Surface roughness reduction for AlCu-based metallization: implications from an integrative point of view

For an AlCu-based metallization utilized in a state-of-the-art production environment we demonstrate that, beyond the more traditional electromigration properties, also surface roughness needs to be considered carefully in order to achieve optimal yields. Through experiments carried out on blanket wafers, mechanisms are proposed which account for a reduced surface roughness of aluminum grown on titanium rather than on a sandwich of titanium and titanium nitride. The evolution of aluminum grain growth and thus roughness is studied for the two different metal stacks. The practical implications of a reduced surface roughness for integration purposes is subsequently shown by considering etch behavior, short yield as well as signals depending on the metal’s reflectivity.     

用于HB-LED的Al_xGa_(1-x)As材料DBR的设计

给出了一种计算光学薄膜反射率的一般方法，并主要应用这种计算方法进行高亮度发光二极管中分布式布拉格反射器（ＤＢＲ）的设计工作。     

Bi–Ge–Sb–Sn–Te films for reversible phase-change optical recording

Bi–Ge–Sb–Sn–Te phase-change recording films (Films A–D) were prepared by the co-sputtering of Bi₃₀Ge₁₀Te₆₀, Ge₂₀Sb₈₀, Sb and Sn targets. The composition of the recording films was controlled by the dc power. The film composition, surface roughness and reflectivity were also closely related. Dynamic tests revealed that disks with Film C exhibited a low jitter value and a high modulation value after direct overwriting. Therefore, the composition of the recording film dominated the reversible recording properties of the phase-change optical disk.     

Influence of silane flow on MOVPE grown GaN on sapphire substrate by an in situ SiN treatment

In this paper, the influence of silane flow on metalorganic vapour phase epitaxy (MOVPE) grown GaN on sapphire substrate by an in situ SiN treatment has been investigated. A flow of 10 sccm with treatment duration of 120 s appears to be the optimal value and improves the crystal quality. The dislocation density, determined by atomic force microscopic (AFM), is as low as 5×10⁸ cm⁻². A reduction of I₂ full width at half maximum (FWHM) to 4 meV and an increase of both BE/YL and BE/DAP intensity ratio are also obtained.     

光栅单色仪及行波半导体光放大器端面反射率测量

分析了光栅单色仪对测量的影响及使用中注意的问题，用以指导测量半导体激光器镀减反射膜前后的自发辐射谱。通过比较同一电流下的两张谱图，可以在几十纳米的波长范围内确定行波式半导体激光放大器端面的剩余模式反射率，并获得了低于３×１０＾－５的极低反射率。在３４Ｍｂ／ｓ的速度下，实测行波放大器的光纤至光纤净增益为１５ｄＢ，放大器自身增益超过２５ｄＢ。     

多尺度时变地震信号反褶积

针对石油地震勘探中信号的时变性，提出了一个新的时变地震信号反褶积方法．在分析地层时变滤波特性的基础上，构造多尺度地震子波，分别用每一尺度的地震子波作确定反褶积，并基于信息最小熵准则设计检测函数，综合多尺度反褶积结果。理论数据和实际资料处理表明本文提出的方法具有较好的效果。     

Reactive ion etching (RIE) as a method for texturing polycrystalline silicon solar cells

Reactive ion etching (RIE) has been applied and developed as a method for texturing polycrystalline silicon solar cells. Two structures (microgrooves and pyramids) were produced in this work. Reflectivity measurements between 400–1200 nm show an overall reflectance of 5.6% for pyramid and 7.9% for groove structures. These results are better than those using wet anisotropic etch techniques on single-crystal silicon. RIE texturing was performed on cast polycrystalline silicon and produced better reflection control than standard TiO₂ antireflection coatings. RIE texturing also changes the incidence angle of light into the silicon, this improves the response for long wavelengths which can be utilised in thin film, polycrystalline or amorphous silicon solar cells.     

The FTIR studies of SnO2:Sb(ATO) films deposited by spray pyrolysis

Thin films of SnO₂:Sb were prepared by ultrasonic spray pyrolysis method. The role of antimony in the SnO₂ is demonstrated by FTIR. It is found that at low Sb concentrations, the Sb ions prefer to substitute Sn⁴⁺ in form of Sb⁵⁺. While beyond a certain Sb concentration, Sb ions start to be reduced to Sb³⁺, which have a negative effect on carrier concentration that, in turn, affects the reflectivity of SnO₂:Sb films. The increased disorder of SnO₂ at high Sb concentration is also shown by FTIR. The discussion of carrier scattering suggests that the ionized impurity and/or neutral impurity scattering are the dominant scattering mechanisms.     

光回归反射性安全用织物的研究

为了得到高反射率及其它性能优良的涂层产品，通过大量实验，优选出最佳的粘合剂，工艺配方及涂层厚度，利用数理分析的方法及电镜扫描，分析了影响反射率的各项因素。     

莺歌海盆地中深层高温高压河道砂岩储层含气性检测新方法

莺歌海盆地中深层河道砂岩含气储层受高温高压和强非均质性等地质条件的影响,导致其AVO地震响应特征类型多变,利用常规的P(AVO拟合截距)、G(AVO拟合斜率)、P×G、P+G等属性已不能有效识别该区储层的含气范围,亟待寻找适合该地区的、有效的储层含气性检测方法。为此,通过基于Shuey近似公式的单井AVO正演模拟技术和基于蒙特卡洛随机正演的AVO模拟技术,探讨了该区含气储层的AVO类型和含气性检测方法。研究结果显示,该区含气砂岩表现为第Ⅰ、第Ⅲ、第Ⅳ等3类AVO地震响应特征;然后提出采用标量泊松比反射率属性作为该区含气性检测的敏感属性因子,并模拟计算出了标定系数,进而得到了新的储层含气性检测方法。现场应用效果表明:1新方法预测结果与实际钻井结果相吻合;2新方法的运用效果明显优于常用的P、G、P×G、P+G等流体敏感属性因子;3有效应用新方法的关键在于储层AVO地震响应特征研究、敏感参数筛选和标定系数计算。结论认为,新方法在该区具有较好的推广应用价值。