LOCALIZED CORROSION OF MICROCRYSTALS OF 1Crl8Ni9Ti STAINLESS STEEL

The resistances against localized corrosion of 1Cr18Ni9Ti microcrystals with normal grainsize and bcc structure obtained hy magnetron sputtering have been compared.The two kindsof microcrystals with (110) and (211) textures respectively were obtained under differentsputtering conditions.Both microcrystals were found to have better resistance against local-ized corrosion than the crystal with normal grain.The microcrystal with (110) preferredorientation has larger resistance to localized corrosion than that with (211) preferredorientation.     

镀铬技术进展

镀铬层具有多方面的优异性能,在工业上已得到了广泛的应用。镀铬技术大体上可以分为电镀铬和真空镀铬。本文侧重于介绍真空镀铬技术。对于工业上通用的电镀铬技术及其近年来的进展也作了概括介绍。并对电镀铬和真空镀铬技术的特点作出了对比说明,还讨论了两种技术的未来发展趋势。     

THE PREPARATION AND CHARACTERISTICS STUDY OF TiNxOy SPECTRAL SELECTIVE ABSORBING FILM BY MAGNETRON SPUTTERING

Spectral selective absorbent film is a crucial factor for the solar heating device. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9% titanium as the target and is copper slice as the substrate. In this article, the optical characteristics and microstructure of TiNxOy thin film were studied. Inputing O2 can decrease the reflection of the visible lights, and double layer film can get good absorption for solar energy.     

Theoretical prediction and experimental realization of transition metal doped rutiles as diluted magnetic semiconductors

1. Introduction The new research area of ‘spintronics’ seeks to extend the properties and applications of electronic devices by making use of the spin of electrons in ad- dition to their charge. The development of magnetic semiconductors would be compatible with standard semiconductor technology and open new opportuni- ties. The so-called diluted magnetic semiconductor (DMS) is used to denote the no magnetic semicon- ductor doped with magnetic ions, and there have been considerable progress…     

基于环形微热板的ZnO微气体传感器设计

提出一种新型的设有环形结构微热板的硅基ZnO微气体传感器。利用ANSYS软件,将环形电极结构与传统的蛇形结构进行温度分布的模拟仿真,发现该结构能供给传感器更高的温度且中心温度分布均匀,进而解决了现有传感器功耗大的缺点。通过对RF磁控溅射ZnO薄膜的工艺摸索,得出了适宜作气敏薄膜的制备参数。该传感器在250℃下对（200-1000）×10-6CH4气体有很好的响应。     

Preparation of micro-patterned surfaces of Si-N-O films and their influence on adhesion behavior of endothelial cells

Microgrooves were prepared on Si(100) surface by photolithography and wet etching.Subsequently,Si-N-O films were deposited on the microgrooves by unbalanced magnetron sputtering(UBMS) and micro-patterned surfaces of Si-N-O films were obtained.The size of the micropatterns was measured by surface profilometer.The chemical composition of Si-N-O films were characterized by X-ray photoelectron spectrometry(XPS) and the wettability of the micropatterned surfaces was evaluated by contact angle measurement.The beh...     

微波铁氧体器件薄膜的制备及性能研究

该文采用RF磁控溅射工艺制备了射频薄膜电感用的铁氧体薄膜。为了降低铁氧体薄膜在高频下的涡流损耗、剩余损耗等,通过对铁氧体材料的磁特性分析,研究了不同的温度、成分掺杂对铁氧体磁性能的影响,获得了矫顽力为5.619 6Guss的铁氧体薄膜,并采用SEM、XRD对铁氧体薄膜表面结构进行了表征,采用VSM对薄膜磁性能进行了测试。     

Si基薄膜太阳电池绒面ZGO透明导电膜的研究

采用孪生对靶直流磁控溅射的方法在室温下制备高质量的Ga掺杂ZnO(ZGO)透明导电薄膜,用HCl腐蚀的方法获得满足光散射特性的绒面ZGO薄膜。制备的ZGO样品为具有六角纤锌矿结构的多晶膜,具有(002)方向的择优取向。腐蚀后,绒面ZGO薄膜的晶粒度减小,电阻率基本不变。在可见光范围内,绒面ZGO的反射率比平面ZGO的反射率下降了10%左右。将绒面ZGO薄膜应用于p-i-n型非晶Si薄膜太阳电池中,有效提高了太阳电池性能,使得电池的短路电流提高到17.79 mA/cm2,电池的转换效率增加到7.23%。     

衬底温度对反应溅射TiN_x薄膜结构与电阻率的影响

采用反应磁控溅射方法,在不同Si(100)衬底温度下,制备出了TiNx薄膜。通过X射线衍射(XRD)、扫描电子显微镜(SEM)对TiNx薄膜的物相、微观结构进行了表征,采用电子能谱仪(EDS)测定了TiNx薄膜的成分,运用四探针测试仪测量了TiNx薄膜的电阻率,研究了衬底温度对溅射TiNx薄膜结构与电阻率的影响。研究结果表明:衬底温度从室温升高到600℃时,随着温度升高,TiNx薄膜的(111)晶面衍射峰逐渐增强,500℃后减弱;(200)晶面衍射峰在300℃时最强,之后减弱。随着衬底温度的升高,TiNx薄膜的晶粒逐渐增大,300℃达最大后减小。随着衬底温度升高,TiNx薄膜的N/Ti原子含量比降低,200℃时降到最低为0.99,随后升高,500℃时最高为1.34,随后再次降低。N/Ti原子含量比与薄膜电阻率呈明显反比变化。     

磁控溅射AI／Pb纳米多层膜调制结构研究

用磁控交替沉积制备Al／Pb纳米多层膜,运用XPS,AFM,TEM考察表面状况及膜结构．结果表明,实验条件下,当Al层厚60nm时,Pb子层标定厚度从20nm增至30nm,可形成较完整埋层调制结构．随Pb层厚度增加,连续性变好、表面糙度降低,Al层对Pb层表面糙度克服能力提高,改善层状结构完整性．多层膜中Al,Pb子层均存在（111）择优取向特征,由fcc结构的表面自由能最小化引起．