Manipulation of extinction spectra of P3HT/PMMA medium arrays on silicon substrate containing self-assembled gold nanoparticles

In this study, we report a simple novel approach to modulate the extinction spectra of P3HT/PMMA by manipulating the medium arrays on a substrate that is coated with self-assembled gold nanoparticles. The 20 nm gold nanoparticles were synthesized and then self-assembled on the APTMS/silicon substrate surface by immersing the substrate into the gold colloid suspension. A high-resolution P3HT/PMMA photoluminescent electron beam resist was used to fabricate various square hole arrays on the substrate containing gold nanoparticles. The P3HT/PMMA medium composition causes the blue shifts in the extinction peaks of up to 40.6 nm by decreasing the period from 500 nm to 200 nm for P3HT/PMMA square hole arrays with a diameter of 100 nm. The magnitude of blue shift is directly proportional to the product of the changes of medium refractive index and the array structure factor. These peak shifts and intensity of extinction spectra for various P3HT/PMMA medium arrays are well described by the finite-difference time-domain (FDTD) simulation results. Since this simple cost-effective technique can tune the extinction spectrum of medium and adding the gold nanoparticles can give more functionalities for sensing applications, such as surface-enhanced Raman scattering (SERS), that provides good opportunities for the design and fabrication of new optoelectronic devices and sensors.     

Microfluidics for Processing Surfaces and Miniaturizing Biological Assays

This review is an account of our efforts to develop a versatile and flexible microfluidic technology for surface‐processing applications and miniaturizing biological assays. The review is presented in the context of current trends in microfluidic technology and addresses some of the major challenges for confining chemical and biochemical processes on surfaces: the sealing of a microchannel with a surface, the world‐to‐chip interface, the displacement of liquids in small conduits, the sequential delivery of multiple solutions, the accurate patterning of surfaces, the coincident detection of various analytes, and the detection of analytes in a small and dilute sample. Our solutions to these problems include the use of reversible sealing, capillary phenomena for powering and controlling liquid transport, and non‐contact microfluidics for spotting and drawing (on surfaces) with flow conditions. These solutions offer many advantages over conventional techniques for handling minute amounts of liquids and may find applications in lithography, biopatterning (e.g., the patterning of biomolecules), diagnostics, drug discovery, and also cellular assays.     

193 nm光刻散射条技术研究

介绍了193nm光刻中的散射条技术，并利用标量衍射和傅里叶光学理论，对掩模和光瞳平面上衍射图形的空间频率进行了深入的分析，从理论上解释了散射条的工作原理。通过商用光刻模拟软件PROLITH，对散射条的参数进行了优化，并总结出193nm光刻中孤立线散射条的优化方法。     

光刻机宏动试验运动平台设计及其减振系统仿真研究

根据光刻机的步进运动、同步扫描运动和自然振动的特点,设计了两种形式的宏动运动平台结构图和整个系统精密减振方法,并选用STACIS2000减振器作为系统的主动减振器。对ADAMS的求解原理进行了简单介绍并运用ADAMS仿真软件分别建立了两种结构对应的虚拟仿真模型,对减振系统分别无主动控制和有主动控制进行了仿真研究。结果表明,没有主动控制的结果不能满足光刻机的工作要求,采用主动控制比没有主动控制的效果要好并能满足工作要求。通过两种方案的结果对比分析,选择第二种结构方案作为本课题的设计方案。