Pyrolysis of tertiarybutylphosphine at low pressure

The pyrolysis of tertiarybutylphosphine (TBP) has been studied in the low pressure conditions used for chemical beam epitaxy (CBE). The pyrolysis studies were carried out in low pressure reactors of two different configurations, one of which is a cracker cell designed for use in a CBE system. The reaction products were studied using a quadrupole mass spectrometer. The products observed are accounted for by a reaction mechanism involving homolysis of the parent TBP molecule to produce PH₂ and C₄H₉ radicals. These undergo subsequent reactions to form the stable products C₄H₈, PH₃ and H₂, with smaller amounts of P and P₂ being produced. The production of the sub-hydride PH₂ using this cracker cell design indicates that the use of partially cracked TBP may be a promising technique for reducing the amount of carbon incorporated into the growing epitaxial layer.     

步进式加热炉炉温优化设定模型及软件开发

针对线材厂步进式加热炉实际工况，提出了基于经验规则的炉温优化设定模型和在线自学习获取知识的思想，并以炉温优化设定模型为核心，开发出加热炉计算机控制系统的优化运行软件。     

国际微电子专用关键设备的现状和发展趋势（考察报告）

讲述了参观Ｓｅｍｉｃｏｎ／ｗｅｓｔ９４′展览会及考察美国和西德的５个公司、１所大学所了解到的投影光刻技术、电子束曝光技术、透镜面形测试技术的发展。     

9．5－32mm波段大气衰减随仰角变化的实验研究

在实测和分析３２、１４．６、１２．５和９．５ｍｍ波段大气衰减的基础上，研究了大气衰减随仰角变化的规律；讨论了仰角为３～９０°时计算大气衰减的简化计算公式；给出了大气等效高度与地面水汽密度的关系式，对大气衰减和等效高度的实测值与理论值进行了比较和分析．     

余热利用系统多目标优化模型及应用

以炭黑生产中的余热利用系统为背景建立了余热利用系统多目标优化规划数学模型;阐述了模型的求解方法;给出了实例分析。     

Hierarchical intelligent control with flexible AC transmission systems application

A novel hierarchical intelligent controller configuration is proposed using an artificial neural network as a control-mode classifier in the supervisory level and a set of pre-designed controllers in the lower level. Controller outputs are modified nonlinearly by the classifying signals in a structure resembling one artificial neuron with adaptively changed weights. The lower-level local controllers are implemented using neural networks. An illustrative example of this approach is based on the transient stabilization of a single-machine infinite-bus system studied in Flexible AC Transmission Systems (FACTS) research.     

锁相技术在电子束曝光机工件台稳速控制中的应用

采用锁相技术，对电子束曝光机工件台运动实现速度环的全数字控制。设计了数字差频积分回路和数字差频比例控制器，能有效消除速度的静态误差和改善系统的动态特性。     

Selective area epitaxy of CdTe

We have performed selective area epitaxy (SAE) of CdTe layers grown by molecular beam epitaxy using a shadow mask technique. This technique was chosen over other SAE techniques due to its simplicity and its compatibility with multiple SAE patterning steps. Features as small as 50 microns × 50 microns were obtained with sharp, abrupt side walls and flat mesa tops. Separations between mesas as small as 20 microns were also obtained. Shadowing effects due to the finite thickness of the mask were reduced by placing the CdTe source in a near normal incidence position. Intimate contact between the mask and the substrate was essential in order to achieve good pattern definition.     

Schottky barrier heights of contact metals to p-type ZnSe

Schottky barrier heights (SBHs) of a variety of metals (In, Cd, Nb, Ti, W, Cu, Ag, Au, Ni, Pt, and Se) contacting to p-ZnSe grown by a molecular beam epitaxy method were determined by analyzing capacitance-voltage (C-V) and/or current density-voltage (J-V) curves. The SBH values of the Au and Ni contacts were determined from intersections of straight lines of the C⁻²-V curves to be 1.23 and 1.13 eV, respectively. The J-V calculations provided a large SBH value of 1.2 ± 0.1 eV for a variety of metals, indicating that the Fermi-level could be pinned at the contact interface. Reduction of the SBH values to a level lower than 0.4 eV and/or increase of doping concentrations to a level higher than 10²⁰ cm⁻³ are essential to obtain an ohmic contact with contact resistivity of around 10⁻³ Ω·cm².