InAs/GaSb II类超晶格长波红外焦平面探测器研究

InAs/GaSb II类超晶格材料是第三代红外焦平面探测器的优选材料。报道了一种面阵规模为320×256、像元中心距为30 μm的InAs/GaSb II类超晶格长波红外焦平面器件。在77 K时,该器件的平均峰值探测率为7.6×10¹⁰ cm·Hz^1/2·W^-1,盲元率为1.46%,响应非均匀性为7.55%,噪声等效温差(Noise Equivalent Temperature Difference, NETD)为25.5 mK。经计算可知,这种器件的峰值量子效率为26.2%,50%截止波长为9.1 μm。最后对该器件进行了成像演示。结果表明,该研究为后续的相关器件研制奠定了基础。     

128x128元InAs/GaSb II类超晶格红外焦平面探测器

报道了128×128元InAs/GaSb Ⅱ类超晶格红外焦平面阵列探测器的研究成果.实验采用分子束外延技术在GaSb衬底上生长超晶格材料.红外吸收区结构为13 ML(InAs)/9 ML(GaSb),器件采用PIN结构,焦平面阵列光敏元大小为40μm×40μm.通过台面形成、侧边钝化和金属电极生长,以及与读出电路互连等工艺,得到了128×128面阵长波焦平面探测器.在77 K时测试,器件的100%截止波长为8μm,峰值探测率6.0×109cmHz1/2W-1.经红外焦平面成像测试,探测器可得到较为清晰的成像.     

256×256 focal plane array midwavelength infrared camera based on InAs/GaSb short-period superlattices

An infrared camera based on a 256×256 focal plane array (FPA) for the second atmospheric window (3–5 μm) has been realized for the first time with InAs/GaSb short period superlattices (SLs). The SL detector structure with a broken gap type-II band alignment was grown by molecular beam epitaxy on GaSb substrates. Effective bandgap and strain in the superlattice were adjusted by varying the thickness of the InAs and GaSb layers and the controlled formation of InSb-like bonds at the interfaces. The FPAs were processed in a full wafer process using optical lithography, chemical-assisted ion beam etching, and conventional metallization technology. The FPAs were flip-chip bonded using indium solder bumps with a read-out integrated circuit and mounted into an integrated detector cooler assembly. The FPAs with a cut-off wavelength of 5.4 μm exhibit quantum efficiencies of 30% and detectivity values exceeding 10¹³ Jones at T=77 K. A noise equivalent temperature difference (NETD) of 11.1 mK was measured for an integration time of 5 ms using f/2 optics. The NETD scales inversely proportional to the square root of the integration time between 5 ms and 1 ms, revealing background limited performance. Excellent thermal images with low NETD values and a very good modulation transfer function demonstrate the high potential of this material system for the fabrication of future thermal imaging systems.     

InAs Wires on InP (001)

在分子束外延生长的InAs/In0.52Al0.48As/InP异质结体系中,形成InAs量子线.这些InAs量子线在生长和结构方面有一些独到的特性,并介绍了本实验室在研究InAs量子线的生长和结构方面所做的工作.     

InAs／InP_（0．7）Sb_（0．3）热电子晶体管的电流增益及最高收集极电压

分析ＩｎＡｓ／ＩｎＰ（０．７）Ｓｂ（０．３）热电子晶体管的电流增益β及最高收集极电压Ｖ（ＣＭ）。计算结果表明，β超过２０，Ｖ（ＣＭ）接近１．５Ｖ。     

自组织InAs/GaAs量子点的表面氮化研究

用低温光荧光(PL)和透射电子显微镜(TEM)研究了表面氮化自组织InAs/GaAs量子点的光学性能和微观结构。结果表明氮化后形成薄层的InAsN薄膜作为应变缓和层覆盖在量子点的表面,使得随着氮化时间的增加,InAs量子点的位错密度提高、尺寸变大、纵横比提高、发光波长变长、强度变低。     

Spin Dynamics in Narrow-Gap Semiconductor Epitaxial Layers

We report on investigation of the spin dynamics in InAs and InSb films grown on GaAs at a temperature range from 77 K to 290 K. For both materials, the large lattice mismatch with the GaAs substrate results in the formation of an interface accumulation layer with a large defect concentration, which strongly affects the spin relaxation in these areas. Moreover, the native surface defect in the InAs films resulted in an additional charge accumulation layer with high conductivity, but very short spin lifetime. In contrast, in InSb layers, the surface states introduce a depletion region. We have correlated the spin relaxation with a multi-layer analysis of the transport properties, and find that in a 1 μm thick InAs film, approximately 70% of the total current flows through the interface and surface accumulation layers, which have sub-picosecond lifetimes, whereas in InSb films of the same thickness, the semiconducting layer carries more than 90% of the total current, and the spin lifetime in the accumulation layer is only slightly less than that of the central semiconducting layer. We suggest that InSb could be a more attractive candidate for spintronic applications than InAs.     

InAlSb/InAs/AlGaSb Quantum Well Heterostructures for High-Electron-Mobility Transistors

Heterostructures for InAs-channel high-electron-mobility transistors (HEMTs) were investigated. Reactive AlSb buffer and barrier layers were replaced by more stable Al_0.7Ga_0.3Sb and In_0.2Al_0.8Sb alloys. The distance between the gate and the channel was reduced to 7–13 nm to allow good aspect ratios for very short gate lengths. In addition, n⁺-InAs caps were successfully deposited on the In_0.2Al_0.8Sb upper barrier allowing for low sheet resistance with relatively low sheet carrier density in the channel. These advances are expected to result in InAs-channel HEMTs with enhanced microwave performance and better reliability.     

Observation of coupling between zero- and two-dimensional semiconductor systems based on anomalous diamagnetic effects

We report the direct observation of coupling between a single self-assembled InAs quantum dot and a wetting layer, based on strong diamagnetic shifts of many-body exciton states using magneto-photoluminescence spectroscopy. An extremely large positive diamagnetic coefficient is observed when an electron in the wetting layer combines with a hole in the quantum dot; the coefficient is nearly one order of magnitude larger than that of the exciton states confined in the quantum dots. Recombination of electrons with holes in a quantum dot of the coupled system leads to an unusual negative diamagnetic effect, which is five times stronger than that in a pure quantum dot system. This effect can be attributed to the expansion of the wavefunction of remaining electrons in the wetting layer or the spread of electrons in the excited states of the quantum dot to the wetting layer after recombination. In this case, the wavefunction extent of the final states in the quantum dot plane is much larger than that of the initial states because of the absence of holes in the quantum dot to attract electrons. The properties of emitted photons that depend on the large electron wavefunction extents in the wetting layer indicate that the coupling occurs between systems of different dimensionality, which is also verified from the results obtained by applying a magnetic field in different configurations. This study paves a new way to observe hybrid states with zero- and two-dimensional structures, which could be useful for investigating the Kondo physics and implementing spin-based solid-state quantum information processing.

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