刻线边缘表面重构及其边缘粗糙度测量

给出了一种边缘粗糙度(LER)三维参数评估的方法。采用原子力显微镜(AFM)测量了刻线单侧边缘形貌,根据AFM的工作机理和测量特点重构边缘表面,采用回归分析方法确定了边缘表面的评价基准面。结合集成电路中光刻工艺的具体需求,提出了能够反映边缘表面形貌特征的三维LER表征参数。结合实例,计算了所提出的部分LER参数,分析了LER标准差参数的测量精度。     

不同固体表面下激光多普勒测速的数值模拟

激光多普勒测速仪(LDV)的测量精度和应用受到光电探测器、环境状况、频谱加宽和信号处理等因素影响。本文根据条纹模型和散射机理建立了固体LDV的数学模型,并通过数值模拟详细分析了固体表面特性和测量精度之间的关系,实验结果和数值模拟结果符合得很好。LDV能够精确地测量出固体表面运动速度,但要求被测固体的表面粗糙度在一定范围内,而且这个范围由条纹间距和有效探测体宽度决定。     

纳米金刚石薄膜的光学性能研究

用热丝化学气相(HFCVD)法在硅衬底上制备了表面光滑、晶粒致密均匀的纳米金刚石薄膜,用扫描电镜(SEM)和原子力显微镜(AFM)观测薄膜的表面形貌和粗糙度,拉曼光谱表征膜层结构,紫外-可见光分光光度计测量其光透过率,并用椭圆偏振仪测试、建模、拟合获得了表征薄膜光学性质的n,k值.结果表明薄膜的晶粒尺寸在100nm以下,表面粗糙度仅为21nm;厚度为3.26(m薄膜在632.8nm波长处的透过率为25%,1100nm波长处达到50%.采用直接光跃迁机制估算得到纳米金刚石薄膜的光学能隙(Eg)为4.3 eV.     

动态主观散斑的时间相关性研究

根据散射屏移动时动态主观散斑时间相关公式,分析了成像系统主要参数对动态主观散斑时间相关性的影响：一般情况下屏表面参数对散斑的时间相关性影响较小;激光光斑大于成像系统物面分辨斑时,散斑的时间相关性由透镜孔径大小决定;激光光斑小于成像系统物面分辨斑的尺寸时,减小激光光斑尺寸能减弱散斑时间相关性。对于以上结果进行了相关的理论模拟和部分实验验证,通过模拟发现,激光光斑小于成像系统物面分辨斑时,散斑时间相关长度和光斑尺寸大小成正比。结论对于激光投影系统中利用时间平均进行的散斑抑制具有指导意义。     

工艺参量对NdFeB永磁体和SPCC钢激光点焊质量的影响

为了将激光点焊工艺应用于NdFeB永磁体与冷轧碳钢薄板的连接,试验研究了脉冲功率、脉冲宽度和离焦量对焊点形貌和接头强度的影响.激光点焊中存在热导焊和深熔焊两种焊接模式,改变峰值功率和离焦量都能使焊接模式发生转变,而改变脉宽时焊接模式不转变.点焊试样剪切试验中存在脱壳式、剪断式和压断式3种断裂模式,所对应的熔核尺寸和剪切载荷依次增加.结果表明,为获得较高的连接强度,宜使峰值功率与离焦量适当配合,实现深熔焊模式进行焊接,而脉冲宽度不宜太大.     

Disordered Topography Mediates Filopodial Extension and Morphology of Cells on Stiff Materials

In cell–material interactions, cells use filopodia to sense external biochemical and mechanical cues, and subsequently dictate their survival. In an effort toward understanding how disordered topography of stiff materials influences filopodial recognition, diamond films with grain sizes varying from nano‐ to micrometers are fabricated for the investigation of osteoblast filopodial extension. Interestingly, straight filopodia with pronounced cell–substrate adhesion are observed on a nanocrystalline diamond (NCD) region, whereas filopodia on a microcrystalline diamond (MCD) surface only adhere to, and get deflected by, large diamond grains. More importantly, filopodia on NCD keep propagating with a constant velocity, whereas the same process takes place in a slow and intermittent manner on MCD. A theoretical model is also developed and it suggests that the contact between the disordered topography and the filopodial tip plays a key role in altering filopodial growth dynamics. In particular, it is predicted that large surface asperities can block the movement of the filopodial tip, delay its extension, and cause bending of the structure, in quantitative agreement with experimental observations. These findings reveal previously underappreciated effects of random, stiff topographies on the response of cells, and hence can provide new insights for the design of future implant biomaterials.     

玻璃基底和表面粗糙度在氮化硅薄膜椭偏测量中的影响

在光谱椭偏测量中,玻璃基底的背反射会给测量结果造成较大影响。针对平板显示器件玻璃基底表面氮化硅镀膜进行了椭偏测量和模型计算。采用相干背反射模型“空气基底空气”计算并拟合得到与厂商数据符合较好的玻璃基底折射率。对氮化硅薄膜采用Tauc Lorentz色散模型进行了分析拟合,讨论了薄膜与基底界面层、表面粗糙度对光学常数及模型拟合的影响,表明在薄膜与基底间晶格失配的情况下,界面层的引入对改善拟合度是必要的。给出了薄膜体系的光学常数、薄膜结构的分析结果。     

电子束蒸发沉积TiN薄膜的电学特性研究

采用TCP(Transverse coupled plasma)等离子体辅助电子枪蒸镀技术,在玻璃衬底上制备了TiN薄膜。用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和原子力显微镜(AFM)研究了不同工艺条件对薄膜晶体结构和表面形貌的影响;用四探针法测量薄膜的电阻率变化。结果表明,所制备的TiN薄膜在(111)晶面有择优取向。与金属薄膜类似,TiN薄膜的平均表面粗糙度与电阻率之间存在近似线性关系,并且电阻率随残余应力增大而增大。     

Robust skin-roughness estimation based on co-occurrence matrix

As the interest in one’s appearance has recently increased, the demand for diagnosing skin conditions has also increased. However, conventional specialized skin diagnostic devices are generally expensive, and people have to visit a skin-care shop to diagnose their skin condition. This is time consuming and troublesome. In this paper, we propose a skin-roughness estimation method that uses a mobile-phone camera in daily environments. In order to achieve accurate evaluation, the illumination variation is alleviated using texture components of the facial skin image. We also propose a new feature-extraction method based on the gray-level co-occurrence matrix, which effectively measures the skin roughness from the texture components. The performance of the proposed method is compared with the conventional commonly used features, and we verify the superiority of the proposed method.     

基于阵列信号融合的路面平整度检测原理研究

提出了一种基于阵列信号分析原理的激光路面平整度检测方法.利用阵列信号处理方法,将路面信号转化为阵列信号源个数的估计;将激光检测系统相对于路面的运动转化为阵列信号波达方向的估计;将多传感器检测数据共同信息的提取转化为阵列信号中多信号权向量的加权处理;利用最佳权向量重构出路面断面形状.实验证明此方法简单实用,可以为路面平整度检测设备的改良提供一种全新且好用的方法.