Use of a neural network to link AFM etch patterns to plasma parameters

Plasmas play a critical role in depositing thin films or etching fine patterns while manufacturing integrated circuits. A new model for plasma diagnosis is presented. This was accomplished by linking atomic force microscopy (AFM) to plasma parameters using a neural network. Experimental AFM data were collected during the etching of silicon oxynitride films in C₂F₆ inductively coupled plasma. Surface roughness of etched patterns was characterized by means of discrete wavelet transformation. This led to the construction of three vertical (type I), diagonal (type II), and horizontal (type III) wavelet coefficient-based models. The performance of diagnosis models was evaluated in terms of the prediction and recognition accuracies. Both accuracies were optimized as a function of the number of hidden neurons. Comparisons revealed that the type I model yielded the largest recognition and the smallest prediction error. This was demonstrated even under stricter monitoring conditions. More improved diagnosis is expected by enhancing AFM resolution.     

Austenitizing treatment influence on the electrochemical corrosion behavior of 0.3C-14Cr-3Mo martensitic stainless steel

Effects of austenitizing treatment temperatures on aqueous corrosion properties of martensitic stainless steels were investigated by electrochemical tests (potentiodynamic test, potentiostatic test and electrochemical impedance spectroscopy), and surface analyses (optical microscopy and XRD). The results of potentiodynamic test revealed that the breakdown potential increased with the increased austenitizing temperature, indicating increased relative resistance to initiation of localized corrosion. EIS measurements showed that MSS3 (1030 °C) exhibits larger polarization resistance value than MSS1 (970 °C) and MSS2 (1000 °C) at passive and breakdown states. This was caused by decreasing the amount of Cr-rich M₂₃C₆ carbide which acts as preferential sites for pitting corrosion.     

激光冲击诱发相变的实验研究

本对激光冲击是否可以诱发相变进行了试验研究。用功率密度为１．０６×１０＾８Ｗ／ｃｍ＾２的激光器冲击Ｔ８钢表面。实验结果表明激光冲击处理使Ｔ８钢的表面显微硬度有所提高并可以发生马氏体相变。冲击处理后材料表面硬度提高了两倍，认为相变是Ｔ８钢表面硬度提高的原因之一。     

轴端沟槽底部激光强化工艺参数优化研究

分析了选用不同激光能量密度对HT300进行表面强化处理时，材料表面呈现的四种状况；未相变硬化、相变硬化、表面微熔与表面熔凝的金相组织。根据工艺要求，选取相变硬化方法对轴端沟槽底表面进行处理。分析了工件激光处理方法并通过试验研究，寻找轴端沟槽底部激光强化工艺参数；激光功率（P）、光斑直径（D）及扫描速度（V）的优化组合。硬度测试及耐磨性能试验表明：激光相变处理和激光熔凝处理后轴端沟槽底部表面较表面感应淬火硬度分别提高7%和34%，绝对磨损体积分别下降了13%和25%。实践证实，对轴端沟槽底部激光相变硬化处理方法较其他表面处理方法工艺简单，加工工件符合技术要求，试验结果对零件表面处理提供了可靠依据。     

高炉鼓风机就地扩容改造方案及经济效益

介绍了利用高炉鼓风机基础实施不易地扩容改造的设计工艺方法，该方法不仅降低了设计、施工、安装费用，而且缩短了施工周期，降低了固定资产投资。     

提高综合勘测实力开拓岩土工程市场

随着西北勘测设计研究院（以下简称西北院）勘测总队所承担的黄河龙￣青段、白龙江流域等河段前期综合勘测工作的相继结束，拥有２０００多名职工的勘测队伍面临着何去何从的重大选择。在此转折关头，勘测总队面对现实，审时度势，抓住机遇，开拓前进，及时转轨变型，制定了本单位发展的战略和方向，使勘测总队由单一勘测业务转变为集勘测与岩土工程施工为一身的新型综合队伍。几年来，经过全体职工的奋发努力，缍获得了１９９５年￣     

A Method of Combined SHPB Technique and BP Neural Network to Study Impact Response of Materials

Abstract:  A new method combining the split Hopkinson pressure bar (SHPB) technique with the back-propagation (BP) neural network program is proposed. By this method, the treated strain wave signals become smooth with less noises induced by the transverse inertia. Moreover, the dynamic rate-dependent constitutive behaviour of materials can be identified, without any pre-assumption of a constitutive model. It is found that by taking the experimentally measured data of strain, strain rate and time as 'input' and the corresponding data of stress as 'output' of the BP neural network, the dynamic constitutive behaviour with internal damage or phase transformation evolution is easy to be identified, where the time could represent either the internal damage evolution or phase transformation process accompanied with the deformation process. It is emphasised that the data learnt by the BP neural network must include both loading and unloading processes, if the whole loading and unloading response is to be correctly predicted. The comparisons between the predictions and experimental results are in good agreement for both polyamide (PA) polymer (as an example of nonlinear viscoelastic materials) and Ti–Ni alloy (as an example of superelastic materials with stress-induced phase transformation).     

Studies on the corrosion behavior of cerium-implanted zircaloy-4 with GAXRD

In order to study the influence of cerium ion implantation on the aqueous corrosion behavior of zircaloy-4, specimens were implanted by cerium ions with a fluence range from 1×10¹⁶ to 1×10¹⁷ ions/cm² at maximum 150°C, using MEVVA source at an extracted voltage of 40 kV. The valence and elements penetration distribution of the surface layer were analyzed by X-ray photoelectron spectroscopy (XPS) and auger electron spectroscopy (AES) respectively. Glancing angle X-ray diffraction (GAXRD) was employed to examine the phase transformation due to the cerium ion implantation in the oxide films. Three-sweep potentiodynamic polarization measurement was employed to value the aqueous corrosion resistance of zircaloy-4 in a 1 N H₂SO₄ solution. It was found that a significant improvement in the aqueous corrosion behavior of zircaloy-4 implanted with cerium ions compared with that of the as-received zircaloy-4. The improvement effect will declined with raising the implantation fluence. The bigger is the fluence, the less is the improvement. Finally, the mechanism of the corrosion behavior of the cerium-implanted zircaloy-4 is discussed.     

SKYPE在远程英语教学方面的实时应用

SKYPE系统是目前世界上最流行的互联网远程视频、音频、文字实时交互平台，其音频、视频传播实时非常清晰，这对将远程教育拓展到家庭，特别是对推动远程英语教育的广泛性和普遍性能够起到很大的作用，本文就该平台的基本功能和性能做了介绍，并在远程英语教育方面的应用提出了实践的方法。