高电荷态ECR离子源

综述了中国科学院院近代物理研究所近几年来高电荷态ＥＣＲ离子源的最新进展。     

Amorphous carbon coated stainless separator for PEFCs

An SUS316L stainless steel separator was coated with amorphous carbon by using an electron cyclotron resonance (ECR) plasma sputtering technique, and used in a polymer electrolyte fuel cell (PEFC). Characteristics of this carbon film were investigated with Raman spectroscopy and XPS. Quantitative depth profiles and chemical depth profiles of the deposited carbon layer were measured with GD-OES and XPS, respectively. The contact resistivity between a carbon paper and the carbon coated SUS316L steel was also measured. The performance of PEFC single cells assembled with carbon coated SUS316L separators, uncoated SUS316L separators, and conventional carbon separators were compared. The results revealed that an assembled PEFC having carbon coated SUS316L separators provided better performance than one having uncoated SUS316L, and the PEFC showed comparable performance to one having conventional carbon separators.     

中子发生器ECR源智能控制的仿真研究

描述了模糊modular神经网络对中子发生器ECR离子源智能控制仿真实验的实现和仿真智能控制的过程。研究了学习过程中规则条数和学习率对理论模型计算结果平均偏差的影响和控制过程中计算束流的偏差随规则条数和学习率的变化。用3种不同的校正因子研究了对仿真实验过程的影响，并在智能控制中取得了满意的仿真实验结果。     

Electron cyclotron resonance plasma preparation of CdZnTe (211)B surfaces for HgCdTe molecular beam epitaxy

CdZnTe wafers were inserted into a multi-chamber processing facility without prior preparation, cleaned by exposure to an electron cyclotron resonance Ar/H₂ plasma, and used as substrates for molecular beam epitaxy of HgCdTe. Changes induced in the wafer near-surface region during the cleaning step were monitored using in situ spectroscopic ellipsometry. Ellipsometric data were subsequently modeled to provide the time evolution of the thickness of a native overlayer. Auger electron spectra were consistent with surfaces free of residual contamination and which had the stoichiometry of the underlying bulk. Surface roughness values of 0.4 nm were obtained ex situ using interferometric microscopy. Electron diffraction patterns of plasma prepared wafers heated to 185°C (the temperature required for HgCdTe molecular beam epitaxy) were streaked. Structural and electrical characteristics of epilayers grown on these substrates were found to be comparable to those deposited on wafers prepared using a conventional wet chemical process. This demonstrates an important step in an all-vacuum approach to HgCdTe detector fabrication.     

ECR直线等离子体装置的辐照实验性能优化

用于研究聚变反应堆中等离子体-材料相互作用的实验模拟装置已经基本完成开发与优化。该装置可以产生通用的低能-高密度等离子体,模拟聚变环境相关的等离子体参数来研究材料的可靠性,具有稳定可靠、运行参数范围广等优点。该装置主要包括电子回旋共振(ECR)等离子体源区、真空腔室、磁场线圈和诊断系统,使用磁场线圈和永磁体单元将等离子体约束在真空腔室之中,使等离子体在真空腔室内呈倒锥形。通过负偏压系统给予等离子体0~100 eV的入射能量,离子通量可达2.5×10²¹/m²·s,单次试验达到的剂量≥10²⁶/m²。可以产生各种等离子体,例如氢气、氘气、氩气、氦气和氮气,已达到不同的辐照试验效果^[1]。ECR直线等离子体辐照装置作为一个实验平台,可实现对PMI的实验分析。     

受控热核聚变研究进展

面向等离子体材料作为聚变等离子体和核反应堆结构之间的主要界面, 遭受恶劣的辐照条件, 为了提升对面向等离子体材料的改进研究, 实验室模拟聚变环境装置.基于已搭建完成的用于研究聚变反应堆中等离子体-材料相互作用的电子回旋共振(electron cyclotron resonance, ECR)直线等离子体装置, 使用有限元方法计算模拟了腔室内励磁线圈与永磁体叠加磁场的分布情况以及在此背景磁场下带电粒子在磁场中的运动轨迹.结果表明: 磁场模拟结果与实验数据较为符合, 共振面位置随线圈电流的增大而远离微波窗口.带电粒子轨迹模拟结果与实验中近似梨形等离子体束的分布一致, 且到达样品台的束流密度随着励磁线圈电流的增大而增大.该研究可为ECR直线等离子体装置的进一步优化提供参考.

     

高性能全永磁ECR离子源LAPECR2的研制

研制了一台体积和重量都较大、设计性能较高的全永磁电子回旋共振(Electron cyclotron resonance,ECR)离子源LAPECR2(Lanzhou all permanent magnetic ECRion source No.2 ).该离子源将用于中国科学院近代物理研究所320 kV高压平台,为其提供强流高电荷态离子束流.LAPECR2的研制采用全新的全永磁磁体结构设计,通过采用高性能的NdFeB永磁材料、优化的磁结构设计以及精确的计算,实测源体的磁场参数能达到高性能ECR离子源的设计要求.离子源采用较高频率的14.5 GHz微波馈入加热等离子体,波导直接馈入离子源以增强馈入微波的稳定性与效率.此外,还大量采用了一些有利于提高离子源高电荷态离子产额的关键技术,如铝内衬等离子体弧腔、负偏压盘、铝制等离子体电极、三电极引出系统、辅助掺气等.     

N型4H-SiC ECR氢等离子体处理研究

采用电子回旋共振(ECR)氢等离子体对n型4H-SiC(0001)表面进行处理,并利用原位高能电子衍射(RHEED)对处理过程进行实时监控。在200°C～700°C温度范围内获得的RHEED图像成条纹状且对比清晰,表明SiC表面原子排列规则,单晶取向性好,计算表明表面未发生重构。用X射线光电子能谱(XPS)技术对表面成分进行分析,结果显示,表面C/C-H污染物被去除、氧含量降低。     

电子回旋共振等离子体技术新进展

叙述了电子回旋共振（ＥＣＲ）微波等离子体技术的基本工作原理，主要特点以及发展概况，着重从ＥＣＲ等离子体实验系统、工艺应用、诊断技术和机理研究等方面对ＥＣＲ技术进行了讨论。由于ＥＣＲ微波等离子体技术具有密度高、电离度大、工作气压低、表面损伤小等特点，在反应离子刻蚀（ＲＩＥ）、等离子体化学气相淀积（ＣＶＤ）和溅射方面具有广阔的应用前景。     

WILD-A10仪地球曲率校正应补充的一项

WILD -A1 0仪带地球曲率自动改正装置的 77点方格网量测精度有时很低 ,达不到 0 .0 5‰。其原因是地球曲率自动改正装置机械部分有故障。因此 ,不但应对地球曲率自动改正装置进行通常的三项检校 ,还应补充地球曲率自动改正装置的触头与地球曲率自动改正板吻合性检校。