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31.
D. Mangelinck P. Gas T. Badche E. Taing F. Nemouchi C. Perrin-Pellegrino M. Vuaroqueaux S. Niel P. Fornara J. M. Mirabel L. Fares P. H. Albarede 《Microelectronic Engineering》2003,70(2-4):220-225
The formation of Ti silicides has been examined in flash memories with 0.25 μm linewidth by X-ray diffraction, scanning electron microscopy, and transmission electron microscopy. It has been observed that, after the first rapid thermal process and the selective metal etch, there is no silicide on the source and on a majority of drain contacts while C49-TiSi2 is found on the gate. A pre-amorphisation implant increases drastically the formation of C49-TiSi2 in the drain zone while modifications of annealing conditions have little impact. These results indicate that the formation of C49-TiSi2 is most likely controlled by nucleation and that this nucleation is sensitive to both the width and the length of the reaction zone. The formation of a Ti rich silicide may play an important role in this nucleation by decreasing the driving force for the formation of C49-TiSi2. Curiously enough, the formation of C49-TiSi2 appears thus as a major concern for the salicide process in flash memories. 相似文献
32.
A type of CO2 sensor based on oxygen concentration cell was designed as following: Cell I: Pt | Au, O2,CO2|Na2CO3(Au)|NKBA(Au)|YSZ|O2, CO2|Pt or Cell Ⅱ: Pt|Au, O2, CO2|K2CO3(Au)|NKBA(Au)|YSZ|O2, CO2|Pt.(Na,K-β/β″-Al2O3 is named by NKBA). The sensor signal is consistent with the Nernstian slope within the region ofphase equilibrium for Na, K-β/β"-Al2O3 material. The relationship between CO2 sensor voltage response and phaseequilibrium of solid electrolyte Na, K-β/β-Al2O3 is discussed in this paper. 相似文献
33.
在BSO晶体中同时掺入Ce和Eu离子,生长了Ce:Eu:BSO晶体,对晶体的二波耦合和四波混频性能了测试。结果表明,Ce和Eu离子对晶体的光折变效应起到了增强的作用。 相似文献
34.
35.
单元系T—p相图的数学结构 总被引:1,自引:0,他引:1
作者以化学元素的稳定单质为基准,推演出了任意物质M_i(相态Ω)的热力学生成活度{相态Ω)的函数形式:?D_Ω数值的大小体现着相态Ω的热力学相对稳定性.根据集合论原理沿D(稳定性)座标取极大值的方法把物理性质互不连续的各个异相态连结在一起,建立了单元系在T-p面上的优势分布方程(PSDE):■作者以H_2O为实例,计算了T-p相图,与实验相图基本一致. 相似文献
36.
Kazutaka Chibana Chaedong Kang Masashi Okada Koji Matsumoto Tetsuo Kawagoe 《International Journal of Refrigeration》2002,25(2):83
Water-silicone oil emulsion with an additive, (C2H5O)3SiC3H6NH2, was examined as a heat storage material. A spiral tube used as a heat exchanger was immersed in a low temperature bath and the emulsion was circulated in the tube to make ice continuously. Ice was separated from the ice–liquid suspension in an outlet tank. The amount of formed ice, the temperatures of the inlet and the outlet of the heat exchanger, and the temperatures in the tube wall were measured and the overall heat transfer coefficient and the heat flux through the tube were calculated. Experiments were carried out, varying the flow rate, the temperature of cooling brine, and the thickness of tube wall. The condition under which slurry ice was formed continuously without adhesion of ice to the cooling wall was clarified. Though decrease in the thermal resistance of the tube increased the rate of ice formation or raised the brine temperature, it narrowed the range of the flow rate and of the brine temperature in which slurry ice was formed continuously. 相似文献
37.
Phase-separated domains prepared in the two-phase region were dissolved at a temperature in the single-phase region, and their dissolution dynamics was studied by using the time-resolved light scattering (TRLS) technique and a scanning electron microscope (SEM). The time tps of preparation of domains was chosen to be long enough for phase separation to proceed into the late stage. The scattered light intensity at small wavenumbers increased before it attenuated. As tps increased, the increase at smaller wavenumbers became more significant and the peak intensity decreased only slightly with dissolution time. The characteristic wavenumber qm evaluated from TRLS and SEM followed the power-law relation qmt−0.3. 相似文献
38.
在本试验中,采用智能同步广播激励器和CCTV传输的1MHz标频,实现了中波同步广播同频保护率趋于0dB.并提出了自适应相位跟踪同步的概念。 相似文献
39.
以Takens嵌入定理和影子定理为理论依据,提出一种能对混沌信号去噪的局部投影方法。该方法不需潜在动力学系统的先验知识,符合工程实用的要求。通过实验结果表明这种方法对混沌信号去噪很有效。 相似文献
40.
受干扰波相位测量的一种新方法 总被引:4,自引:1,他引:3
为了测量受噪声和谐波干扰的两个信号间的相位差,基于自适应带通滤波器(ABF)和测量信道交换技术,提出了一种新的测量方法。ABF采用可编程开关电容滤波器(PSCF)和锁相环,明显地抑制了噪声和谐波干扰,频率跟踪范围超过四个倍频程(0.5Hz-6kHz)。用微处理器控制4个开关来交换测量信道,可以基本上消除测量通道引入的附加相位移。两种方法结合提高了相位差的测量精度。实验说明了该测量方法的有效性,该方法也适合于被测信号为慢时变情况。 相似文献