跨尺度、高深宽比惯性微开关制作工艺研究

采用基于光刻和微电铸的多层UV-LIGA工艺在金属基底上制作了惯性微开关。研究了电铸面积对胶层内应力的影响,解决了胶层从基底脱落的问题。通过实验分析了电流密度对铸层层间结合力的影响,解决了铸层分层问题。通过煮沸无机酸的方式去除高深宽比金属微结构内的光刻胶,解决了SU-8胶去胶难的问题。最终,成功制作出外形尺寸为14 mm×11 mm×0.6 mm的跨尺度、高深宽比惯性微开关,其最小线宽为29.8μm,最大深宽比为17∶1,从而克服了目前制作惯性微开关时基底易碎、需溅射导电种子层、整体尺寸小、深宽比低的局限性。     

基于跨尺度字典学习的图像盲解卷积算法

在模糊核未知情况下利用模糊图像对清晰图像进行复原称为图像盲解卷积问题,这是一个欠定逆问题,现有的大部分算法通过引入模糊核和清晰图像的先验知识来约束问题的解空间.本文提出了一种基于跨尺度字典学习的图像盲解卷积算法,采用降采样图像训练稀疏表示的字典,并将图像纹理区域在该字典下的稀疏表示作为正则化约束引入盲解卷积目标函数中....     

跨尺度复合织构化摩擦副端面密封性能分析

在密封副的表面上引入大尺度的凹槽与小尺度微孔结合的跨尺度复合织构,提出椭圆形微孔与T形槽结合的复合织构化机械密封端面,并创建间隙液膜流体模型;根据质量守恒空化边界条件建立数学模型,采用有限单元法进行数值求解,研究不同长短轴比的椭圆微孔分别与T形槽复合对密封性能的影响,确定最佳复合构型;对比分析不同工况参数下,不同织构化端面密封的开启力、泄漏量等密封性能的变化规律。结果表明：最佳复合构型为长短轴比1.8的椭圆微孔与T形槽复合,在相同工况参数下,相较单一织构,跨尺度复合织构化端面密封具有更强的动压润滑效应、更低的泄漏量、更高的开启力,综合密封性能最好。研究结果可应用于机械密封织构化摩擦副端面的设计及优化。     

Programmable and Ultrasensitive Haptic Interfaces Enabling Closed-Loop Human–Machine Interactions

Intuitive, efficient, and unconstrained interactions require human–machine interfaces (HMIs) to accurately recognize users' manipulation intents. Susceptibility to interference and conditional usage mode of HMIs will lead to poor experiences that limit their great interaction potential. Herein, a programmable and ultrasensitive haptic interface enabling closed-loop human–machine interactions is reported. A cross-scale architecture design strategy is proposed to fabricate the haptic interface, which optimizes the hierarchical contact process. The synergistic optimization of the cross-scale architecture between carbon nanotubes and the multiscale sensing structure realizes a haptic interface with ultrahigh sensitivity and a wide detection range of 15.1 kPa⁻¹ and 180 kPa, which are improved by more than 900% over the performance of the common interface. The rapid response time of <5 ms and the limit of detection of 8 Pa of the haptic interface far surpass the somatosensory perception of human skin, which enables the haptic interface to accurately recognize interactive intents. A wireless pressure-data interactive glove (wireless PDI glove) is designed and realizes a round-the-clock operation, noise immunity, and efficient interactive control, which perfectly compensate for the flaws of typical vision and voice recognition modes.