Application of Magnetron Sputtering in Fabricating MEMS Microbatteries

With the development of MEMS and the electronic devices's miniaturization and integration, a new kind of power sources that can satisfy the need for high energy density is required. Microbatteries are being researched abroad for their advantages of extreme thinness and long-term power supply. The development of MEMS microbatteries are reviewed and suggestedmagnetron sputtering in fabricating a high-performance microbattery. The technics as annealing are analyzed. The microbattery with a LiNi1-x Cox O2 cathode exhibited stable cycle ability and a high specific discharge capacity, which was attributed to the alloying effect of the LiNiO2and LiCoO2.     

ETFE薄膜在游泳馆中应用的防结露分析

通过分析围护结构不同部位发生结露的主要原因,有针对性地给出了防结露的解决方案,保证了游泳馆的正常使用。为双层薄膜围护结构系统的防结露设计提供了理论参考。     

动载滑动轴承瞬态油膜的全景实验研究

在搭建的滑动轴承实验台上,对大扰动工况下油膜全景空穴分布图像及油膜压力进行瞬态同步采集,并对图像进行后处理,以便于观察并与基于质量守恒边界条件的理论仿真结果对比,并对同一旋转周期内油膜空穴分布和不同工况下油膜压力进行对比分析。结果表明：油膜全景图像经过后处理转化为油膜原形展开图像后,图像直观,且更易于对比分析;在大扰动工况下,油膜空穴区域随最大动偏心位置迁移而迁移。     

镀厚膜工艺技术研究

通过分析现有镀膜工艺设备的电子束加热原理、结构和热量损耗,并针对实际应用过程中镀膜存在的问题,提出了对现有设备的改进措施,开发出一种新的镀厚膜工艺,较好解决了芯片镀厚膜的工艺技术难题和存在的镀厚膜工艺质量问题,大大提高了镀厚膜工艺的工作效率,极大地改善了特高压超大功率电力电子器件的电性能参数,收到了良好的效果.     

PE－AA辐射接枝共聚合的反应历程研究

研究了聚乙烯（ＰＥ）与丙烯酸（ＡＡ）、甲基丙烯酸（ＭＡＡ）的接枝共聚反应，探讨了接枝反应过程及特征：单体首先在ＰＥ表面接枝，然后进入内部进行本体接枝。研究表明：表面接枝为动力学控制，本体接技系扩散控制，单体在膜内的扩散与单体极性及聚合物的结晶度等有关     

微系统技术（连载六）─性能与测试

简要介绍了利用新型干涉仪测量微机械零件表面粗糙度的原理和方法，加载结构动摩擦系数测量，微系统器件残余应力分析和半导体器件表面电位测量。     

细小传热管内过冷水和空气高速两相流的换热特性研究

通过理论分析和实验,研究了细小传热管内水和空气高速两相流动的紊流换热特性,确认了这种两相流动具有很同的换热系数,其机理是薄液膜的蒸发换热。只要管壁面上存在液膜,在低壁温时就可以获得稳定的高换热性能。理论分析较好地预示了实验结果。     

磁性薄膜高频特性研究进展

对国内外近年来在磁性薄膜高频特性的研究进展进行了较为系统的总结.包括单层膜到多层膜的转变促进高频特性的改善;不同材料对(金属层/绝缘层)对多层膜高频特性的影响;一些特殊材料薄膜的高频特性;退火效应对磁性薄膜高频特性的影响;薄膜的微结构和薄膜特性的关系等几方面.     

氮化硼薄膜的脉冲激光沉积

用Ｑ开关ＹＡＧ激光器的１．０６μｍ的脉冲激光在硅及玻璃衬底上沉积了氮化硼薄膜。做了ＳＥＭ，ＸＲＤ，红外透射谱和紫外一可见透射谱等测试。确认为六方氮化硼（ｈ－ＢＮ）薄膜．并测出其禁带宽度、晶格常数等。     

Plasma assisted and manipulated deposition of thin film electrodes for micro batteries

The properties of the thin film electrodes have been the main factors for the performances of lithium or lithium ion micro batteries, i.e. thin film batteries. In this paper, plasma assisted and manipulated techniques have been developed for the fabrication of polycrystalline thin film cathodes, and of amorphous/nano-crystalline thin film anodes. The thin film electrodes were deposited by magnetron sputtering under precisely controlled plasma conditions. The deposition apparatuses were designed to obtain the desired film properties by equipping a long anode-shield or an inductive coil. Polycrystalline LiMn₂O₄ thin film cathodes with a smooth surface were deposited, which greatly reduced the cathode/electrolyte interface resistances. Amorphous/nano-crystalline Sn thin film anodes were obtained free of plasma induced large grains, which enhanced the cycling stability. The results have demonstrated that by careful designs of deposition apparatus the plasma conditions can be precisely controlled and therefore the thin film electrodes of desired properties can be obtained.