同步仿生机械臂设计

本设计利用安装在人手臂部的加速度传感器采集运动信号,单片机智能运算后发出控制指令,实现机械臂与人臂的同步运动。系统将在采集传感器的输出模拟量经过单片机的处理产生PWM波,使用PWM波驱动舵机实现准确定位,使机械臂实现三自由度的运动。而且还可通过编程和仿生来完成各种预期的作业任务,在构造和性能上兼有人和机器各自的优点,体现了人的智能和适应性。     

ULSI多层互连中的化学机械抛光工艺

介绍了化学机械抛光(CMP)技术在大规模集成电路多层互连工艺[1]中的重要作用,对CMP过程和CMP的影响因素进行简单分析。总结出CMP技术在多层互联平坦化中的优势,介绍目前常用互连材料中SiO2介质及其金属材料钨和铜的化学机械抛光常用分析机理,并简单介绍了各种互联材料常用的抛光液及抛光液的组分,对抛光液作了简单的对比。针对传统CMP过程存在的问题,分析了皮带式和固定磨料的CMP技术。     

Applications of electron paramagnetic resonance to studies of defects in insulators and semiconductors

Electron paramagnetic resonance (EPR) which is the absorption of electromagnetic waves in the microwave frequency domain has been used for many years to study magnetic dipoles in crystals subjected to magnetic fields. These magnetic dipoles arise from electrons in the material whose intrinsic spin is exposed due to processes such as doping with transition metal ions, doping with ions whose spin is not locked up with chemical bonding and irradiation with bond breaking energy. The sensitivity of the EPR technique depends on such experimental parameters as, incident microwave power, size of the sample, quality of the microwave cavity, number of paramagnetic spins participating in the absorption, width of the EPR resonance line, temperature of the sample and relaxation time of the spin system to the lattice. The experimental spectrum is described by parameters which by the application of basic quantum mechanics can be related to properties of the wave function of the electron spin in the crystal environment such as bonding directions to neighboring ions in the crystal lattice. Some examples of this analysis will be presented to show how EPR is used in the study of defects in Si and SiO₂.     

Plasma enhanced chemical vapor deposition of SiO2 films at low temperatures using SiCl4 and O2

Silicon dioxide films have been deposited by Plasma-Enhanced Chemical Vapor Deposition (PECVD) technique using SiCl₄ and O₂ as reactive materials. Infra-red transmittance, Auger electron spectroscopy analysis, ellipsometry, electrical, and chemical etch measurements have been used to characterize these films. It is possible to obtain good quality oxides at a substrate temperature of 200° C using a low flow of reactant gases. High flow of reactant gases results in highly non-homogeneous porous films. The best oxide films obtained show destructive breakdown at electrical fields above 4 MV/cm and a fixed charge density of the order of 2.6 × 10¹¹ charges/cm².     

Properties of a poly-Si/GaAs layered structure on Si for Si heterojunction bipolar transistor

The properties of poly-Si/GaAs layered films on Si for use in wide bandgap emitters for Si heterojunction bipolar transistors (Si-HBTs), were studied. A smooth GaAs film surface grown on Si was obtained at low temperature (200° C) from the initial stage of growth. The x-ray diffraction (XRD) results indicated that strong GaAs orientation (111) was obtained for the poly-Si/GaAs/Si-substrate layered structure after annealing at 800° C for 20 sec. Secondary ion mass spectroscopy (SIMS) profiles indicated that impurity diffusion from the GaAs layer into the p-type Si substrate was negligible at 800° C. The electrical characteristics forn-poly-Si/n-GaAs/p-Si-substrate heterojunction diodes were also investigated.     

Crack formation in metallized single crystal silicon substrates

Ball bonding of metallized silicon substrates has been simulated by microindentation, with a hemispherical diamond indentor, of (100) silicon wafers that contained aluminum film layers. The indentation loads varied up to 35N and the thickest aluminum film, composed of four layers, was 100 × 10^-6 m. The radial cracks in the silicon, beneath the aluminum film, were measured as a function of indentation load and aluminum film thickness, and compared to that of unmetallized silicon. The crack lengths have been used to determine the fracture toughness,K _c = 24.4 ± 4.9 MPam^0.5, which is twice the value obtained by Vickers indentation experiments. A model describing the relationship between the film thickness versus the radial crack length is presented.     

