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171.
Xiang Lu S. Sundar Kumar Iyer Jin Lee Brian Doyle Zhineng Fan Paul K. Chu Chenming Hu Nathan W. Cheung 《Journal of Electronic Materials》1998,27(9):1059-1066
We have demonstrated feasibility to form silicon-on-insulator (SOI) substrates using plasma immersion ion implantation (PIII)
for both separation by implantation of oxygen and ion-cut. This high throughput technique can substantially lower the high
cost of SOI substrates due to the simpler implanter design as well as ease of maintenance. For separation by plasma implantation
of oxygen wafers, secondary ion mass spectrometry analysis and cross-sectional transmission electron micrographs show continuous
buried oxide formation under a single-crystal silicon overlayer with sharp Si/SiO2 interfaces after oxygen plasma implantation and high-temperature (1300°C) annealing. Ion-cut SOI wafer fabrication technique
is implemented for the first time using PIII. The hydrogen plasma can be optimized so that only one ion species is dominant
in concentration and there are minimal effects by other residual ions on the ion-cut process. The physical mechanism of hydrogen
induced silicon surface layer cleavage has been investigated. An ideal gas law model of the microcavity internal pressure
combined with a two-dimensional finite element fracture mechanics model is used to approximate the fracture driving force
which is sufficient to overcome the silicon fracture resistance. 相似文献
172.
173.
介绍了新型环氧树脂少溶剂快干绝缘浸渍胶的性能试验数据及基在微特电机上的应用及注意事项。 相似文献
174.
Flory–Huggins interaction parameters, λ, were determined for a series of probes in an amine cured epoxy resin matrix (433–493 K) and its precursors (324–363 K) by inverse gas chromatography (IGC). Hildebrand–Scatchard theory was combined with Flory–Huggins theory in order to estimate infinte dilution solubility parameters (δ2) for the matrix and its precursors at 298 K. It was shown that the value of the solubility parameter for the cured resin matrix lies between those of its precursors. Compared to the majority of published work, an unusual aspect of this application of IGC is that solubility parameters have been determined when the stationery phases are (i) small molecules and (ii) a highly crosslinked polymer. Moreover, all possible attempts have been made to ensure equilibrium conditions between probe and stationary phase, and compensation for asymmetry of peak profile has been applied in determining δ2. The solubility parameters estimated by IGC are in good agreement with those calculated by other methods. 相似文献
175.
N. JostJ. Karger-Kocsis 《Polymer》2002,43(4):1383-1389
Curing kinetics of a vinylester-urethane hybrid (VEUH) resin consisting of vinylester resin (VE) diluted in styrene and novolac type polyisocyanate (NPI) have been studied by differential scanning calorimetry (DSC). As VEUH is crosslinked via free radical polymerisation between the vinyl functions of styrene and VE, and polyaddition reaction between the secondary -OH groups of VE and -NCO of NPI, it was necessary to study these reactions separately. This was achieved by studying the curing with and without incorporating the NPI. The curing reaction was monitored by measuring the heat of reaction under isothermal and dynamic temperature conditions. Models describing the curing were developed, which are in good agreement with the experiments. A comparison between the curing of the VEUH and the VE resin without NPI leads to the conclusion that the curing of the VEUH as accessed by DSC is dominated by the radical polymerisation of styrene with VE although the two reactions are not time separated. 相似文献
176.
Bob Eisenberg 《Journal of Computational Electronics》2002,1(3):331-333
Ion channels are proteins with a hole down their middle important in a wide range of biological functions yet simple enough to be analyzed as devices in the engineering tradition. 相似文献
177.
U(Ⅳ)-U(Ⅵ)同位素交换反应动力学研究 Ⅰ.Fe~(2+)对U(Ⅳ)-U(Ⅵ)同位素交换反应的催化作用 总被引:1,自引:0,他引:1
一、前言由于U(IV)-U(VI)同位素交换体系具有相当大的同位素效应和很好的稳定性,并且容易实现两相回流,这对于分离U同位素的工业应用都是十分有利的。但是,U(IV)-U(VI)同位素交换反应速度非常慢,常温下H~+浓度为1.0—4.0 mol/l时,速度常数为1.0×10~(-4)l~2/mol·s。因此要用U(IV)-U(VI)交换体系浓缩铀同位素,必须研究U(IV)-U(VI)交换反应动力学,找到加快交换反应的方法。 相似文献
178.
介绍了传统的全空间空调方式,指出全空间空调方式不能同时为所有人提供可接受的热感觉和室内空气品质,而置换通风和个体化控制的联合将是一种理想的空调方式,在更大程度上满足人们的不同需要。 相似文献
179.
黄埔发电厂#6发电机转冷水铜离子含量超标,通过对缺陷原因进行分析,针对二级水封的特性对溢出的转冷水进行回收并利用化学凝结水处理去除溶出的铜离子,通过控制转冷水的pH值最终减缓铜管的腐蚀. 相似文献
180.
Ying Bai Yanfeng Yin Na Liu Bingkun Guo Hongjun Shi Jianyong Liu Zhaoxiang Wang Liquan Chen 《Journal of power sources》2007
As the continuance of our series study on LiCoO2 surface modification, the complicated traditional surface coating method is replaced with simple addition of amorphous YPO4 and Al2O3 in commercial LiCoO2 or in commercial electrolyte based on our understanding to the improvement mechanism of surface modification. Comprehensive studies by X-ray photoelectron spectroscopy (XPS), gas chromatography and mass spectroscopy (GC–MS), inductively coupled plasma (ICP) and Fourier transformed infrared (FTIR) indicate that the products of spontaneous reaction between the additive and the LiPF6 based electrolyte are responsible for the performance improvements. 相似文献