二维直读型ICP发射光谱技术发展状况综述

电感耦合等离子体发射光谱技术是实验室内进行元素定量分析的重要方法之一.其应用范围从原来的冶金,工矿扩展到生命科学,环境保护,有机物分析等领域.近年来ICP发射光谱仪的研究更加注重于细节上的改进,如激光烧蚀技术,进样装置小型化,混合气体等离子体,底向观测,消色差器件等使得仪器性能得到进一步提升.     

电感耦合等离子体发射光谱测定米中的铜

铜是人体健康不可缺少的微量营养素,对于血液、中枢神经和免疫系统,头发、皮肤和骨骼组织以及脑子和肝、心等内脏的发育和功能有重要影响。本试验通过ICP对大米标准物质进行研究,测得精密度RSD%在1.153%左右,回收率在95.0%～101.7%,方法可靠、效果理想。     

利用CH4/H2/Ar及Cl2高密度等离子体对InSb的高速率刻蚀研究（英文）

利用感应耦合等离子体(ICP)进行了InSb刻蚀研究。为了实现高的刻蚀速率同时保证光滑的刻蚀表面,研究中在CH4/H2/Ar气氛中引入了Cl2。研究发现,对InSb的刻蚀速率随Cl2含量及ICP功率的升高而线性增加。当Cl2含量增加到超过12%或ICP功率大于900 W时,刻蚀表面变得粗糙,而易引起刻蚀损伤的直流偏压随ICP功率的升高而降低。此现象归因于刻蚀副产物InCl3在样品表面的聚集进而妨碍均匀刻蚀反应所致。当样品温度从20℃提高到120℃,刻蚀速率及表面粗糙度无明显变化。通过试验研究,实现了对InSb的高速率、高垂直度刻蚀,刻蚀速率大于500 nm/min,对SiO2掩模刻蚀选择比大于6,刻蚀表面光洁,刻蚀垂直度可达80°。     

第三代红外焦平面基础技术的研究进展

叙述了围绕第三代红外焦平面的需求所进行的HgCdTe分子束外延以及台面结芯片技术研究的一些成果。对GaAs、Si基大面积异质外延、p型掺杂以及台面刻蚀等主要难点问题进行了阐述。研究表明,7.6 cm(3 in)材料的组分均匀性良好,晶格失配引发的孪晶缺陷可以通过合适的低温成核方法得到有效抑制。在GaAs和Si衬底上外延的HgCdTe材料的(422)X射线衍射半峰宽的典型值为55″~75″。对ICP技术刻蚀HgCdTe的表面形貌、刻蚀速率、反应微观机理、负载效应和刻蚀延迟效应以及刻蚀损伤进行了研究,得到了高选择比的掩模技术和表面光亮、各向异性较好的刻蚀形貌。采用HgCdTe多层材料试制了长波n?蛳on?蛳p以及p?蛳on?蛳n型掺杂异质结器件以及双色红外短波/中波焦平面探测器,取得了一些初步结果。     

CVD of hard DLC films in a radio frequency inductively coupled plasma source

Chemical vapor deposition (CVD) of hard diamond-like carbon (DLC) films on silicon (100) substrates from methane was successfully carried out using a radio frequency (r.f.) inductively coupled plasma source (ICPS). Different deposition parameters such as bias voltage, r.f. power, gas flow and pressure were involved. The structures of the films were characterized by Fourier transform infrared (FTIR) spectroscopy and Raman spectroscopy. The hardness of the DLC films was measured by a Knoop microhardness tester. The surface morphology of the films was characterized by atomic force microscope (AFM) and the surface roughness (R_a) was derived from the AFM data. The films are smooth with roughness less than 1.007 nm. Raman spectra shows that the films have typical diamond-like characteristics with a D line peak at 1331 cm⁻¹ and a G line peak at 1544 cm⁻¹, and the low intensity ratio of I_D/I_G indicate that the DLC films have a high ratio of sp³ to sp² bonding, which is also in accordance with the results of FTIR spectra. The films hardness can reach approximately 42 GPa at a comparatively low substrate bias voltage, which is much greater than that of DLC films deposited in a conventional r.f. capacitively coupled parallel-plate system. It is suggested that the high plasma density and the suitable deposition environment (such as the amount and ratio of hydrocarbon radicals to atomic or ionic hydrogen) obtained in the ICPS are important for depositing hard and high quality DLC films.     