Characteristics of thin film transistors fabricated in polysilicon films deposited by plasma enhanced chemical vapor deposition

Thin-film transistors (TFTs) fabricated in polysilicon films deposited by plasma enhanced chemical vapor deposition (PECVD) were characterized. The transistors were fabricated using a low temperature process (i.e., <- 700° C). The characteristics of the devices were found to improve as the deposition temperature of the polysilicon film increased. The best characteristics (μ _FE of 15 cm²/V _s andV _TH of 2.2V) were measured in the devices fabricated in the film deposited at 700° C. The devices fabricated in the PECVD polysilicon films were compared to those fabricated in polysilicon films deposited by thermal CVD in the same reactor in order to decouple the effect of the plasma. A coplanar electrode structure TFT with adequate characteristics (μ _FE of 8 cm²/V _s) was also demonstrated in the PECVD polysilicon films.     

Ge2Sb2Te5的电化学特性及化学机械抛光

从电化学角度研究了Ge2Sb2Te5薄膜在化学机械抛光液中的作用，以及不同的pH值和H2O2浓度下的电化学特性. 采用Solartron SI1287电化学设备测试了Ge2Sb2Te5薄膜在溶液中的开路电位和动电位扫描. 开路电位结果表明：Ge2Sb2Te5在pH值为10的抛光液中表现出钝化行为；而抛光液的pH值为11时，开始向活化转变；当pH值为12时，薄膜处于活化状态. 在动电位扫描过程中，不同的pH值和H2O2浓度下，薄膜的扫描曲线形状相似，表明薄膜腐蚀具有相同的反应机理. 自制碱性抛光液，对Ge2Sb2Te5薄膜进行化学机械抛光，用SEM和EDS对抛光后的结构进行分析. 结果表明，通过CMP实现了Ge2Sb2Te5填充结构.     

Intermetallic formation in Sn3Ag0.5Cu and Sn3Ag0.5Cu0.06Ni0.01Ge solder BGA packages with immersion Ag surface finish

The intermetallic compounds formed in Sn3Ag0.5Cu and Sn3Ag0.5Cu0.06Ni0.01Ge solder BGA packages with Ag/Cu pads are investigated. After reflow, scallop-shaped η-Cu₆Sn₅ and continuous planar η-(cu_0.9Ni_0.1)₆Sn₅ intermetallics appear at the interfaces of the Sn3Ag0.5Cu and Sn3Ag0.5Cu0.06Ni0.01Ge solder joints, respectively. In the case of the Sn3Ag0.5Cu specimens, an additional ε-Cu₃Sn intermetallic layer is formed at the interface between the η-Cu₆Sn₅ and Cu pads after aging at 150°C, while the same type of intermetallic formation is inhibited in the Sn3Ag0.5Cu0.06Ni0.01Ge packages. In addition, the coarsening of Ag₃Sn precipitates also abates in the solder matrix of the Sn3Ag0.5Cu0.06Ni0.01Ge packages, which results in a slightly higher ball shear strength for the specimens.     

Improved morphology and crystalline quality of MBE CdZnTe/Si

We report on continuing efforts to develop a reproducible process for molecular beam epitaxy of CdZnTe on three-inch, (211) Si wafers. Through a systematic study of growth parameters, we have significantly improved the crystalline quality and have reduced the density of typical surface defects. Lower substrate growth temperatures (∼250–280°C) and higher CdZnTe growth rates improved the surface morphology of the epilayers by reducing the density of triangular surface defects. Cyclic thermal annealing was found to reduce the dislocation density. Epilayers were characterized using Nomarski microscopy, scanning electron microscopy, x-ray diffraction, defect-decoration etching, and by their use as substrates for HgCdTe epitaxy.