微波ECR氧等离子体参数测量

利用双探针对微波ECR氧离子体参数进行了诊断研究,测量了等离子体的双探针伏安曲线并计算出电子温度和离子密度,分析了气压、微波功率、氧气流量等参数对等离子体参数的影响．结果表明：a．随着气压的升高,等离子体密度先增大后减小,电子温度逐渐减小．b．等离子密度随微波功率的增加先增加后达到饱和,电子温度受微波功率影响很小．c．随着氧气流量的增加,等离子体密度和电子温度都减小．     

电力设备中液位高精度变送技术的研究

本文提出在弹性元件表面用微波ECR溅射TiN薄膜实现电力设备的液位高精度变送的技术。由于TiN薄膜优异的机械特性，加之对敏感元件进行了二元线性插值法进行智能补偿，实现了液位测量的快响应和高精度。     

Production of large‐diameter uniform plasmas and control of electron temperature

In order to produce large‐diameter uniform plasmas, we have proposed two plasma sources: a plane electron‐cyclotron‐resonance (ECR) slotted antenna (PESA) source for ECR plasma production and a modified magnetron‐type (MMT) radio frequency (RF) source for RF plasma production. The PESA has magnet rings behind the slotted antenna to provide the magnetic field for the ECR. The MMT RF source provides high‐density uniform plasmas with the help of the LC resonance of auxiliary electrode placed parallel to the substrate. Both plasma sources produce large‐diameter uniform plasmas exceeding 30 cm in diameter. We have proposed a grid method for electron temperature control. By applying a negative dc voltage to the grid which separates a plasma‐processing region from a plasma production region, the electron temperature is decreased by one order of magnitude in the processing region. The same effect is obtained by changing the mesh size of a floating grid. The change of a slit between two grids also causes variation of the electron temperature. These techniques are quite effective for chemical reaction control in processing plasmas. © 1999 Scripta Technica, Electr Eng Jpn, 130(1): 1–7, 2000     

ECR等离子体刻蚀对玻璃光学和润湿性能的影响

为了提高太阳能电池盖板玻璃的透过率和自清洁性能,采用电子回旋共振( ECR)等离子体刻蚀与金属颗粒掩膜结合的方法刻蚀硼硅酸盐玻璃,采用扫描电镜( SEM)对刻蚀后玻璃表面形貌进行了观察,采用分光光度计测量了刻蚀前后玻璃透过率变化,并用接触角仪测定了刻蚀前后玻璃表面润湿性变化. 结果表明:经过ECR等离子体刻蚀后,在玻璃表面形成多山峰状纳米结构,平均尺寸约在80～140 nm,并有效提高了玻璃的可见光透过率,尤其是在有偏压刻蚀后透过率由原来91%提高到94. 4%,同时,玻璃表面亲水性增强,接触角θc由原来的47. 2°变为7. 4°,自清洁性能得到提高.     

A Method for Studying the Effect of Extreme Pressure Additives on Rubbing Metal Surfaces

When a film of lubricant separates two moving metal surfaces, it may be subjected to radical changes in temperature as the severity of the forces changes. This paper is concerned with a technique which measures the temperature of the lubricant after it leaves the area of rubbing metal surfaces. Special attention was given to: (A) the changing load conditions, (B) the changes in frictional force, (C) the effect of phosphate coating of the metal surface, and (D) the effect of different lubricant compositions. A modification of the Shell Four-ball EP Lubricant Tester has been made which permits automatic recording of a temperature-load curve which registers the temperature and frictional forces with either constant or changing load.

The work has shown that as the load increases at a uniform rate, there may be drastic and sudden changes in lubricant temperature which depend on lubricant composition as well as on metal surface composition.     

Preparation of diamond-like carbon by PBII-enhanced microwave ECR chemical vapor deposition

Diamond-like carbon (DLC) films were fabricated with methane on the surface of Si(100) wafer by combining plasma-based ion implantation and microwave ECR chemical vapor deposition. Raman scattering spectroscopy and X-ray photoelectron spectroscopy (XPS) were used to analyze the chemical structure of the DLC films and sp³ content of the DLC films was measured by XPS. Atomic force microscope was employed to investigate the surface morphology information of DLC films synthesized by different methods. The hardness of the films was evaluated using microindentation techniques. Results showed that plasma-based ion implantation enhanced ECR chemical vapor deposition could result in the better surface morphology, the higher adhesion strength and the enhanced hardness; in addition, the hardness of the DLC films was elevated by doping with nitrogen.     

A biasing method for plasma immersion ion implantation and deposition process to enhance coating adhesion

A multi-purpose high voltage pulse (HVP) supply was developed for PIII&D process, to provide bias voltage of DC, HVP and HVP + DC to the workpiece. The pretreatment (sputtering cleaning) of the workpiece, ion implantation, hybrid PIII&D or normal deposition, can be finished in one vacuum cycle. In the system a vacuum bend-guide microwave ECR source is used to produce plasma. Ti/TiN_x coating was prepared in this biasing manner with the PIII&D system. The result shows that the adhesion of the coating is enhanced with the HVP + DC composite biasing when the pulse amplitude and the DC voltage are chosen properly. The deposition rate can be maintained relatively high at an intermediate level between the conditions with pure HVP and DC bias. This work shows that the composite biasing is an effective method to improve the coating's properties in PIII&D process.     

冷水机组节能驱动与控制系统的选择与计算（二）

本文提出一种在工程设计中能快速列表计算、具有几种不同节能驱动与控制系统的冷水机组的综合部分负荷性能系数LPLV的方法。这些部基于LPLV的标准公式和它们的特性曲线族图表。比较它们的IPLV的计算结果的大小,即能选择高效驱动节能控制系统。