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71.
TiN/SiNx multilayer coatings were deposited on stainless steel by Chemical Vapor Deposition in a Fluidized Bed Reactor at Atmospheric Pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Due to the immiscibility of crystalline TiN and amorphous SiNx, interdiffusion between layers is avoided even at the high working temperature. The thickness of the individual layer was in the nanometer range. Coatings were characterized by means of SEM, TEM, GD-OES, SIMS, XRD and nanoindentation. A mechanism for the growth rate and diffusion of Ti and Si into the steel is discussed. 相似文献
72.
73.
James R. Strife John G. Smeggil Wayne L. Worrell 《Journal of the American Ceramic Society》1990,73(4):838-845
The reactions of titanium carbide and hafnium carbide with iridium have been studied in thin film couples fabricated by vapor deposition processes. The reaction product layers after exposure in the temperature range of 1923 to 2400 K are dependent on the stoichiometry of the metal carbide layers and range from simple solid solutions to MIrx compounds. The observed microstructures are predictable from available thermochemical data. The morphology of residual carbon in the reacted metal carbide-iridium product layer varies from interfacial deposits to uniform carbon dispersion and depends upon exposure temperature and metal carbide stoichiometry. 相似文献
74.
采用常压化学气相沉积方法(atmospheric pressure chemical vapor deposition,APCVD)制备了氮氧化硅(Si—O—N)薄膜,研究了影响其沉积速率和生长模式的因素。在φ(NH_3):φ(SiH_4)=20:1,基板温度为650℃的条件下,当混合气体流量小于720ml/min时,薄膜的形成主要受气体扩散过程控制;当混合气体流量大于720 ml/min时,则主要受表面气相反应过程控制;混合气体流量为720 ml/min的条件下,氮氧化硅薄膜的沉积过程主要受基板表面的气相反应过程控制,薄膜沉积厚度与沉积时间成线性关系,反应速率为常数1640 nm/min,表面活化能为283 kJ/mol。通过SEM分析发现:氮氧化硅薄膜的形成方式符合三维成核模型,即反应初期Si,N,O等原子在基板表面相遇结合在一起形成原子团,一定数量的原子团构成临界核;反应中期临界核长大为岛状结构,岛不断长大,岛与岛之间相互接合形成通道网络结构;反应后期,原子不断填补网络空洞,最后成为连续薄膜。 相似文献
75.
Manuel Belmonte Vitor A. Silva Antonio José Fernandes Florinda Costa Rui Silva 《Journal of the American Ceramic Society》2003,86(5):749-754
The efficiency of different surface pretreatments (four standard chemical etchings and four diamond powder abrasive procedures) on silicon nitride (Si3 N4 ) substrates for chemical vapor deposition (CVD) of diamond has been systematically investigated. Blank Si3 N4 samples were polished with colloidal silica (∼0.25 μm). Diamond nucleation and growth runs were conducted in a microwave plasma chemical vapor deposition apparatus for 10 min and 6 h, respectively. Superior results concerning nucleation density ( N d ∼ 1010 cm−2 after 10 min), film uniformity, and grain size (below 2 μm after 6 h) were obtained for the mechanically microflawed samples, revealing that chemical etchings (hot and cold strong acids, molten base or CF4 plasma) are not crucial for good CVD diamond quality on Si3 N4 . 相似文献
76.
We have grown helical nanowire assemblies of parylene C, thereby demonstrating that polymeric sculptured thin films (STFs) can be fabricated by a combination of physical and chemical vapor deposition processes. The deposition method is explained in detail and electron micrographs of 200-400 nm size sculptured thin film of parylene are given. The shapes of the submicron and nanowire assemblies can be engineered so that the polymeric STF acts as a template for preferential attachment of biomolecules. 相似文献
77.
78.
Low-temperature catalytic growth of carbon nanotubes under microwave plasma assistance 总被引:4,自引:0,他引:4
Various carbon nanotubes (CNTs) including aligned arrays, Y-branching and some other novel morphologies have been catalytically grown on anodic porous alumina template (APAT) and on the alumina-supported catalysts with methane (or benzene) as carbon source under microwave plasma assistance below 520 °C. The growth process could be simply operated since neither heating nor bias-voltage was applied to the catalysts or APAT. The results presented in this paper not only greatly richened the nanostructures of carbon family but also provided with a new technique path for synthesizing CNTs or some other nanostructures with the characteristics of low-temperature which has some special advantages or applications. 相似文献
79.
80.
铬酸酐副产物硫酸氢钠的利用 总被引:1,自引:0,他引:1
对生产铬酸酐时副产的含铬硫酸氢钠的利用作了评论,介绍了8种方法,即,化学沉淀法、磷酸沉淀法、铬酸铬法、电解氧化法、过硫酸钠氧化法、制商品硫酸氢钠、酸泥制碱式硫酸铬、硫酸氢钠制碱式硫酸铬,其中以化学沉淀法、磷酸沉淀法和铬酸铬法应用最广。 相似文献