粗化玻璃基板对OLED的影响

研究了粗化玻璃对有机电致发光器件的影响,分别在玻璃基板的平滑面及粗糙面上制作有机电致发光器件。所制备的器件结构为Al(15nm)/MoO3(60nm)/NPB(40nm)/Alq3∶C545T(2%,30nm)/Alq3(20nm)/LiF(1nm)/Al(100nm)。从电流密度-电压-亮度性能及光谱特性等方面对两种器件进行了对比分析。实验结果显示:当蒸镀面为平面时,电流密度及亮度均比粗面型高,其最高亮度达到24 410cd/m2。不同蒸镀面器件的相对光谱几乎没有变化,但粗面型器件存在黑斑,对其产生的原因进行了探讨。     

碳膜保护对高温激活SiC表面形貌的影响

采用碳膜覆盖于SiC晶片表面,作为SiC离子注入后高温激活退火的保护层,1650℃20 min高温退火后,有碳膜保护的SiC晶片表面粗糙度RMS只有0.6 nm,无明显形貌退化。AZ5214光刻胶在不同温度条件Ar气氛围下碳化40 min,光刻胶均转变为纳米晶体石墨化碳膜。进行Raman测试表明,碳膜D峰和G峰的比值随碳化温度升高而增大,800℃高温碳化形成的碳膜ID:IG达到3.57,对高温激活退火SiC表面保护效果最佳,经过Ar气氛围下1 650℃20 min激活退火后,有碳膜保护和无碳膜保护的SiC表面粗糙度RMS分别为0.6 nm和3.6 nm。     

300mm铜膜低压低磨料CMP表面粗糙度的研究

随着集成电路特征尺寸的减小、低k介质的引入及晶圆尺寸的增加,如何保证在低压无磨料条件下完成大尺寸铜互连线平坦化已经成为集成电路制造工艺发展的关键。采用法国Alpsitec公司的E460E抛光机在低压低磨料的条件下,研究了12英寸(1英寸=25.4 mm)无图形(blanket)铜膜CMP工艺和抛光液配比对抛光表面质量的影响。实验结果表明,在压力为0.65 psi(1 psi=6.89×103 Pa),抛光液主要成分为体积分数分别为5%的螯合剂、2%的氧化剂和3%的表面活性剂。抛光后表面无划伤,表面非均匀性为0.085,抛光速率为400 nm.min-1,表面粗糙度为0.223 nm,各参数均满足工业化生产的需要。     

软X射线多层膜的光学性质和优化设计

一、引言 X射线多层膜是X激光和X光学的重要元件。近几年,不论在理论上还是在技术上,都得到了较快发展。 从X光晶体衍射角度出发,X射线多层膜可看作超晶格一维人工晶体。从薄膜光学出发,X射线多层膜是一类光学薄膜。这种薄膜的膜层很薄,折射率都接近1,并存在一定的吸收。X     

异构作动系统的效率特性与能量管理分析

为提升由液压作动器和电动静液作动器组成的异构作动系统的能量特性,首先建立数学模型,并根据给定参数分析效率特性,在此基础上,提出能量综合管理策略,最后进行仿真分析.结果表明:液压作动器和电动静液作动器的效率特性存在明显的区别,且基于效率特性设计的能量综合管理策略具有显著的优势.     

13位Sin／D转换器IC—NQ及其应用

详细介绍德国IC—Haus公司生产的13位Sin／D转换器IC—NQ的性能特点、引脚功能、工作原理、数据输出接口、应用设置。结合光栅读数头和精密运算放大电路,通过对该器件的编程设定细分数．实现了光栅位移测量系统,并将其应用于粗糙度测量仪中。试验结果表明,该器件运行稳定,性能可靠,可有效提高光栅位移测量系统的位移分辨率,达到位移的0．1μm的细分,为设计高精度粗糙度仪提供参考。     

Effect of polishing parameters on abrasive free chemical mechanical planarization of semi-polar(1122) aluminum nitride surface

An abrasive free chemical mechanical planarization(AFCMP) of semi-polar(1122) AlN surface has been demonstrated. The effect of slurry pH, polishing pressure, and platen velocity on the material removal rate(MRR) and surface quality(RMS roughness) have been studied. The effect of polishing pressure on the AFCMP of the(1122) AlN surface has been compared with that of the(1122) AlGaN surface. The maximum MRR has been found to be ~562 nm/h for the semi-polar(1122) AlN surface, under the experimental conditions of 38 kPa pressure, 90 rpm platen velocity, 30 rpm carrier velocity, slurry pH 3 and 0.4 M oxidizer concentration. The best root mean square(RMS) surface roughness of ~1.2 nm and ~0.7 nm, over a large scanning area of 0.70×0.96 mm², has been achieved on AFCMP processed semi-polar(1122) AlN and(AlGaN) surfaces using optimized slurry chemistry and processing parameters.     

非均匀不稳定表面粗糙目标的太赫兹波段散射特性分析

研究了不同粗糙度的非均匀不稳定表面粗糙导体目标在太赫兹波段的散射特性,区别于采用经验公式的建模方法,提出把随机粗糙面的建模理念应用到太赫兹波段的非均匀不稳定表面粗糙目标的建模中,用描述随机粗糙面的均方根高度(h)和相关长度(l)两个物理量来调节目标表面的粗糙度变化.首先用高斯随机粗糙面模拟非均匀不稳定粗糙目标的表面,然后采用物理光学和等效电流相结合的方法进行仿真计算,分别对不同入射角、不同频率和不同粗糙度的不同非均匀不稳定表面粗糙导体目标,在太赫兹波段散射特性进行了分析,最后得出相关的结论.     

ULSI中多层Cu布线CMP表面粗糙度的分析和研究

分析介绍了Cu层表面粗糙度对器件性能的影响以及超大规模集成电路中多层Cu布线CMP的作用机理,研究分析了碱性抛光液对Cu的表面粗糙度的影响因素,如磨料、氧化剂、pH值、表面活性剂等对表面粗糙度的影响。实验证明,在一定的抛光条件下,选用SiO2为磨料、双氧水为氧化剂的碱性抛光液可以有效降低Cu层的表面粗糙度,使之达到纳米级,得到良好的抛光效果,从而解决了超大规模集成电路多层Cu布线化学机械抛光中比较重要的技术问题。     

Heat transfer and friction characteristics of rectangular solar air heater duct using rib-grooved artificial roughness

Experimental investigation on the heat transfer and friction characteristics of rib-grooved artificial roughness on one broad heated wall of a large aspect ratio duct shows that Nusselt number can be further enhanced beyond that of ribbed duct while keeping the friction factor enhancement low. The experimental investigation encompassed the Reynolds number range from 3000 to 21,000; relative roughness height 0.0181–0.0363; relative roughness pitch 4.5–10.0, and groove position to pitch ratio 0.3–0.7. The effect of important parameters on the heat transfer coefficient and friction factor has been discussed and the results are compared with the results of ribbed and smooth duct under similar flow conditions. The present investigation clearly demonstrates that the heat transfer coefficient for rib-grooved arrangement is higher than that for the transverse ribs, whereas the friction factor is slightly higher for rib-grooved arrangement as compared to that of rectangular transverse ribs of similar rib height and rib spacing. The conditions for best performance have been determined. Correlations for Nusselt number and friction factor have been developed that predict the values within reasonable limits.