微型高压二维活塞泵的设计与容积效率

为满足对空间和质量要求严格的设备对液压泵小型化的要求,基于二维泵结构研发一种微型高压二维活塞泵.该泵的活塞具有转动和直动两个运动自由度,在导轨和滚轮的配合下,活塞的转动被转化为往复运动,从而完成吸排油的功能.通过求解压力特性方程得到排油腔压力的数值解,进而得出各部分流量损失和容积效率,并发现泵的困油和倒灌现象.基于分析...     

Study of Piezoelectrically Actuated Micropumps with Multiple Parallel Chambers

This study investigated the performance of the piezoelectrically actuated parallel micropumps. The displacement of the piezoelectric (PZT) actuator and the flow rate of the micropump were studied in terms of operating parameters. Using a nonlinear regression technique, empirical models of the micropumps were established based on the experimental data. The experimental results indicated that the displacement of the piezoelectric actuator increased with actuating voltage but decreased with frequency. The flow rate of the micropump was proportional to the applied voltage and demonstrated that the maximum flow rate occurred at an adequate frequency. When operated at a voltage of 140 V and a frequency of 20 Hz, the single micropump delivered a maximum flow rate of 91 µ 1/min. At the same input signal, the maximum flow rate of the double parallel micropump was 1.5 times that of the single micropump, and approximately twice that of the single micropump for triple parallel operation. Furthermore, the obtained non-linear regression formulae can be utilized to predict the flow rate of the micropump with multiparallel chambers.     

Piezoelectric diffuser/nozzle micropump with double pump chambers

To eliminate check valve fatigue and valve clogging, diffuser/nozzle elements are used for flow rectification in a valveless diffuser/nozzle micropump instead of valves. However, the application of this type of micropump is restricted because of its pulsating or periodic flow and low pump flux. In this paper, a diffuser/nozzle Si/Glass micropump with two pump chambers by IC and MEMS technology is designed. The fabrication process requires only one mask and one etch step, so that the fabrication has the advantages of low cost, short processing period, and facilitation of miniaturization. The pump is equipped with a glass cover board so as to conveniently observe the flow status. Pump-chambers and diffuser elements are fabricated by the anisotropic KOH-etch technique on the silicone substrate, and the convex corner is designed to compensate for an anisotropic etch. The driving force of the micropump is produced by the PZT piezoelectric actuator. The pump performance with both actuators actuated in anti-or same-phase mode is also researched. The result indicates that the micropump achieves great performance with the actuators working at anti-phase. This may be because the liquid flows steadily, pulse phenomenon is very weak, and the optimal working frequency, pump back pressure, and flow rate are both double that of the pump driven in same-phase.     

聚二甲基硅氧烷气动微型蠕动泵制作工艺的研究

聚二甲基硅氧烷(PDMS)气动微型泵由3个PDMS气动微阀构成,依靠3个微阀的蠕动作用实现输运液体的作用.PDMS气动微泵的关键制作工艺是液体通道的弧形化和PDMS层之间、PDMS层与玻璃基片之间的封接.实验证明AZ4620正性光刻胶所制作的阳模能形成剖面形状呈弧形的液体通道.采用等离子体氧化处理法封接技术实现了PDMS层之间、PDMS层与玻璃基片之间的封接,该工艺易操作,封接速度快,而且封接效果好.     

微流动系统的发展概况

概括介绍了微流动系统的发展情况 ,特别介绍了微型传感器、微型泵、微型阀、微型通道及微流动系统的结构特点     

Electro-magnetically actuated valveless micropump with two flexible diaphragms

We present a parallel dynamic passive valveless micropump, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve is wetly etched in a silicon wafer, the diaphragm is a polydimethyl siloxane (PDMS) film spun on a silicon wafer with embedded permanent magnet posts, and the coil is electroplated on a silicon substrate. Under the actuation of the magnetic field of the coil, the flexible diaphragm can be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, this paper designed a micropump. And the relative length (L/d) of the micropump's nozzle is 4. A 7×7 array of permanent magnetic posts is embedded in the PDMS film. Two diaphragms work in an anti-step mode, which can relieve the liquid shock and increase the discharge of the micropump. ANSYS and Matlab are adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3 A, 100 Hz current, the displacement of the diaphragm is more than 30 μm, and the discharge of the micropump is about 6 μL/s.     

