铝薄膜CMP影响因素分析

提出了在碱性抛光液中铝薄膜化学机械抛光的机理模型,对抛光液的pH值、磨料、氧化剂浓度对过程参数的影响做了一些试验分析。试验结果表面粗糙度的铝薄膜所需的最优化CMP过程参数:硅溶胶粒径为15～20nm,pH值为10.8～11.2,氧化剂浓度为2.5%～3%。     

电荷耦合器件积分时间对微型成像系统成像质量的影响

在光圈固定的情况下，确定合适的积分时间对于提高微型电荷耦合器件(CCD)成像系统的成像质量，增强微型飞行器的侦察能力具有十分重要的意义。本文讨论了决定CCD积分时间的各种因素，重点研究了适用于微型飞行器的CCD成像系统的积分时间与像移的关系，并进一步推导了计算像移量的相关数学模型。利用该模型对不同积分时间内采集的运动图像进行了像质评价，结果表明，在保证曝光量的前提下，当像移量被限制在1个像素内时，可以获得相对理想的运动图像像质。     

基于ARM微处理器的故障记录系统

给出了在普通数据采集基础上的故障记录系统的设计方案,利用ARM微处理器实现了模拟信号较完整的故障波形记录和开关信号的事件顺序记录(SOE)。对LPC2106ARM系列处理器、ADS7871模/数转换器以及数据通信接口等内容进行了讨论,阐述了系统的工作原理、软件处理方式、系统通信。该设计方案电路简单,特别适用于电力系统。     

碳纤维连续抽油杆作业车自动调平系统设计

为保证碳纤维连续抽油杆作业车作业时工作平台处于水平状态,防止侧翻,开展了作业车自动调平系统的设计。在给出自动调平系统构成的基础上,着重论述了系统的自动调平控制方案、自动调平控制原理以及自动调平控制软件的设计,给出作业车自动调平控制系统流程图。     

Pure Significance Tests of the Unit Root Hypothesis Against Nonlinear Alternatives

Abstract. This paper describes artificial neural network based pure significance tests for the unit root hypothesis against nonlinear alternatives. The theoretical properties of the tests are discussed and a Monte Carlo investigation of their small sample properties is undertaken.     

Characterization and optimization of copper chemical mechanical planarization

The feature scale planarization of the copper chemical mechanical planarization (CMP) process has been characterized for two copper processes using Hitachi 430-TU/Hitachi T605 and Cabot 5001/Arch Cu10K consumables. The first process is an example of an abrasive-free polish with a high-selectivity barrier slurry, while the second is an example of a conventional abrasive slurry with a low-selectivity barrier slurry. Copper fill planarization has been characterized for structures with conformal deposition as well as with bumps resulting from bottom-up fill. Dishing and erosion were characterized for several structures after clearing. The abrasive-free polish resulted in low sensitivity to overpolish and low saturation levels for dishing and erosion. Consequently, this demonstrated superior performance when compared to the International Technology Roadmap for Semiconductors (ITRS) 2000 roadmap targets for planarization. While the conventional slurry could achieve the 0.13-μm technology node requirements, the abrasive-free polish met the planarization requirements beyond the 0.10-μm technology node.     

游梁式抽油机二次平衡分析

为解决游梁式抽油机能耗大、效率低的问题，设计了二次平衡装置。这种装置通过是挂在抽油机后端的平衡重的平衡作用，降低一次平衡曲柄轴净扭矩的两个峰值，达到减少能耗提高效率的目的。对抽油机的二次平衡作了较详尽的理论分析，给出了实行二次平衡后曲柄轴净扭矩的计算公式和安装二次平衡装置前后曲柄轴净扭矩曲线图。在大庆油田两口井上进行的现场试验结果表明，安装二次平衡装置后，两口井年节约电费分别为0.25万元和1．17万元，经济效益明显。     

Processing and microstructure of non-oxide ceramic fibres

Research and development efforts on high-temperature, oxidation-resistant fibres have increased over the past decade due to the demand for light-weight, stiff and strong composite materials in aerospace applications. Varieties of ‘high-performance’, continuous, non-oxide fibres with low-density, high tensile strength and tensile modulus have been developed either from organic precursors or via chemical vapour deposition for fabrication of ceramic matrix composites. Fibres derived from polymer precursors (e.g. Nicalon, Tyranno, HPZ) are small in diameter (compared to CVD monofilaments) and are ideally suited for ceramic composites. Processing, microstructural stability and mechanical properties of these newly developed SiC and Si₃N₄ base fibres are briefly reviewed in this paper.     

微型无阀泵参数化结构设计及测试

 从理论计算和试验两方面研究了用于微流控化学分析芯片的微型无阀泵流动特性，初步建立了微型无阀泵流道结构的数学模型，重点讨论了结构参数的选取原则及相应的流动阻尼系数的计算方法． 通过试验验证了数值计算的可靠性，为微型无阀泵参数化设计及优化提供了理论依据及经验曲线．     

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我国是煤资源大国，长期来在采煤的同时，抽放排空大量煤层瓦斯，不仅浪费大量资源，还严重污染大气。利用煤层瓦斯发电是解决煤层瓦斯放空的重要途径 。文章介绍一种全新的有别于传统 发动机的瓦斯内燃机空燃自动混合控制装置，其中包括：煤层瓦斯的理化特性、装置的结构、工作原理及工作过程，阐述了结构参数对发动机性能的影响。经过在中心瓦斯工区内燃发动机组群上安装试运行，结果表明：该装置可以适用于高、中、低不同浓度的煤层瓦斯，性能稳定、可靠，达到了设计性能指标，完全满足燃气,内燃机组的使用要求，并取得了很好的经济效益、生态效益和环保效益。