基于MEMS和MR传感器的嵌入式系统姿态测量

本文介绍了一种基于新型MEMS加速度计和MR(磁阻)传感器的嵌入式姿态测量系统.通过本系统,可以获得载体的三个姿态参数:基于地球磁场的方位角,基于地球重力场的俯仰角和横滚角.     

MEMS技术的现状及发展趋势

主要介绍了MEMS的研究和应用现状 ,分别从市场和技术的角度分析了MEMS的发展趋势。还根据国内研究现状 ,提出了我国发展MEMS的若干设想     

A silicon-glass-based microfabricated wide range thermal distribution gas flow meter

Recently, there has been high demand on miniaturizations of bio-instruments and wide range gas flux measurement in the field of chemistry and mechanics. This paper presents the design, fabrication, and characterization of a silicon-glass-based thermal distribution gas flow meter (20 mm × 10 mm × 1.6 mm) with a wide detection range. To facilitate the fabrication and maintain the stability of the sensor, a platinum (Pt) thin film was adopted as the heater and thermometers. Both the thermal property and temperature sensitivity of Pt thin film were characterized. SiO₂ passivation layers were deposited on top of the Pt film to prevent thermal and electrical shift of sensitive elements. Three pairs of thermometers were constructed beside the heater. Sensitivity and gas flux range of the gas flow meter can be increased by alternate use of these three sensor pairs. We also introduced a specific hardware control circuit system for real-time gas flux monitoring through the connection with a computer interface. The proposed gas flow sensor device was capable of measuring gas flux within the range of 0.8-2800 ml/min, thus demonstrating the potential for a wide range of applications.     

Barometric altimeter in wireless communication network indoor positioning system

A differential barometric altimetry technology based on the digital pressure sensors is put forward by using the existing mobile phone base station as reference. The height of known base station is precise. The pressure and temperature of the known base station is measured by sensors and transmitted to users. The absolute height value of user will be calculated by combining the barometric pressure values and temperature values from the base station with the locally measured values. In order to decrease system errors caused by inconsistency between the measured pressure value at base station and the locally measured pressure value,weights correction is applied based on multiple reference stations. The calculated height value is accurate due to eliminating the measured errors caused by irregular changes of atmospheric pressure,with the error less than 1 m. Resolution of elevation positioning depends upon the resolution of the pressure sensor,the relationship between which is approximately linear. When the resolution of sensor is 0. 0 1 hPa,the resolution of elevation positioning is about 0. 1 m. In addition,the data frame format at base station is designed in this article. Experimental results show that the method is accurate,reliable,stable and has the ability to distinguish floors and stair steps.     

针对不同类型热敏MEMS器件的高性能前置放大器设计

针对不同应用的热敏MEMS器件的界面电路设计高性能放大器,提出建立与CMOS工艺兼容的热敏MEMS器件前置放大器的IP库的概念。通过提取相关热敏器件的典型参数,设计低功耗、低噪声且分别符合精度和速度等特殊要求的前置放大器,对3种不同结构的放大器进行分析研究,并利用Cadence软件,基于CSMC 0.5μm标准CMOS工艺库进行设计仿真。仿真结果表明:3种不同结构的放大器可以用于相应性能要求的热敏MEMS器件中。     

基于MEMS传感器的数字式航姿系统设计

针对传统的模拟平台式航姿系统的不足,设计并实现了基于微惯性传感器和微磁传感器的数字式捷联惯性航姿系统。结合四元数微分方程,利用一种以加速度计和磁航向为观测量的卡尔曼滤波器进行数据融合,实现了对陀螺漂移的修正。PC104作为导航计算机,安装了微软高性能嵌入式操作系统。实物静态和跟踪实验表明:该航姿系统简单可行,能够很好地满足航姿系统精度要求。     

SOI基光学电流传感器的设计与仿真

将光纤与微电子机械系统(MEMS)技术相结合,设计了一种新颖的检测50Hz高压交流电的光学电流传感器(OCS)。用ANSYS软件分析了器件的模态、动态响应与热膨胀特性,并通过Matlab软件模拟了器件的工作性能。模拟计算表明:ANSYS与理论公式得到的结果基本一致;传感器的量程为100~3600A,对于大电流下的灵敏度可达到0.02dB/A,温度变化±50K时传感器相应的测试误差为0.2%。     

Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

The fabrication of silicon based micromechanical sensors often requires bulk silicon etching after aluminum metallization. All wet silicon etchants including ordinary undoped tetramethyl ammonium hydroxide (TMAH)-water solution attack the overlaying aluminum metal interconnect during the anisotropic etching of (100) silicon. This paper presents a TMAH-water based etching recipe to achieve high silicon etch rate, a smooth etched surface and almost total protection of the exposed aluminum metallization. The etch rate measurements of (100) silicon, silicon dioxide and aluminum along with the morphology studies of etched surfaces are performed on both n-type and p-type silicon wafers at different concentrations (2, 5, 10 and 15%) for undoped TMAH treated at various temperatures as well as for TMAH solution doped separately and simultaneously with silicic acid and ammonium peroxodisulphate (AP). It is established through a detailed study that 5% TMAH-water solution dual doped with 38 gm/l silicic acid and 7 gm/l AP yields a reasonably high (100) silicon etch rate of 70 μm/h at 80 °C, very small etch rates of SiO₂ and pure aluminum (around 80 Å/h and 50 Å/h, respectively), and a smooth surface (±7 nm) at a bath temperature of 80 °C. The etchant has been successfully used for fabricating several MEMS structures like piezoresistive accelerometer, vaporizing liquid micro-thruster and flow sensor. In all cases, the bulk micromachining is carried out after the formation of aluminum interconnects which is found to remain unaffected during the prolonged etching process at 80 °C. The TMAH based etchant may be attractive in industry due to its compatibility with standard CMOS process.     

Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging

Capacitive micromachined ultrasonic transducers (CMUTs) bring the fabrication technology of standard integrated circuits into the field of ultrasound medical imaging. This unique property, combined with the inherent advantages of CMUTs in terms of increased bandwidth and suitability for new imaging modalities and high frequency applications, have indicated these devices as new generation arrays for acoustic imaging. The advances in microfabrication have made possible to fabricate, in few years, silicon-based electrostatic transducers competing in performance with the piezoelectric transducers. This paper summarizes the fabrication, design, modeling, and characterization of 1D CMUT linear arrays for medical imaging, established in our laboratories during the past 3 years. Although the viability of our CMUT technology for applications in diagnostic echographic imaging is demonstrated, the whole process from silicon die to final probe is not fully mature yet for successful practical applications.     

基于Ansys的压电式四臂加速度计模拟分析

介绍了压电式四臂微加速度计的工作原理,耦合场分析原理以及ANSYS软件在压电分析中的具体应用.以压电式四臂加速度计为例,使用ANSYS软件对其进行了静态,模态等分析,得出了压电层厚度、悬臂厚度、长度对加速度计灵敏度的影响.在模态分析中得出了加速度计的前三阶固有频率和与之对应的振动形态.本文的结果可以直接应用到加速度计结构的优化设计.