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101.
本征吸除硅片特性研究   总被引:1,自引:0,他引:1  
本文描述硅本征吸杂片的特性参数,如吸除区宽度、洁净度,氧沉淀密度、MOS电容寿命,介绍了表面态密度及残余间隙氧浓度的检测方法和工艺对参数的影响及参数之间的内在联系,文章还实验论证了不同参数水平对器件成品率的影响,建立了以MOS电容寿命为主导的参数控制方法,利用本文提供的控制参数,可使CCD-512器件成品率达60%,以上优品率≥85%。  相似文献   
102.
The effects of ion implantation and subsequent annealing on the microstructure of molybdenum have been investigated by transmission electron microscopy. The ions investigated were carbon, nitrogen, and tellurium. The ion-induced damage was found to give rise to grain boundary migration phenomena both during implantation and during subsequent annealing. Precipitation or ordering was found to occur for each ion on annealing.  相似文献   
103.
讨论了石英晶体监控法在光学薄膜镀制过程中的应用原理。通过与常规的光学监控法镀制的膜层相比较.证实了石英晶体监控法有助于提高光学薄膜的光学品质。试验表明所镀膜层的光学性能优异,在光通信和激光器等领域具有广阔的应用前景。  相似文献   
104.
王纳秀  朱毅  朱卫华  傅远  夏绍建 《核技术》2006,29(5):326-328
报道了同步辐射装置光束线关键部件之一的晶体单色器晶体热应变的ANSYS有限元模拟结果,并与实验结果进行了比对,模拟结果在实验误差范围(约士15%)内与实验数据符合,证明了模拟结果的可靠性.  相似文献   
105.
This study examines the comfort criteria of ASHRAE Standard 55-2004 for their applicability in hospital environments. Through an extensive field survey conducted in a university hospital in Taiwan, 927 sets of data have been collected. Above half of the measured samples failed to meet the specifications of Standard 55 comfort zone due to improper humidity control. Acceptability votes by patients exceeded the Standard's 80% criterion, regardless of whether the physical conditions were in or out of the comfort zone. Thermal neutrality, preference and comfort range are compared with other studies conducted in office environments and Standard 55 criteria. Results of chi-square tests revealed that patients’ physical strength significantly effected their thermal requirements. The net effect of health yields a marked difference in thermal neutrality and preference, and also in the comfortable temperature range.  相似文献   
106.
In this study, firstly, thermal analyses are investigated on a conventional (uncoated) diesel piston, made of aluminum silicon alloy and steel. Secondly, thermal analyses are performed on pistons, coated with MgO-ZrO2 material by means of using a commercial code, namely ANSYS. Finally, the results of four different pistons are compared with each other. The effects of coatings on the thermal behaviors of the pistons are investigated. It has been shown that the maximum surface temperature of the coated piston with material which has low thermal conductivity is improved approximately 48% for the AlSi alloy and 35% for the steel.  相似文献   
107.
The effects of thermal radiation on the pseudosteady state and transient behavior of porous char particles exposed to an oxygen containing environment are investigated. The numerical simulation results show that particles that do not interchange radiant energy with their environment are characterized by wider ambient temperature regions where multiple steady states exist, higher combustion rates, and lower burning times  相似文献   
108.
本文用不同的测试技术和方法测定了锗酸铋(BGO)单晶的比热(300~800K)热膨胀系数(100~1100K)和导温系数(140~700K),进而导出了 BGO 单晶不同温度下的导热系数、定容比热、德拜温度和格虑内森数。本文还对 BGO 单晶热物理性质的变化规律作了理论解释。  相似文献   
109.
Water-silicone oil emulsion with an additive, (C2H5O)3SiC3H6NH2, was examined as a heat storage material. A spiral tube used as a heat exchanger was immersed in a low temperature bath and the emulsion was circulated in the tube to make ice continuously. Ice was separated from the ice–liquid suspension in an outlet tank. The amount of formed ice, the temperatures of the inlet and the outlet of the heat exchanger, and the temperatures in the tube wall were measured and the overall heat transfer coefficient and the heat flux through the tube were calculated. Experiments were carried out, varying the flow rate, the temperature of cooling brine, and the thickness of tube wall. The condition under which slurry ice was formed continuously without adhesion of ice to the cooling wall was clarified. Though decrease in the thermal resistance of the tube increased the rate of ice formation or raised the brine temperature, it narrowed the range of the flow rate and of the brine temperature in which slurry ice was formed continuously.  相似文献   
110.
用真空蒸发法在玻璃和单晶硅片 (10 0 )上制备Zn薄膜 ,然后对Zn薄膜进行氧化、热处理获得纳米ZnO薄膜。对在硅片上制备的Zn薄膜一次性进行高温掺杂、氧化获得纳米ZnO∶P和ZnO∶B薄膜。研究不同氧化、掺杂温度和时间对薄膜结构、电学性能的影响。结果表明 :氧化温度和时间对ZnO薄膜结构影响较大 ,液态源掺P可明显改善纳米ZnO薄膜的导电性能、结构特性和化学组分  相似文献   
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