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Recently, there has been high demand on miniaturizations of bio-instruments and wide range gas flux measurement in the field of chemistry and mechanics. This paper presents the design, fabrication, and characterization of a silicon-glass-based thermal distribution gas flow meter (20 mm × 10 mm × 1.6 mm) with a wide detection range. To facilitate the fabrication and maintain the stability of the sensor, a platinum (Pt) thin film was adopted as the heater and thermometers. Both the thermal property and temperature sensitivity of Pt thin film were characterized. SiO2 passivation layers were deposited on top of the Pt film to prevent thermal and electrical shift of sensitive elements. Three pairs of thermometers were constructed beside the heater. Sensitivity and gas flux range of the gas flow meter can be increased by alternate use of these three sensor pairs. We also introduced a specific hardware control circuit system for real-time gas flux monitoring through the connection with a computer interface. The proposed gas flow sensor device was capable of measuring gas flux within the range of 0.8-2800 ml/min, thus demonstrating the potential for a wide range of applications. 相似文献
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随着机载激光雷达技术的迅速发展,其数据处理已经成为整个生产过程的一个重要环节。文章就激光雷达数据处理过程中的GPS差分解算、坐标转换、点云数据分类、影像连接点、最终产品等的质量控制与解决方案进行分析和探讨。 相似文献
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A differential barometric altimetry technology based on the digital pressure sensors is put forward by using the existing mobile phone base station as reference. The height of known base station is precise. The pressure and temperature of the known base station is measured by sensors and transmitted to users. The absolute height value of user will be calculated by combining the barometric pressure values and temperature values from the base station with the locally measured values. In order to decrease system errors caused by inconsistency between the measured pressure value at base station and the locally measured pressure value,weights correction is applied based on multiple reference stations. The calculated height value is accurate due to eliminating the measured errors caused by irregular changes of atmospheric pressure,with the error less than 1 m. Resolution of elevation positioning depends upon the resolution of the pressure sensor,the relationship between which is approximately linear. When the resolution of sensor is 0. 0 1 hPa,the resolution of elevation positioning is about 0. 1 m. In addition,the data frame format at base station is designed in this article. Experimental results show that the method is accurate,reliable,stable and has the ability to distinguish floors and stair steps. 相似文献
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The fabrication of silicon based micromechanical sensors often requires bulk silicon etching after aluminum metallization. All wet silicon etchants including ordinary undoped tetramethyl ammonium hydroxide (TMAH)-water solution attack the overlaying aluminum metal interconnect during the anisotropic etching of (100) silicon. This paper presents a TMAH-water based etching recipe to achieve high silicon etch rate, a smooth etched surface and almost total protection of the exposed aluminum metallization. The etch rate measurements of (100) silicon, silicon dioxide and aluminum along with the morphology studies of etched surfaces are performed on both n-type and p-type silicon wafers at different concentrations (2, 5, 10 and 15%) for undoped TMAH treated at various temperatures as well as for TMAH solution doped separately and simultaneously with silicic acid and ammonium peroxodisulphate (AP). It is established through a detailed study that 5% TMAH-water solution dual doped with 38 gm/l silicic acid and 7 gm/l AP yields a reasonably high (100) silicon etch rate of 70 μm/h at 80 °C, very small etch rates of SiO2 and pure aluminum (around 80 Å/h and 50 Å/h, respectively), and a smooth surface (±7 nm) at a bath temperature of 80 °C. The etchant has been successfully used for fabricating several MEMS structures like piezoresistive accelerometer, vaporizing liquid micro-thruster and flow sensor. In all cases, the bulk micromachining is carried out after the formation of aluminum interconnects which is found to remain unaffected during the prolonged etching process at 80 °C. The TMAH based etchant may be attractive in industry due to its compatibility with standard CMOS process. 相似文献
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Capacitive micromachined ultrasonic transducers (CMUTs) bring the fabrication technology of standard integrated circuits into the field of ultrasound medical imaging. This unique property, combined with the inherent advantages of CMUTs in terms of increased bandwidth and suitability for new imaging modalities and high frequency applications, have indicated these devices as new generation arrays for acoustic imaging. The advances in microfabrication have made possible to fabricate, in few years, silicon-based electrostatic transducers competing in performance with the piezoelectric transducers. This paper summarizes the fabrication, design, modeling, and characterization of 1D CMUT linear arrays for medical imaging, established in our laboratories during the past 3 years. Although the viability of our CMUT technology for applications in diagnostic echographic imaging is demonstrated, the whole process from silicon die to final probe is not fully mature yet for successful practical applications. 相似文献