等离子体刻蚀工艺控制模型分析

讨论了主因素分析法以及神经网络法在等离子体刻蚀工艺中的应用.结果表明主元素分析法可以实现对数据的压缩,而神经网络算法则显示出比传统的统计过程控制算法更好的准确性.     

Second harmonic generation from a ferroelectric film

We derive an expression for transmittivity (T_SHG) of second harmonic generation (SHG) signals from a ferroelectric (FE) film. Intensities of up and down fields in the medium are investigated in relation to T_SHG. The derivations are made based on undepletion of input fields and nonlinear wave equation derived from the Maxwell equations. We present two cases: film without mirrors and with partial mirrors. Expressions for the newly derived nonlinear susceptibility coefficients of SHG for real crystal symmetry [J. Opt. Soc. Am. B 19 (2002) 2007] are used to get more realistic results. Variations in T_SHG with respect to film thickness are illustrated.     

Profiling Voids Embedded in a Slab by a Non-Linear Model

In this paper, by applying a non linear model for the electromagnetic inverse scattering, a technique for the dielectric profiling of a planarly layered medium is investigated and applied to void localization and diagnostics inside a homogeneous lossless slab (one-dimensional geometry). Data are collected under plane wave multifrequency normal incidence. Suitable finite dimensional representations for the unknown functions are introduced and their influence on the model is discussed. The resulting functional equation is solved by the method of weighted residuals and the solution algorithm amounts to minimizing a non quadratic function, where particular attention is devoted to reduce the occurrence of local minima. Finally, the inversion algorithm is validated by applications to both simulated and experimental data.     

Multi-input,multi-output flight control system design for the YF-16 using nonlinear QFT and pilot compensation

Nonlinear quantitative feedback theory (QFT) and pilot compensation techniques are used to design a 2 × 2 flight control system for the YF-16 aircraft over a large range of plant uncertainty. The design is based on numerical input-output time histories generated with a FORTRAN implemented nonlinear simulation of the YF-16. The first step of the design process is the generation of a set of equivalent linear time-invariant (LTI) plant models to represent the actual nonlinear plant. It has been proven that the solution to the equivalent plant problem is guaranteed to solve the original nonlinear problem. Standard QFT techniques are then used in the design synthesis based on the equivalent plant models. A detailed mathematical development of the method used to develop these equivalent LTI plant models is provided. After this inner-loop design, pilot compensation is developed to reduce the pilot's workload. This outer-loop design is also based on a set of equivalent LTI plant models. This is accomplished by modelling the pilot with parameters that result in good handling qualities ratings, and developing the necessary compensation to force the desired system responses.     

Neural networks for nonlinear state estimation

Estimating the state of a nonlinear stochastic system (observed through a nonlinear noisy measurement channel) has been the goal of considerable research to solve both filtering and control problems. In this paper, an original approach to the solution of the optimal state estimation problem by means of neural networks is proposed, which consists in constraining the state estimator to take on the structure of a multilayer feedforward network. Both non-recursive and recursive estimation schemes are considered, which enable one to reduce the original functional problem to a nonlinear programming one. As this reduction entails approximations for the optimal estimation strategy, quantitative results on the accuracy of such approximations are reported. Simulation results confirm the effectiveness of the proposed method.     

An explicit finite difference method for finite-time observers

In this paper we present a numerical method for estimating the current state of a nonlinear control system. We use finite differences to discretize a modified version of the finite-time observer equations in James. The discretized equations are simple and easily programmed. The convergence and accuracy of the scheme is proved, and the scheme enjoys a number of important properties: availability of rate of convergence estimates, good robustness characteristics, and the ability to handle certain types of discontinuities in the observations. The major disadvantage is that the number of grid points required increases exponentially with the number of state dimensions.     

双轴晶体主平面上倍频的相位匹配

从折射率椭球方程和折射率椭球面出发，讨论光束在双轴晶体中传播及偏振的特性、主平面倍频共线相位匹配（PM）问题，得到了双轴晶体主平面内激光所有可能PM倍频的8种偏振组合及其相应的PM角公式、有效非线性（NL）系数deff的一般表达式。结果表明：得到的公式简单，可大大简化PM参数计算及优化设计；折射率椭球面是单层曲面，比双层的折射率面简单；基于折射率椭球面寻找所有可能PM的类型、偏振组合的方法物理图像简明，易于理解，大大降低了双轴晶体PM问题分析的难度。     

神经网络在缺陷识别中的应用

为了准确、快速地进行缺陷识别，介绍了一种新型的前馈神经网络模型，即径向基概率神经网络。与以往的算法相比，该方法具有分类识别精度高且速度快的优点。仿真获得了很好的结果。     

大坝安全信息权研究

大坝原型观测数据本身包含了丰富的信息，内在反映了监测项目之间的某种客观关系，基于此，应用PCA法及PPA法建立了确定大坝安全评价信息权重的正分析模型，一方面能够对数据进行降维处理，另一方面能挖掘数据内在信息，提取指标的相对重要性；并基于最优化准则，建立了信息赋权整合模型，解决了多种数学方法计算结果不一致性问题，最大限度地保持原始信息的完整性。     

DESIGN AND IMPLEMENTATION OF STATE OBSERVERS IN REACTIVE DISTILLATION

This study demonstrates that state observers can be developed and applied to infer the composition profiles of reactive distillation columns from noise-contaminated temperature measurements. The design and implementation of a Kalman filter (KF) and a Luenberger observer (LO) are carried out, and their performances are quantitatively assessed. The reliability, accuracy, and robustness of the two designs method are examined and compared quantitatively. The design and implementation of a Luenberger observer are simpler and easier to carry out than those of a Kalman filter. On the other hand, a Kalman filter is found to be more robust to a noisy measurements, erroneous initial estimates, and model uncertainties. A Luenberger observer could be used for composition estimation of reactive distillation when an ideal model of the system can reasonably approximate the real system; otherwise, a Kalman filter is recommended to be applied in more practical situations.