钝化膜提高GaN基LED光提取效率研究

模拟计算了光的入射角度与反射率的关系,当光的入射角度大于23°时,发生全反射,无论是否在器件表面生长增透膜,这时的光都无法从器件顶部出射表面提取出来。研究了使用等离子体增强化学气相沉积法(PECVD)在已经制备了n电极和p电极的GaN基LED上制备钝化膜,分析了SiON和SiN_x膜沉积对于器件的光输出功率的影响。通过实验证明,在器件上沉积SiON后,光输出功率增加。     

Structural and Optical Properties of ZnO Nanotips Grown on GaN Using Metalorganic Chemical Vapor Deposition

ZnO nanotips are grown on epitaxial GaN/c-sapphire templates by metalorganic chemical vapor deposition. X-ray diffraction (XRD) studies indicate that the epitaxial relationship between ZnO nanotips and the GaN layer is (0002)ZnO||(0002)GaN and (101̄0)ZnO||(101̄0)GaN. Temperature-dependent photoluminescence (PL) spectra have been measured. Sharp free exciton and donor-bound exciton peaks are observed at 4.4 K with photon energies of 3.380 eV, 3.369 eV, and 3.364 eV, confirming high optical quality of ZnO nanotips. Free exciton emission dominates at temperatures above 50 K. The thermal dissociation of these bound excitons forms free excitons and neutral donors. The thermal activation energies of the bound excitons at 3.369 eV and 3.364 eV are 11 meV and 16 meV, respectively. Temperature-dependent free A exciton peak emission is fitted to the Varshni’s equation to study the variation of energy bandgap versus temperature.     

Paving the Way for High-Performance UVB-LEDs Through Substrate-Dominated Strain-Modulation

AlGaN-based ultraviolet-B light-emitting diodes (UVB-LEDs) exhibit great potential in phototherapy, vitamin D3 synthesis promotion, plant growth regulation, and so on. However, subjected to the excess compressive strain induced by the large lattice mismatch between multiple quantum wells (MQWs) and AlN, UVB-LEDs that simultaneously satisfy the requirements of high light output power (LOP), low working voltage, and excellent stability are rarely reported. Here, a substrate-dominated strain-modulation strategy is proposed. By precisely manipulating the strain in AlN grown on nano-patterned sapphire substrate (NPSS) to a slightly tensile one, the compressive strain in the following Al_0.55Ga_0.45N underlayer and Al_0.28Ga_0.72N/Al_0.45Ga_0.55N MQWs is successfully suppressed. As a result, an outstanding UVB-LED with a peak wavelength at 303.6 nm is achieved. The 20 × 20 mil² UVB-LED chip shows a wall-plug efficiency (WPE) of 3.27% under a forward current of 20 mA and a high LOP of 57.2 mW with an extremely low voltage of 5.87 V under a forward current of 800 mA. It is more exciting that the LOP degradation is as low as 17% after 1000 h operation under a forward current density of 75 A cm⁻², showing excellent stability. The here-developed UVB-LED, with a high LOP and excellent reliability, will definitely promote the applications of AlGaN-based UVB-LEDs.     

石墨烯电极材料的制备及其在双电层电容器中的应用

综述了目前石墨烯基电极材料的最新研究进展,介绍了化学还原法、活化法、热还原法、凝胶法、插入法等制备双电层电容器用石墨烯基电极材料的物理及化学方法,并对其良好的应用前景及今后的研究方向进行了展望。     

CMP后清洗技术发展历程

从80年代开始,结合当时最具代表性的CMP设备,分析当时的后清洗技术,如：多槽浸泡式化学湿法清洗、在线清洗、200mm集成清洗、300mm集成清洗及20nm以下的CMP后清洗趋势,每种后清洗技术都结合CMP设备明确分析其技术特色,优点和缺陷。全面阐述CMP工业界的后清洗发展历程。     

化工用换热器的应用与研究

在国内社会经济飞速发展的阶段,化工产业也有了不小的突破,社会对化工换热器方面提出的需求量也不断提升.因此,相关领域对此方面的应用研究愈加关注与重视.     

前处理和侵蚀对阴极箔比容的影响

碱洗预处理和侵蚀条件对阴极铝箔比容有影响。随 Na OH浓度和 Na3PO4浓度的增大 ,侵蚀箔比容下降。碱洗的温度升高或者时间增加 ,侵蚀箔比容也下降。侵蚀溶液盐酸浓度为 0 .85 mol/ L 时侵蚀箔比容达到极大值。侵蚀液温度过低和过高 ,侵蚀箔比容都低。温度为 90℃时侵蚀比容较高。通过试验得出了较好的前处理和侵蚀条件。     

蒙特卡罗法单晶硅的腐蚀工艺表面微观形态仿真研究

讨论了基于蒙特卡罗法模拟各向异性腐蚀加工的微观表面形态的仿真方法. 应用台阶流动模型,分析了(h,k,l)晶面中(h+2,h,h), (h,1,1), (h+2,h+2,h)以及(h,h,1)晶面族上反应活跃的台阶部位原子的排列特征,结合微掩模的作用和定义方法,提出了通过限制各晶面族台阶部位广泛存在的一级、二级邻居数为(3,7)原子移除概率的方法来模拟快速反应区域的吸附抑制现象. 把上述内容应用于RPF函数对(100)面的凸起结构,(110)面的带状条纹以及(111)面的三角形凹陷微观结构进行了仿真计算,解释了腐蚀中微观形貌的特征和成因. 算法在3种基础晶面和高指数 (322) 晶面的计算结果能够很好地符合实验中观察到的表面形态微观特征,验证了方法的有效性.     

Synthesis optimization and characterization of multiwalled carbon nanotubes

The unique properties of carbon nanotubes (CNTs) have suggested applications in a variety of fields. Multiwalled nanotubes were synthesized using chemical vapor deposition (CVD) procedures and subsequently characterized. Reaction parameters such as catalyst type and carrier gas flow rate were optimized to produce well-aligned multiwalled nanotubes with lengths between a few microns to several millimeters. Characterization was performed with scanning electron microscopy (SEM), transmission electron microscopy (TEM), x-ray diffraction (XRD), energy dispersive x-ray spectroscopy (EDS), thermo-gravimetric analysis, and Raman spectroscopy, focusing on composition and purity. Results show the synthesis of high-purity nanotubes of several millimeters in length from iron, nickel, cobalt, and titanium carbide catalysts with thermal stability to above 550°C.