基于规则的光学邻近矫正中规则的相关处理

讨论了如何选择适当的规则,如何建立简洁实用的规则库,如何应用规则库.提出了四种主要的光学邻近矫正规则,在实验结果中列举了规则库中的部分数据.利用规则矫正后的版图光刻得到的硅片图形有了明显的改善.规则库的自动建立部分 (OPCL)是基于规则的光学邻近矫正系统的重要组成部分.     

无掩模激光干涉光刻技术研究

介绍了一种不用掩模的光刻技术———激光干涉光刻技术的基本原理,给出了干涉光刻技术的主要特点及一些可能的应用,并对实验系统和初步实验结果进行了分析。研究表明,激光干涉光刻具有大视场和分辨率高和视场宽等优点。     

激光晶体Nd:YVO4的形貌及生长缺陷

本文报道了应用环境扫描电镜（ESEM）和同步辐射X射线白光形貌术对采用提拉法生长出的Nd:YVO4晶体进行的形貌及生长缺陷的分析,获得了该晶体的开裂表面的ESEM形貌像以及取自晶体肩部和中间部位的（001）面的同步辐射白光形貌像,观察到了位错、包裹物等缺陷,可为生长高质量的Nd:YVO4晶体提供重要的启示.     

10～40Gb/s OEIC光接收机前端的最新研究进展

基于OEIC光接收机前端的集成方式和前放电路形式介绍了OEIC光接收机前端的最新研究进展.     

Measurement of Thermal Diffusivity at Low Temperatures Using an Optical Reflectivity Technique

An experimental arrangement has been developed for measuring the transient temperature responses and the thermal diffusivities of foil materials in the range of 10 to 300K by using the optical reflectivity technique. The cryogenic system with optical windows is designed to provide temperatures from 10 to 300 K. The front surface of a foil specimen is heated by a pulsed Nd:YAG laser. In situ measurement of the reflectivity of a continuous-wave He–Ne laser at the rear surface is conducted on the microsecond time scale. Using the temperature dependence of reflectivity, the transient temperature response is deduced. The thermal diffusivity is obtained by fitting Parker's formulae to the experimental data on temperature rise. Stainless-steel foils are chosen as samples and are studied in the region from 10 to 300 K. The accuracy is examined by comparing the present results with the theoretical temperature responses and thermal diffusivity data from the literature. Good agreement is observed.     

High temperature controlled atmosphere experiments for catalysts in a transmission electron microscope

A new transmission electron microscopy (TEM) specimen preparation procedure for high temperature experiments using a controlled atmosphere specimen holder (HTCASH) has been developed. It is designed for studying the microstructure of catalyst specimens before and after treatments in various gases. The procedure involved (1) finding a new formula for the embedding material, (2) devising a new method of making specimen supports, and (3) developing a method for removing the embedding material after the specimen has been microtomed. These techniques were then brought together to produce the ideal specimens for the HTCASH experiments. As an extra benefit, this procedure is also suitable for preparing specimens for ultrahigh resolution imaging experiments. The application of the new procedure in HTCASH experiments is illustrated through a high temperature reduction of a Co/SiO₂-923 catalyst.     

光纤拉丝生产中影响POD的因素

讨论了在光纤拉丝生产过程中，影响内涂层直径（POD）的几个重要因素。     

Intercomparison of scanning probe microscopes

Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been produced and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height standard and a two-dimensional lateral standard with a nominal pitch of 1 μm are reported.     

摩擦强度对薄膜表面形态的作用:原子力显微镜下的观察

展示了摩擦强度对聚酰亚胺薄膜表面形态的影响，原子力显微图像显示，机械摩擦会使聚酰亚胺薄膜表面上形成微沟槽，这些沟槽的表面具有丰富的表面精细构造。原子显微图像还揭示了机械摩擦可以改变被磨擦聚酰亚胺膜的表面形态。     

变长线扫描选择性激光烧结快速成型工艺的质量和效率优势分析

本文分析变长线扫描选择性激光烧结快速成型工艺对点扫描工艺的质量和效率优势.对二者光学系统结构作分析对比,对焦斑和线束上的功率密度作计算对比.变长线扫描系统采用的扫描方式和聚焦元件使线束宽度小且恒定,线束功率密度与点扫描焦斑的相当.变长线扫描选择性激光烧结快速成型工艺的质量优势是明显的,效率比点扫描工艺提高一倍左右.