制备软X光多层膜的转速控厚法

本文提出了一种新的监控软X光多层膜膜厚的方法——转速控厚法,利用这种方法镀制的设计周期厚度分别为8.4和10nm,周期数达50对和30对的W/C多层膜,经小角X光衍射测试,结果表明周期厚度随机误差在0.1nm左右。     

Experimental Investigation of Epoxy Bonded Polymethylmethacrylate Joints

This paper presents an experimental investigation into various aspects of epoxy-bonded polymethylmethacrylate (PMMA) and PMMA-to-aluminium joints. The effects of adhesive thickness, overlap area, surface roughness, and environmental exposure on the joint strength were studied. Results indicated that the joint strength was not directly proportional to the overlap area, while sanding had a positive effect on the joint strength. A negative effect was observed when adhesive thickness was increased. The fatigue behaviour of adhesively-bonded joints under dynamic loading was found to be independent of frequency, for the range of values tested; however, it was dependent on the test temperature with greater reduction in fatigue life observed in PMMA-to-aluminium joints at higher temperature. Empirical equations from which the fatigue life of joints can be predicted were obtained by regression analysis. Intermittent fatigue testing of the joints was also performed. The epoxy adhesive tested proved to be a satisfactory choice for outdoor exposure. The rate of degradation of the adhesive was slow with the adherend itself degrading at a faster rate than the adhesive or the bondline.     

椭偏仪的研究进展

主要介绍了椭偏仪的测量原理,比较了不同结构的椭偏仪,并根据具体应用需求介绍了椭偏光谱仪、红外椭偏光谱仪、成像椭偏仪和广义椭偏仪,分析了椭偏仪的数据处理过程,最后展望了椭偏仪的发展趋势.     

电涡流式钞票厚度检测传感器设计

在ATM机和纸币清分机中,钞票的厚度检测是必须的功能,通过钞票的厚度特征可以识别钞票上粘贴的胶带和折角等,从而剔除不合格钞票。本文论述了一种电涡流式钞票厚度检测传感器,采用并列的结构相同的多路厚度传感器,通过每路独立的厚度传感器检测出来的信号,拼接成整张钞票的厚度特征,从而识别钞票是否有异常。本传感器具有电路简单、成本低、检测范围大等优点。     

The influence of stamp deformation on residual layer homogeneity in thermal nanoimprint lithography

This work studies the relation between the residual layer thickness and the patterned area size, fill factor and stamp thickness for identical stamps with opposite polarity (positive and negative) made in silicon and nickel. Important and different variations in the homogeneity of the residual layer are obtained in comparison with the values predicted by the theory. This will help to optimize stamp designs and choose appropriate process setups and parameters for nanoimprint with improved pattern transfer capability.     

高速全晶圆薄膜厚度均匀图像在CMP工艺快速评定中的应用

应用高速度、高点密度熏覆盖全晶圆的薄膜检测仪得到的膜厚均匀图像来对CMP工艺进行快速评定。高点密度、全晶圆的膜厚均匀图像能即时显现出CMP工艺中的非对称性膜厚均匀问题并为根源分析和工艺改进提供快速反馈。对一些用常规的稀疏抽样点薄膜测量方法难以检测到但常见的CMP工艺中导致非对称性膜厚均匀问题熏例如垫片异常熏抛光机头安装不当熏空白晶圆nanotopography等进行比较分析和探讨。     

冷硬树脂砂在球墨铸铁和铸钢件上的应用

介绍了冷硬树脂砂在该厂球墨铸铁和铸钢件上的应用。     

铁型覆砂铸造球墨铸铁曲轴

介绍了铁型覆砂铸造球墨铸铁曲轴的工艺,并就推广应用中发现的铸造缺陷提出了防止措施.     

Back channel etch chemistry of advanced a-Si:H TFTs

We report on the effects of back channel etch depth and etchant chemistry on the electrical characteristics of inverted staggered advanced amorphous silicon thin-film transistors. We found that the optimum amorphous silicon film thickness in the channel is about 800-1100 Å. Three dry etch, HBr + Cl₂, C₂F₆, and CCl₂F₂ + O₂, and one wet etch, KOH, chemistries are used for the back channel etch processing. We established that dry etch can be used for the back channel etch of amorphous silicon transistor without degrading its electrical characteristics.     

Fixed-angle, energy-dispersive x-ray reflectivity measurement of thin tantalum film thickness

In this work, we employed a fixed-angle, energy-dispersive x-ray reflectivity technique to obtain the thickness of thin tantalum films (examples <9 nm) within seconds using a conventional, low-energy x-ray copper or chromium source (20 kV/20 mA/400 W). We compared this fixed-angle, energy-dispersive result with more conventional fixed-energy (monochromatic source), angular-dispersive x-ray reflectivity to establish the validity of the energy-dispersive method. This x-ray technique may be particularly useful for the metrology of growing thin-barrier layers, atomic-layer passivation, and seed-layer measurements in future microelectronics applications. Currently, thickness precision is limited by modeling assumptions and the energy discrimination available from x-ray detectors.