ICP-AES测定镍基高温合金中主量与杂质元素分析技术

研究了ICP－AES法测定镍基高温合金中Al,B,Co,Cr,Fe,Hf,Mo,Ta,Ti和W等10个元素的分析方法，进行了基体元素Ni及共存元素对10个分析元素的光谱干扰研究，选择了合适的分析谱线和内标线，加入回收率为99．0％－100．4％，方法准确，快速，简便。     

基于DNSS与点到平面的ICP结合的点云配准算法

针对现有点云配准算法众多、配准速度和配准精度不尽相同的问题,本文提出了一种将DNSS与点到平面的ICP相结合的配准算法,利用DNSS提取源点云数据的关键点,利用关键点约束查找对应匹配点对,结合点到平面的误差度量方法计算最优刚体变换矩阵,从而完成点云配准。对配准后的结果进行误差分析,实验结果证明,基于DNSS与点到平面ICP结合的点云配准算法配准精度高于点到点的ICP算法和点到平面的ICP算法,且该方法处理几何特征复杂、特征明显的点云数据优势显著。     

钙、镁型发动机油复合剂的抗磨性能

用红外光谱、ICP等离子体发射光谱比较了不同类型配方的SJ 15W／40汽油机油在轿车中使用性能的变化，并与SG15W／40的性能进行了比较。结果表明，各种机油对活塞和活塞环的抗磨性能差别不大；对于SI级机油，钙型配方较镁型配方对气缸壁的磨损较小；镁型配方的SI机油对气缸壁磨损大于钙型配方的SG机油。红外光谱分析表明，在所研究的使用期内，各油品的氧化较轻。     

基于ICP的机载FC网络性能评测

综合核心处理机(ICP)作为航空电子系统的核心处理单元,其网络性能直接影响整个航空电子系统的综合性能.为了改进ICP软硬件设计,提高ICP系统的整体性能,解决分布式计算机系统通信效率问题,针对某型飞机ICP的统一FC网络的性能展开测评,在确定了平均传输率和平均传输时延的前提下,搭建测试环境,在单接口测试的基础上提出了广播式传输测试和有负载的多对并发测试,采用优先级队列调度和加权轮询调度算法相结合的调度算法.通过在拓扑模型上进行实验,模拟ICP工作环境下FC网络的性能,并对测试结果进行了分析,给出了ICP互联网络综合评价方法,为IMA航空电子系统的整体性能改进提供了帮助.     

EEG/MEG source imaging in the absence of subject's brain MRI scan: Perspective on co-registration and MRI selection approach

EEG/MEG source localization requires a subject's brain MRI to compute the sourcemodel and headmodel . As part of this computation, co-registration of the digitized head information and brain MRI scan is the essential step. However, in the absence of a brain MRI scan, an approximated sourcemodel and headmodel can be computed from the subject's digitized head information and brain MRI scans from other subjects. In the present work, we compared the fiducial (FID)- and iterative closet point (ICP)-based co-registration approaches for computing an approximated sourcemodel using single and multiple available brain MRI scans. We also evaluated the two different template MRI selection strategies: one is based on objective registration error, and another on sourcemodel approximation error. The outcome suggests that averaged approximated solutions using multiple template brain MRI scans showed better performance than single-template MRI-based solutions. The FID-based approach performed better than the ICP-based approach for co-registration of the digitized head surface and brain MRI scan. While selecting template MRIs, the selection approach based on objective registration error showed better performance than a sourcemodel approximation error-based criterion. Cross-dataset performance analysis showed a higher model approximation error than within-dataset analysis. In conclusion, the FID-based co-registration approach and objective registration error-based MRI selection criteria provide a simple, fast and more accurate solution to compute averaged approximated models compared with the ICP-based approach. The demography of brain MRI scans should be similar to that of the query subject whose brain MRI scan was unavailable.