电子束光刻在纳米加工及器件制备中的应用

电子束光刻技术是推动微米电子学和微纳米加工发展的关键技术,尤其在纳米制造领域中起着不可替代的作用。介绍了中国科学院微电子研究所拥有JEOLJBX5000LS、JBX6300FS纳米电子束光刻系统和电子显微镜系统的电子束光刻技术实验室,利用电子束直写系统所开展的纳米器件和纳米结构制造工艺技术方面的研究。重点阐述了如何利用电子束直写技术实现纳米器件和纳米结构的电子束光刻。针对电子束光刻效率低和电子束光刻邻近效应等问题所采取的措施;采用无宽度线曝光技术和高分辨率、高反差、低灵敏度电子抗蚀剂相结合实现电子束纳米尺度光刻以及采用电子束光刻与X射线曝光相结合的技术实现高高宽比的纳米尺度结构的加工等具体工艺技术问题展开讨论。     

基于声波控制激光焦点的打孔系统

激光焦点的位置控制是激光打孔中需要解决的技术问题之一,在现有的几种激光焦点控制方法中,其技术核心均为如何通过传感器进行有效的信号测量.对于不同材料的激光打孔技术,研制一种适合材料的焦点位置监测系统就显得尤为重要.通过对不同方法的比较和试验,阐述了一种基于声波传感器的激光打孔焦点控制系统,系统通过加工过程中产生的声波作为控制信号,实时对激光焦点位置进行在线的监测和控制,通过对金刚石进行激光打孔试验,并对比传统控制方法,得到了满意的结果.     

呈现方式和任务导向对网络广告受众的眼动影响

考察呈现方式和任务导向对网络广告受众注意的影响。研究采用2(呈现方式:动态切换、静态)×2(任务导向:目标、非目标)的被试间设计。结果发现:(1)被试对动态广告和静态广告的注视次数及注视时间均无显著差异;(2)非目标导向的被试对网络广告的注视次数及注视时间均显著多于目标导向的被试;(3)相比于认知评价法,眼动分析法对网络广告效果的评估更为精细准确。研究表明,网络广告受众注意受任务导向的影响,而不受呈现方式的影响。     

以人为本:构建高校和谐学生管理模式

构建以人为本的高校和谐学生管理模式,促进人的全面发展,这是现代学生管理工作目标的新发展,也是教育改革的需要,更是时代发展的必然要求.新时期高校学生管理工作应坚持以人为本,努力创建和谐的师生关系和校园文化,不断加强学生管理制度化和法治化建设,以促进高校学生管理的和谐发展.     

Region-expansion for the Voronoi diagram of 3D spheres

Given a set of spheres in 3D, constructing its Voronoi diagram in Euclidean distance metric is not easy at all even though many mathematical properties of its structure are known. This Voronoi diagram has been known for many important applications from science and engineering. In this paper, we characterize the Voronoi diagram of spheres in three-dimensional Euclidean space, which is also known as an additively weighted Voronoi diagram, and propose an algorithm to construct the diagram. Starting with the ordinary Voronoi diagram of the centers of the spheres, the proposed region-expansion algorithm constructs the desired diagram by expanding the Voronoi region of each sphere, one after another. We also show that the whole Voronoi diagram of n spheres can be constructed in O(n³) time in the worst case.     

Modelling the Sensory Abilities of Intelligent Virtual Agents

An important property of Intelligent Virtual Agents (IVAs) is their capability to acquire/perceive information from their environment. Bearing in mind some studies on situational awareness – where sensitive perception can be understood as the first level of awareness – and taking into account one of the most successful awareness models in Computer Supported Cooperative Work (CSCW) – the Spatial Model of Interaction (SMI), we have developed a human-like perceptual model for IVAs. This perceptual model extends and reinterprets the key concepts of the SMI and also introduces some factors typical from human being perception with the aim of making perception, in this kind of systems, more human-like.     

An evaluation of semantic fisheye views for opportunistic search in an annotated image collection

Visual interfaces are potentially powerful tools for users to explore a representation of a collection and opportunistically discover information that will guide them toward relevant documents. Semantic fisheye views (SFEVs) are focus + context visualization techniques that manage visual complexity by selectively emphasizing and increasing the detail of information related to the users focus and deemphasizing or filtering less important information.In this paper we describe a prototype for visualizing an annotated image collection and an experiment to compare the effectiveness of two distinctly different SFEVs for a complex opportunistic search task. The first SFEV calculates relevance based on keyword-content similarity and the second based on conceptual relationships between images derived using WordNet. The results of the experiment suggest that semantic-guided search is significantly more effective than similarity-guided search for discovering and using domain knowledge in a collection.     

关注顾客——企业质量管理的中心

就现代企业质量管理的中心——“关注顾客”问题进行了分析、阐述。进一步对顾客的含义进行了拓展和延伸,说明了“关注顾客”的含义及其重要意义。归纳总结了企业当前在“关注顾客”方面的现状与差距,并就企业如何真正落实“关注顾客”的理念阐述了自己的观点。     

掩模曝光剂量的精细控制工艺设计

本文从光学邻近效应的机理出发,基于区域划分掩模特征线条,实施曝光剂量控制,从而达到光学邻近效应的精细校正。通过模拟测试图形得到改进后的掩模图形畸变率,与传统曝光剂量校正法相比,减少了约4%。