
The composition profile of an (AlAs)1/2(GaAs)1/2 tilted superlattice is characterized for the first time. The tilted superlattice sample is thermally disordered, and the
energy of the direct band gap photoluminescence peak is measured as a function of increasing layer interdiffusion. The shift
in the photoluminescence peak energy after completely disordering the tilted superlattice is 39 meV. A theoretical model is
used to simulate the change in band gap as a function of layer interdiffusion for several composition profiles. The profile
that gives the best fit to the experimental data is chosen. The tilted superlattice composition profile is found to be sinusoidal,
varying from Al0.40Ga0.60As to Al0.60Ga0.40As. 相似文献
997.
将自由空间光(FSO)通信链路的高速率优势与射频(RF)链路的可靠性优势互补结合,针对FSO/RF混合通信链路组网的物理层数据可靠传输问题,研究软切换机制下采用LDPC混合编码与2-PPM和16QAM调制的系统方案性能。混合系统FSO链路在Gamma-Gamma信道不同湍流强度与RF链路在Rician信道不同信噪比条件下的仿真结果表明,所述方案在软切换下达到1×10~(-6)误比特率时,不同条件下可获得1.3~8.0 dB不等的性能增益改善,显著提高在不同链路条件下FSO/RF混合通信系统的数据传输可靠性。 相似文献
998.
999.
本文从智能网的基本概念入手,论述了利用 ZXJ10程控交换系统为发展智能网业务提供支持功能的技术策略以及分阶段实现的过程,并对各个阶段能够实现的业务作了简要介绍。 相似文献
1000.
Image segmentation towards new image representation methods 总被引:1,自引:0,他引:1
Diogo Cortez Paulo Nunes Manuel Menezes de Sequeira Fernando Pereira 《Signal Processing: Image Communication》1995,6(6):485-498
Very low bit-rate video coding has recently become one of the most important areas of image communication and a large variety of applications have already been identified. Since conventional approaches are reaching a saturation point, in terms of coding efficiency, a new generation of video coding techniques, aiming at a deeper “understanding” of the image, is being studied. In this context, image analysis, particularly the identification of objects or regions in images (segmentation), is a very important step. This paper describes a segmentation algorithm based on split and merge. Images are first simplified using mathematical morphology operators, which eliminate perceptually less relevant details. The simplified image is then split according to a quad tree structure and the resulting regions are finally merged in three steps: merge, elimination of small regions and control of the number of regions. 相似文献