Stochastic Models for Pad Structure and Pad Conditioning Used in Chemical-Mechanical Polishing

Stochastic models are presented for the structure and conditioning of pads used in chemical-mechanical polishing of wafers. First the one-dimensional distribution function of surface depth in the case of a conditioned solid pad is described. Then, for characterizing the structure of a foamed pad, the theory of random closed sets is applied. An important distributional characteristic of a random closed set, the linear contact distribution function, yields the contribution to surface depth resulting from pores. As a special example the Boolean model is considered. This leads to a formula that describes the variability of the surface of a conditioned foamed pad after a certain time. Simulations and experimental data show a good agreement between theory and reality.     

Porous Titania Thin Films Grown by Anodic Oxidation for Hydrogen Sensors

Porous titanium dioxide (Titania) thin films were grown by anodic oxidation using high purity (99.7%) titanium foil in a dilute sulphuric acid (1 M) medium. The anodization process was carried out for 30 minutes with 20 mA/cm² and 50 mA/cm² current densities. The samples were characterized by XRD, SEM, and AFM techniques. It was found that the grown porous titania films were less sensitive to 500 ppm hydrogen in air ambient below 300°C; however, the sensitivity and response behavior of the film at 300°C are very much dependent on the growth conditions. Particularly, the films grown at current density 50 mA/cm² and 1 M acid concentration exhibited the lowest response time of 151 sec at 300°C.     

Fabrication of particle-free thin films by laser ablation combined with an electron beam

Particle-free silicon and nickel thin films were successfully fabricated by laser-ablating a melted section of their target surface, which gives a high evaporation pressure at the melting point. The influence of direct evaporation from a melted target was reduced negligibly by melting the target only locally with a focused electron beam (e-beam) and increasing the laser frequency. The silicon films fabricated by the present method, pulse laser deposition of a partially molten target, were able to firmly adhere to the substrates and withstood steel needle scratching, unlike e-beam-evaporated films.     

氧化铝颗粒增强铜基复合材料线切割加工研究

采用粉末冶金方法制备了Al2O3/CU复合材料.研究了电参数对复合材料线切割加工速度和表面粗糙度的影响;用扫描电镜分析了复合材料线切割加工表面的SEM形貌.结果表明:选用较大的峰值电流和较短的脉冲宽度,可对复合材料进行较理想的电火花线切割加工;复合材料加工表面是由相互重叠的放电凹坑和凸缘组成,表面粘附有基体金属的球形熔滴和Al2O3颗粒.     

散射法表面粗糙度测量的数学模型分析

对材料的表面粗糙度进行测量时,往往要求采用在线非接触方式。散射法能较好地满足该要求。本文以beckm ann的光散射模型为理论基础,分析建立了散射法表面粗糙度测量的数学模型,并进一步简化了该模型,为应用散射法测量提供了数学依据。     

一体化粗糙度测量传感器的设计

以表面粗糙度测量仪为例,结合传感器的发展趋势,研究了粗糙度测量传感器的模数一体化实现方法.该传感器将电荷放大、电压幅值放大、A/D转换、数字滤波、数据通信集中在一起,通过DSP实现粗糙度测量过程中数字滤波.结果表明,一体化粗糙度测量传感器集成度高、功能全,提高了数据处理效率,减轻了后续处理电路的计算量.     

多个移动车辆作用下简支梁的动力响应分析

将简支梁桥简化为欧拉-伯努利梁模型,考虑四自由度车辆移动系统与结构表面接触处不平顺产生的随机激励,建立了多个移动车辆振动系统与梁的耦合动力效应模型。在数值算例中,计算了不同模态截断阶数情况下由动力效应产生的挠曲线;讨论了移动速度变化时,在梁上作用不同荷载组合情况下冲击系数的变化规律;并讨论了跨径变化时冲击系数的变化规律;最后比较了在不同等级平整度情况下梁的动弯矩、动剪力的结果。     

锅炉再热器管泄漏原因分析及改造

分析了再热器管频繁泄漏的原因，认为定位块与再热器管的异种钢焊接及定位块结构的不合理是导致泄漏的主要原因，同时提出了改造方案。     

Truck Loading and Fatigue Damage Analysis for Girder Bridges Based on Weigh-in-Motion Data

Based on data collected by weigh-in-motion (WIM) measurements, truck traffic is synthesized by type and loading condition. Three-dimensional nonlinear models for the trucks with significant counts are developed from the measured data. Six simply supported multigirder steel bridges with spans ranging from 10.67 m (35 ft) to 42.67 m (140 ft) are analyzed using the proposed method. Road surface roughness is generated as transversely correlated random processes using the autoregressive and moving average model. The dynamic impact factor is taken as the average of 20 simulations of good road roughness. Live-load spectra are obtained by combining static responses with the calculated impact factors. A case study of the normal traffic from a specific site on the interstate highway I-75 is illustrated. Static loading of the heaviest in each truck type is compared with that of the American Association of State Highway and Transportation Officials standard design truck HS20-44. Several important trucks causing fatigue damage are found.     

铝合金筒段化学铣切工艺研究

对2219铝合金筒段的化学铣切工艺进行了研究,以确定化学铣切工艺的最佳配方和工艺控制要点.对NaOH、Na2S、三乙醇胺(TEA)和溶解Al正交试验的结果进行了验证性试验,确定了对化学铣切表面粗糙度的影响程度依次为:Na2S、溶解Al、TEA、NaOH,化学铣切溶液的最佳配方为:75～150 g/L NaOH, 6～15 g/L Na2S, 38.5～42.0 g/L TEA,溶解Al 32.5～120.0 g/L.按该配方对2219铝合金筒段进行化学铣切,可达到最佳效果:表面粗糙度1.2～1.4 μm、化学铣切壁厚公差≤0.12 mm、化学铣切轮廓线线偏离≤0.75 mm.