Simulation of the fluidic features for diffuser/nozzle involved in a PZT-based valveless micropump

PZT-based valveless micropump is a microactuator that can be used for controlling and delivering tiny amounts of fluids, and diffuser/nozzle plays an important role when this type of micropump drives the fluid flowing along a specific direction. In this paper, a numerical model of micropump has been proposed, and the fluidic properties of diffuser/nozzle have been simulated with ANSYS. With the method of finite-element analysis, the increased pressure drop between inlet and outlet of diffuser/nozzle induces the increment of flow rate in both diffuser and nozzle simultaneously, but the increasing rate of diffuser is faster than that of nozzle. The L/R, ratio of L（length of cone pipe） and R （radius of minimal cross section of cone pipe） plays an important role in fluidic performance of diffuser and nozzle as well, and the mean flow rate will decrease with increment of L/R. The mean flow rate reaches its peak value when L/R with the value of 10 regardless the divergence angle of diffuser or nozzle. The simulation results in-dicate that the fluidic properties of diffuser/nozzle can be defined by its geometric structure, and accordingly determine the efficiency of micropump.     

A design of a miniature ultrasonic pump using a bending disk transducer

If a pipe end is faced at a piston-vibrating surface with a small gap in liquid, the liquid is suctioned into the pipe. The present ultrasonic pump is based on this phenomenon to induce flow. For a low-profile configuration, we introduce a 30-mm-diameter bending disk driven by a ring-shaped PZT element bonded on the back of the disk. The disk vibrator is softly supported by frames via O-rings at its circumference, and is worked at the fundamental resonance frequency of 19 kHz of the bending mode. A pipe is installed perpendicularly to the center of the disk vibrator with a small gap. To improve the pump performance, we seek for the optimum vibration distribution of the disk vibrator. When the thickness around the disk center becomes large, the shape of the vibration distribution near the center approaches to a piston vibrator. If the flatness of the vibration distribution is defined as the vibration amplitude just under the pipe edge divided by the vibration amplitude at the disk center, it is 92.0% for the original bending disk. The flatness of the new design became 98.1% as a result of the optimization of the thickness profile of the disk. The pump pressure became high as the flatness became large when the gap size was small enough. The maximum pump pressure of 20.6 kPa was achieved when the vibration velocity at the disk center was 1.0 m/s and the gap size was 10 μm, while the maximum flow rate of 22.5 ml/min. was obtained with the input electrical power of 3.8 W.     

A microfluidic flow-converter based on a double-chamber planar micropump

A microfluidic flow-converter that transforms an oscillatory flow into a steady-like flow in a reciprocating-type pumping device is successfully developed in this study. The flow quality at the outlet is found to be significantly improved. The present micro-device is composed of two single-chamber PZT micropumps in parallel arrangement and can be fabricated using simple micro-electro-mechanical-system (MEMS) techniques. Based on the concept of the electronic bridge converter, the flow rectification is supported by four passive planar valves. Two operation modes, in-phase and anti-phase, were used to test the performance of the present device. In addition, the flow characteristics at the outlet were examined by an externally triggered micro-PIV system. The results reveal that the current flow-converter provided both high volume and smoothly continuous flow rates at the outlet when it was in anti-phase mode. Moreover, the volume flow rate was linearly proportional to the excitation frequency within a specific frequency regime. This indicates that the flow-converter was easily operated and controlled. The present microfluidic flow-converter has great potential for integration into future portable micro- or bio-fluidic systems.