On the reliability of scanning probe based electrostatic force measurements

The dimensions of semiconductor devices rapidly decreasing, the detection and control of spatial inhomogeneities of material properties on a sub-μm scale becomes essential.For mapping various electrical properties with nearly nm-resolution, scanning probe techniques appear to be ideally suited. However, data evaluation always involves a transfer from measured to real properties by a device depending convolution procedure.We report on our results for different modes of electrical measurements, namely scanning Kelvin probe microscopy (SKM) and scanning capacitance microscopy (SCM) on various sample systems discussing the influence of experimental parameters. In addition, results of finite element simulations on this topic are presented.It turns out that the averaging function correlating real and measured data may appear quite simple, thus making a reliable reconstruction possible. On the other hand, the existence of surface charges can drastically change the results.     

Adhesion and Mechanical Properties of PNIPAM Microgel Films and Their Potential Use as Switchable Cell Culture Substrates

Thermoresponsive poly(N‐isopropylacrylamide) (PNIPAM) microgel films are shown to allow controlled detachment of adsorbed cells via temperature stimuli. Cell response occurs on the timescale of several minutes, is reversible, and allows for harvesting of cells in a mild fashion. The fact that microgels are attached non‐covalently allows using them on a broad variety of (charged) surfaces and is a major advantage as compared to approaches relying on covalent attachment of active films. In the following, the microgels’ physico‐chemical parameters in the adsorbed state and their changes upon temperature variation are studied in order to gain a deeper understanding of the involved phenomena. By means of atomic force microscopy (AFM), the water content, mechanical properties, and adhesion forces of the microgel films are studied as a function of temperature. The analysis shows that these properties change drastically when crossing the critical temperature of the polymer film, which is the basis of the fast cell response upon temperature changes. Furthermore, nanoscale mechanical analysis shows that the films posses a nanoscopic gradient in mechanical properties.     

拉拔力与模具结构的关系分析

对拉拔力进行了实测，分析了模具入口锥角及润滑条件对拉拔力的影响及影响模具寿命的因素，确定了模具入口锥角的大小及变化规律，为拉拔模结构优化设计提供了参考依据。     

SiO2胶体探针的制备及其在表面力测定中的应用

采用一种新方法——双向三维移动平台法制备胶体探针,该方法使用两个三雏移动平台,同时将CCD与长工作距离显微镜集成,组成视频监视系统来监控探针的整个制备过程,方便了操作。利用此自组装装置制备的二氧化硅胶体探针在原子力显微镜上进行力曲线测量,将分析数据与Ducker的经典论文进行对照,得到较为理想的结果。     

液体中基于动态微悬臂梁的质量检测技术

当利用微悬臂梁动态模式的基频谐振在液体环境检测微弱被测量时,液体中的流体动力阻尼导致检测灵敏度降低。针对此问题,提出了利用微悬臂梁的高次谐振进行质量检测的方法。对于相同的被测量质量变化,微悬臂梁的谐振次数越高,其频率偏移越大,从而达到比基频检测法更高的分辨力。以表面修饰三乙基氢硫基十二基铵层(敏感层)的微悬臂梁为传感元件,以CrO42-为被测物,在原子力显微镜上检测了敏感层吸附CrO42-前后,微悬臂梁的5~8次谐波频率的变化情况。结果显示,该质量检测法能检测出约0.82 ng的质量增量。     

人机共存环境下巡检机器人自主移动与避障方法

为提高人机混杂环境中移动机器人自主巡检效率,提出一种基于模糊逻辑理论的避障方法。通过分析人 类的社会行为规则,结合机器人的运动特性,建立移动机器人系统的数学模型,将人机距离、人的行为模式和人与 机器人间的相对速度参数进行模糊化处理,得出基于模糊推理方法的机器人速度变化决策,利用模糊控制规则,实 现模糊逻辑控制,并通过穿越和相遇2 种运动行为进行了实验验证。仿真结果验证了该方法具有抗干扰性和良好的 避障性能。     

正交车铣加工切削力仿真分析

针对正交车铣加工变深度、变厚度的切削特性,基于其加工原理采用数学方法建立切削力的理论模型,并在无偏心和偏心二种情况下分别仿真圆周刃和端面刃的切削力随铣刀转角的变化规律。通过切削参数对切削力影响规律的仿真结果分析表明,圆周刃在整个切削过程中起到主导作用;在相同切削参数条件下,随着进给量和偏心距的增大,切削力增大,而偏心切削力大于无偏心切削力。因此该切削力的理论模型为正交车铣加工机理的研究提供理论基础和参考依据。     

Ionically Mediated Mechanical Deformation Associated with Memristive Switching

Ionically mediated phenomena underpin the functioning of various devices, including batteries, solid oxide fuel cells, memristors, and neuromorphic devices. The ionic behavior corresponding to ionically mediated phenomena causes not only variations in the electrical properties but also mechanical deformation, which is crucial for device reliability. However, the interrelation between ionically mediated electrical properties and mechanical deformation has not been elucidated yet. This study investigates ionically mediated mechanical deformation accompanied by memristive switching in a TiO₂ single crystal through simultaneous conductive atomic force microscopy and electrochemical strain microscopy. A comprehensive analysis indicates the existence of a relationship between mechanical deformation and memristive switching based on the ionic behavior. Furthermore, an ionic state variable is used to simplify the interrelation between the electrochemical strain hysteresis and memristive switching associated with applied voltage. This study provides insights on the ionic behavior and can be extended to other systems for the general analysis of the relationship between mechanical deformation and electrical properties.     

Fabrication of Multiscale Gradient Polymer Patterns by Direct Molding and Spatially Controlled Reflow

Size variations of pattern spacing as well as gradient control of the as‐formed polymeric pattern via a spatially controlled reflow process are presented. Micro‐ and nanopatterns of polymethyl methacrylate (PMMA) in the form of line‐and‐space strips are first generated by capillary force lithography (CFL), and the residual layers are removed by ashing process. Subsequently, the exposed PMMA strips underwent a controlled reflow process above the glass transition temperature (T_g) while heating single or both sides of the substrate either in parallel to the line pattern (parallel reflow) or perpendicular to the line pattern (perpendicular reflow). As a result of this controlled reflow, a linear or a parabolic profile of pattern spacing is achieved depending on the heating mode. Furthermore, multiscale gradient patterns are formed with the spacing ranging from 98 nm to 4.23 μm (a difference of two orders of magnitude) in a single patterned layer using the original micropattern of 16 μm width and 8 μm spacing. In order to explain reflow behaviors, a simple theoretical model relating the normalized pattern width to the polymer viscosity is derived based on a leveling kinetics of polymer melt. Also, gradient PMMA channels are fabricated and bonded to a glass substrate, which are used to flow a liquid inside the channels by capillarity‐driven flow.     

微型器件的自装配技术

自组装技术起源于生物化学领域。20世纪90年代以来,这种新型的装配技术得到了关注并且经历了较快的发展,同时在微机电系统(MEMS)等研究领域显示了潜在的应用前景。本文阐述了自组装技术的发展,介绍了多种自组装方法,包括利用毛细力、重力以及亲水(疏水)力作为驱动的多种自组装过程,着重总结了自组装技术在MEMS领域的应用。