Modeling ion implantation of HgCdTe

Ion implantation of boron is used to create n on p photodiodes in vacancy-doped mercury cadmium telluride (MC.T). The junction is formed by Hg interstitials from the implant damage region diffusing into the MC.T and annihilating Hg vacancies. The resultant doping profile is n⁺/n^-/p, where the n⁺ region is near the surface and roughly coincides with the implant damage, the n^- region is where Hg vacancies have been annihilated revealing a residual grown-in donor, and the p region remains doped by Hg vacancy double acceptors. We have recently developed a new process modeling tool for simulating junction formation in MC.T by ion implantation. The interstitial source in the damage region is represented by stored interstitials whose distribution depends on the implant dose. These interstitials are released into the bulk at a constant, user defined rate. Once released, they diffuse away from the damage region and annihilate any Hg vacancies they encounter. In this paper, we present results of simulations using this tool and show how it can be used to quantitatively analyze the effects of variations in processing conditions, including implant dose, annealing temperature, and doping background.     

LDD方法在提高电路工作电压中的应用研究

研究了利用轻掺杂漏结构来制作高电源电压器件的工艺方法。分析了ＬＤＤ结构参数对器件击穿特性的影响，并结合实验结果对Ｎ＾－区的注入剂量，长度及引入的串联电阻进行了优化设计。     

NMOS器件两次沟道注入杂质分布和阈电压计算

分别考虑了深浅两次沟道区注入杂质在氧化扩散过程中对表面浓度的贡献。对两次注入杂质的扩散分别提取了扩散系数的氧化增强系数、氧化衰减系数和有效杂地系数，给出了表面浓度与工艺参数之间的模拟关系式，以峰值浓度为强反型条件计算了开启电压，文章还给出了开启电压、氧化条件、不同注入组合之间的关系式。     

实体造型中的几何约束

实体造型是一个基于约束的过程，完成从功能约束到几何约束、再到代数约束的转化而得到实体模型。本文讨论了几何约束的层次性及其表示，并且对几何约束同设计意图的关系进行了研究，提出了基于ＣＳＧ／ＧＣＧ／Ｂ－ｒｅｐ的模型表示。     

基于工作站和EUCLID-IS的计算机组装结构CAD系统研究

随着集成电路技术的发展及计算机性能的不断提高，计算机组装结构设计在计算机，总体设计中的地位越来越重要，它直接影响到计算机性能的提高。本文针对一个基于工作站和ＥＵＣＬＩＤ－ＩＳ软件的电子计算机组结构ＣＡＤ系统，从软、硬件平台，系统功能及实现等方面进行了讨论，旨在为电子计算机组装结构设计提供一种强有力的、方便的设计工具，有利于增强国产计算机的市场竞争能力。     

Multi-input,multi-output flight control system design for the YF-16 using nonlinear QFT and pilot compensation

Nonlinear quantitative feedback theory (QFT) and pilot compensation techniques are used to design a 2 × 2 flight control system for the YF-16 aircraft over a large range of plant uncertainty. The design is based on numerical input-output time histories generated with a FORTRAN implemented nonlinear simulation of the YF-16. The first step of the design process is the generation of a set of equivalent linear time-invariant (LTI) plant models to represent the actual nonlinear plant. It has been proven that the solution to the equivalent plant problem is guaranteed to solve the original nonlinear problem. Standard QFT techniques are then used in the design synthesis based on the equivalent plant models. A detailed mathematical development of the method used to develop these equivalent LTI plant models is provided. After this inner-loop design, pilot compensation is developed to reduce the pilot's workload. This outer-loop design is also based on a set of equivalent LTI plant models. This is accomplished by modelling the pilot with parameters that result in good handling qualities ratings, and developing the necessary compensation to force the desired system responses.     

A method of identifying latent human errors in work systems

Work system improvements are implemented in various manufacturing processes to prevent problems caused by human errors. However, they are almost always applied to problems which have already occurred. This paper examines a method of identifying latent human errors existing within the work systems beforehand. A procedure for applying failure mode and effect analysis to this identification problem was defined based on over 1000 empirical errors: a work system decomposition criterion and fundamental error modes for listing latent human errors, and then applied to three practical manufacturing processes in order to evaluate its effectiveness.     

双塔脱丙烷工艺技术

对扬子乙烯装置双塔脱丙烷系统低压塔液泛、高压塔再沸器堵塞等问题进行了技术分析,提出了工艺流程修改方案,完善了双塔脱丙烷技术,对同类装置有参考价值。     

面向表面微加工工艺的微器件设计框架的研究

本文以微器件设计为对象，对微硅表面制造驱动的微器件并行设计方法学及相应的计算机辅助设计工具的开发逻辑进行了研究，提出了采用基于三层Web-ASP集成框架实现e-CAD原型工具的编程方案，其中，并行任务流管理与控制，微器件实例及设计资源库，微加工工艺规划及仿真，微器件设计评价等是该系统实现的关键要素，在此基础上将建立网上微器件设计中心，并通过应用服务机制，实现对微器件设计工具使用的商务化，以达到降低设计成本，加快MEMS产业化之目的。