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11.
Copper films with (1 1 1) texture are of crucial importance in integrated circuit interconnects. We have deposited strongly (1 1 1)-textured thin films of copper by atomic layer deposition (ALD) using [2,2,6,6-tetramethyl-3,5-heptadionato] Cu(II), Cu(thd)2, as the precursor. The dependence of the microstructure of the films on ALD conditions, such as the number of ALD cycles and the deposition temperature was studied by X-ray diffraction, scanning electron microscopy (SEM), and transmission electron microscopy. Analysis of (1 1 1)-textured films shows the presence of twin planes in the copper grains throughout the films. SEM shows a labyrinthine structure of highly connected, large grains developing as film thickness increases. This leads to low resistivity and suggests high resistance to electromigration. 相似文献
12.
This investigation focuses on the correlation between the crystallographic orientation of grains with respect to magnetic
properties in Co-Cr films. Based on a distribution measured for the (0002) crystallographic pole densities, modified formulae
describing the texture were used to calculate the coercivity Hc, the squareness ratio Rs (Mr⊥/TMs) and the anisotropy field
Ha for Co-Cr films. In general, calculated values for the coercive force He agreed well with the measured values. The calculated
Rs⊥. values were much larger than the measured ones, however, indicating that the influence of the demagnetizing field and
the magnetostriction on the orientation of the magnetization cannot be neglected.
On leave from Institute of Computing Technology, Academia Sinica, P.O.Box 2704-6, Beijing, P.R. China. 相似文献
13.
冷轧形变量对钛板材再结晶织构形成的影响 总被引:1,自引:0,他引:1
采用三维晶体学取向分布函数(CODF)分析法研究了工业纯钛板材不同冷轧形变量对织构形成的影响。结果表明,冷轧形变量为50-70%时,再结晶退火后形成了(2118)(0110)和(1018)(1210)的部分纤维织构,而在30%较低或86%较高的形变量冷轧时,形成典型的轧制织构(2115)(0110)和再结晶织构(1013)(1210)型式。 相似文献
14.
ABSTRACT: Texture changes during ripening of Port Salut Argentino cheese for different sampling zones were studied. Compression relaxation tests were performed and results were analyzed using both Maxwellian and Peleg's models. Elastic equilibrium modulus obtained from the Maxwellian model decreased from 1.22 to 0.11 104 Pa during ripening. The constants derived from Peleg's model, k1 and k2 , diminished with ripening time from 1.18 to 0.71 min and from 1.27 to 1.12, respectively. Asymptotic equilibrium modulus from Peleg's model decreased from 0.95 to 0.07 104 Pa during ripening. Rate parameters derived from a 1st order kinetics applied to both equilibrium moduli showed that the decrease was faster in the external zone (0.0846 d−1 ) than in the central zone (0.0368 d−1 ). The correlation between equilibrium moduli, salt concentration, moisture content, and maturation indexes was obtained with a determination coefficient of 0.76. 相似文献
15.
Banded textures produced in a thermotropic liquid crystal polymer by shearing between glass slides are examined by using both transmission electron and polarized light microscopy. The periodic variation in director orientation about the shear axis, as measured by light microscopy, is shown to be distinctly different from that indicated by electron diffraction. Measurements of birefringence and observation of Zernicke phase contrast indicate periodic variations in optical properties of the polymer, in step with the bands. Such effects are accounted for in terms of a synchronous rotation of the planar aromatic groups about the molecular chain axes. Evidence for an out-of-plane component of molecular orientation is also presented. 相似文献
16.
The microstructures of Cu films deposited by the self-ion assisted, partially ionized beam (PIB) deposition technique under
two different accelerating potentials, 0 KeV and 6 KeV, are compared. The 6 KeV film shows a bimodal (111) fiber and (100)
fiber texture with an abundance of twin boundaries and a relatively large average grain size with a typical lognormal distribution.
The 0 KeV film consists of small, mostly (111) oriented grains with islands of abnormally large (100) grains. The controlling
factors for the abnormal growth of the (100) grains are discussed in relation to the observed microstructures, showing that
all factors necessary for abnormal (100) growth are present in the films. 相似文献
17.
碳/碳复合材料CVI工艺中热解碳形成机理的研究 总被引:1,自引:1,他引:0
对碳碳复合材料CVI或(CVD)工艺中热碳组织的类型,沉积机理等研究情况进行了简要的综述,并对其进一步研究提出了相应观点。 相似文献
18.
Jehane Ragai 《Journal of chemical technology and biotechnology (Oxford, Oxfordshire : 1986)》1985,35(5):263-269
Hydrous titania gels, precipitated from titanous chloride and aged in different aqueous media have different textural, thermal and structural properties as demonstrated by nitrogen adsorption, differential thermal analysis, X-ray diffraction and scanning electron microscopy studies. Ageing in ammonia leads to the development of microporosity, whereas ageing in water causes an extension of the pore system in the primary particles with little change in the surface texture. Heat-treatment of the precipitated gels prior to ageing seems to afford a certain stability to the primary particle by allowing hydroxo and oxo bridges to be formed, thus leading to the formation of a more rigid structure. The nature of the ageing medium and its effect on the inner coordination sphere of the titanium ions are important parameters affecting the textural and thermal behaviours of the titania gels. 相似文献
19.
A self‐consistent texture model is implemented in the finite‐element code ABAQUS/Explicit®. Hardening of the slip systems is described by evolution laws for dislocation densities, and the Bauschinger effect is included. With these ingredients the cold rolling of an IF‐steel is simulated and the evolution of texture and anisotropy is examined. The use of the dislocation based hardening law is found to have a significant effect on the evolution of the anisotropic yield surface, but only very little influence on the texture. Furthermore, the hardening model is used to investigate the evolution of dislocation densities in differently oriented grains during plane strain compression. It is found that the dislocation density varies greatly depending on orientation, an observation which can help to explain the orientation dependence of recrystallization. 相似文献
20.
采用透射电子显微镜对不同压下量和再结晶初期的IF钢样品进行了研究.结果表明:无论是在较小形变量下还是在较大形变量下,形变不均匀性是普遍存在的;冷变形程度不同,织构组分不同,TEM形貌也不同;在再结晶的最初期,冷轧的形变组织演变为近乎等轴的亚晶,优先形成{111}〈uvw〉取向的晶核,晶核逐渐吞并周围的形变基体而长大,最终形成再结晶γ-纤维织构. 相似文献