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51.
中频反应溅射SiO2膜与直流溅射ITO膜的在线联镀 总被引:2,自引:2,他引:0
多数ITO透明导电玻璃生产线在实现SiO2膜与ITO膜在线联镀时,应用SiO2靶射频溅射沉积SiO2膜工艺和ITO靶直流溅射沉积ITO膜工艺,如果SiO2膜应用硅靶反应磁控溅射工艺,存在这种工艺是否可以与ITO靶直流溅射沉积ITO膜工艺在线联用以及如何实现联用的问题。作者对现有的生产线进行了改造设计、加工,做了大量实验、质谱分析和多项测试研究,成功地实现反应溅射SiO2膜与ITO膜在线联镀,做到SiO2镀膜室的工作状态的变化基本上不影响ITO镀膜室的工艺条件。 相似文献
52.
Porous alumina films can be found in a wide variety of materials, including filters, thermal insulation components, dielectrics, biomedical and catalyst supports, coatings and adsorbents. Production methods for these films are as equally diverse as their applications. In this work, a hybrid process based upon chemical vapor deposition and gas-to-particle conversion is presented as an alternative technique for producing porous alumina films, with the main advantages of solvent-free, low substrate-temperature operation. In this process, nanoparticles were produced in the vapor phase by reaction of aluminum acetylacetonate in the presence of oxygen. Downstream of this reaction zone, these nanoparticles were collected via thermophoresis onto a cooled substrate, forming a porous film. Some deposited films were subjected to post-processing in the form of annealing in air. Fourier-transform infrared spectra and X-ray energy-dispersive spectroscopy analysis confirmed the production of alumina at processing temperatures above 973 K. X-Ray diffraction revealed that the films were amorphous. Film thickness, ranging from 30 to 250 μm, and the average deposition rate were determined from scanning electron microscopy results. From transmission electron microscopy, the average primary particle size was determined to be approximately 18 nm and the formation of nanoparticle aggregates was evident. Annealing of the films at temperatures ranging from 523 to 1173 K in the presence of air did not have an effect on particle size. The specific surface area of the powder composing the films ranged from 10 to 185 m2 g−1, as determined from nitrogen gas adsorption by the Brunauer–Emmett–Teller method. 相似文献
53.
A. Simon Z. Kntor 《Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms》2002,190(1-4):351-356
The formation and deposition of particulates by pulsed laser deposition of Si1−xGex semiconductor alloy thin films are discussed. Using Rutherford backscattering spectrometry with micrometer lateral resolution (micro-RBS) the film composition was measured with high accuracy, even in the presence of particulates with a high areal density of 20,000–30,000 particulates per mm2. We show that on impact of a particulate, the part of the thin film which is already deposited probably melts and its Ge content segregates to the surface. 相似文献
54.
《Drying Technology》2007,25(6):971-983
This article reviews developments in the simulations of spray dryer behavior, including the challenges in modeling the complex flow patterns inside the equipment, which are often highly transient and three-dimensional in nature. There appears to be considerable scope for using CFD simulations for investigating methods to reduce the rates of wall deposition and of thermal degradation for particles by modifying the air flow patterns in the chamber through small changes in the air inlet geometry. Challenges include building particle drying kinetics and reaction processes, as well as agglomeration behavior, into these simulations. The numerical simulations should be valuable supplements to pilot-scale testing, enabling more extensive and accurate optimization to be carried out than hitherto possible. New understanding of reaction processes and materials science, in combination with recent knowledge of the application of CFD to these problems, may enable new engineered powder products to be developed from the one-step spray-drying process. 相似文献
55.
Jinhong Shin Wyatt A. Winkenwerder Kyriacos Agapiou Gyeong S. Hwang 《Thin solid films》2007,515(13):5298-5307
Chemical vapor deposition growth of amorphous ruthenium-phosphorus films on SiO2 containing ∼ 15% phosphorus is reported. cis-Ruthenium(II)dihydridotetrakis-(trimethylphosphine), cis-RuH2(PMe3)4 (Me = CH3) was used at growth temperatures ranging from 525 to 575 K. Both Ru and P are zero-valent. The films are metastable, becoming increasingly more polycrystalline upon annealing to 775 and 975 K. Surface studies illustrate that demethylation is quite efficient near 560 K. Precursor adsorption at 135 K or 210 K and heating reveal the precursor undergoes a complex decomposition process in which the hydride and trimethylphosphine ligands are lost at temperatures as low at 280 K. Phosphorus and its manner of incorporation appear responsible for the amorphous-like character. Molecular dynamics simulations are presented to suggest the local structure in the films and the causes for phosphorus stabilizing the amorphous phase. 相似文献
56.
The influence of the substrate nature on the structure and morphology of ITO thin films grown by thermal evaporation in vacuum is investigated. The as-prepared metal films with Sn/In molar ratio of 0.1 were subsequently annealed for 2 h at 723 K in air (to obtain tin doped indium oxide), then annealed in vacuum at 523 K, followed by UV irradiation (to reduce the electrical resistivity). Irrespective of substrate nature, XRD data evidence a (222) preferential orientation in films. Substrate nature, annealing in vacuum and UV irradiation influence the structure, morphology, optical, electrical and surface wetting properties of the films' surface. 相似文献
57.
晶体硅薄膜电池制备技术及研究现状 总被引:2,自引:0,他引:2
晶体硅薄膜太阳电池近些年来得到广泛的研究和初步的商业化探索。根据所采用的晶体硅薄膜沉积工艺中温度范围的不同,晶体硅薄膜电池研究可分为高温路线和低温路线两个不同发展方向。本文分别从这两个方向综述了目前国外晶体硅薄膜电池制备技术的最新进展,最新实验室研究结果。报导了晶体硅薄膜电池商业化进展状况,指出了晶体硅薄膜电池实现产业化必须解决的问题。 相似文献
58.
单壁碳纳米管的制备及生长特性研究 总被引:1,自引:0,他引:1
采用Fe/MgO作为催化剂 ,催化裂解CH4制备了较纯的单壁碳纳米管 ,用TEM和Raman对碳纳米管进行了表征 ,对不同生长温度下制备的碳纳米管Raman径向呼吸振动峰 (RBM)进行了分析 ,研究了生长温度对单壁碳纳米管生长特性和结构特性的影响 相似文献
59.
钕电解阳极过电位的测定 总被引:2,自引:0,他引:2
用慢扫描示波法测定了钕电解的阳极过电位 .考察了温度、阳极电流密度、Nd2 O3添加量、电解质组成等因素对阳极过电位的影响 ,探讨了降低阳极过电位的可能途径 .结果表明 ,阳极过电位随阳极电流密度的增加而增大 ,随温度的升高而减小 ,一定范围内 ,阳极过电位与阳极电流密度的对数呈线性关系 ,满足塔菲尔方程 ;电解质中LiF和Nd2 O3浓度增加 ,阳极过电位降低 ;适当控制阳极电流密度、升高温度、增加电解质中LiF和Nd2 O3的浓度并尽可能减小极间距 ,均有利于降低阳极过电位 相似文献
60.
New and simple modification of vapor-liquid-solid process for Si nanowires growth based on microwave plasma enhanced chemical vapor deposition that uses solid-state Si target as a source of Si atoms was developed. The method was temperature and pressure controlled evaporation of solid phase of Si source in hydrogen microwave plasma. Aligned growth of Si nanowires was performed in local electric field by applying of constant negative bias to substrate holder. Deposited Si nanowires were studied by scanning electron microscopy (SEM), Raman and photoluminescence spectroscopy. Correlation between photoluminescence spectra and Si nanowires properties were studied. 相似文献