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51.
叙述了一种采用MOS结构研究半导体深能级陷阱的深能级瞬态谱(DLTS)测试与分析方法。该方法简便易行,适用范围广。通过对n-Al_(0.2)Ga_(0.8)As中深能级的研究表明,MOS结构和p~+-n结构的DLTS结果相同。 相似文献
52.
53.
Chihiro J. Uchibori Y. Ohtani T. Oku Naoki Ono Masanori Murakami 《Journal of Electronic Materials》1997,26(4):410-414
Significant reduction of the contact resistance of In0.7Ga0.3As/Ni/W contacts (which were previously developed by sputtering in our laboratory) was achieved by depositing a W2N barrier layer between the Ni layer and W layer. The In0.7Ga0.3 As/Ni/W2N/W contact prepared by the radio-frequency sputtering technique showed the lowest contact resistance of 0.2 Ωmm after annealing
at 550°C for 10 s. This contact also provided a smooth surface, good reproducibility, and excellent thermal stability at 400°C.
The polycrystalline W2N layer was found to suppress the In diffusion to the contact surface, leading to improvement of the surface morphology and
an increase in the total area of the InxGa−As between metal and the GaAs substrate. These improvements are believed to reduce the contact resistance. 相似文献
54.
Current transport in molecular beam epitaxy (MBE) GaAs grown at low and intermediate growth temperatures is strongly affected
by defects. A model is developed here that shows that tunneling assisted by defect states can dominate, at some bias ranges,
current transport in Schottky contacts to unannealed GaAs material grown at the intermediate temperature range of about 400°C.
The deep defect states are modeled by quantum wells which trap electrons emitted from the cathode before re-emission to semiconductor.
Comparison of theory with experimental data shows defect states of energies about 0.5 eVbelow conduction band to provide the
best fit to data. This suggests that arsenic interstitials are likely to mediate this conduction. Comparison is also made
between as-grown material and GaAs grown at the same temperature but annealed at 600°C. It is suggested that reduction of
these defects by thermal annealing can explain lower current conduction at high biases in the annealed device as well as higher
current conduction at low biases due to higher lifetime. Quenching of current by light in the as-grown material can also be
explained based on occupancy of trap states. Identification of this mechanism can lead to its utilization in making ohmic
contacts, or its elimination by growing tunneling barrier layers. 相似文献
55.
《Microelectronics Reliability》2014,54(12):2766-2774
In this study, the gold/poly(3-hexylthiophene):[6,6]-phenyl C61 butyric acid methyl ester/n-type silicon (Au/P3HT:PCBM/n-Si) metal–polymer–semiconductor (MPS) Schottky barrier diodes (SBDs) were investigated in terms of the effects of PCBM concentration on the electrical parameters. The forward and reverse bias current–voltage (I–V) characteristics of the Au/P3HT:PCBM/n-Si MPS SBDs fabricated by using the different P3HT:PCBM mass ratios were studied in the dark, at room temperature. The main electrical parameters, such as ideality factor (n), barrier height (ΦB0), series resistance (Rs), shunt resistance (Rsh), and density of interface states (Nss) were determined from I–V characteristics for the different P3HT:PCBM mass ratios (2:1, 6:1 and 10:1) used diodes. The values of n, Rs, ΦB0, and Nss were reduced, while the carrier mobility and current were increased, by increasing the PCBM concentration in the P3HT:PCBM organic blend layer. The ideal values of electrical parameters were obtained for 2:1 P3HT:PCBM mass ratio used diode. This shows that the electrical properties of MPS diodes strongly depend on the PCBM concentration of the P3HT:PCBM organic layer. Moreover, increasing the PCBM concentration in P3HT:PCBM organic blend layer improves the quality of the Au/P3HT:PCBM/n-Si (MPS) SBDs which enables the fabrication of high-quality electronic and optoelectronic devices. 相似文献
56.
半导体器件欧姆接触中的扩散阻挡层 总被引:6,自引:0,他引:6
为提高半导体器件欧姆接触的可靠性,一般要在金属化系统中加扩散阻挡层。本文介绍了扩散阻挡层的种类及其特性,并进行了比较和讨论。最后给出了在实际成功应用的例子。 相似文献
57.
将具有完全晶格匹配势垒增强层的MSM-PD简化为一维模型,并通过理论分析,得出了它的暗电流特性,进一步得到器件暗电流与势垒增强层的关系。 相似文献
58.
Au/n-GaN Schottky diodes with the Au electrode deposited at low temperature (LT=77K) have been studied. In comparison, the
same chip of GaN epitaxial layer was also used for room temperature Schottky diodes. The low temperature Schottky diodes exhibit
excellent performance. Leakage current density as low as 2.55×10−11 A·cm−2 at −2.5 V was obtained in the LT Schottky diodes. The linear region in the current-voltage curve at forward bias extends
more than eight orders in current magnitude. Current-voltage-temperature measurements were carried out to study the characteristics
of the LT Schottky diodes. A typical barrier height of about 1.32 eV for the LT diode, which is the highest value ever reported,
was obtained. The obvious enhancement in electrical performance makes the LT processing a very promising technique for GaN
device application although the detailed mechanisms for the LT Au/n-GaN Schottky diodes are still under investigation. 相似文献
59.
The effect of reactive ion etch (RIE) induced damage on 4H-SiC surfaces etched in fluorinated plamas has been investigated
and characterized using Ni Schottky diodes and x-ray photoelectron spectroscopic surface analysis. The diodes were characterized
using current-voltage, current-voltage-temperature, and capacitance-voltage measurements with near ideal forward characteristics
(n=1.07) and forward current density as high as 9000 A/cm2 from the control (unetched) devices. High current handling capability was observed in diodes with etched surfaces as well.
Diodes with surfaces etched in CHF3 containing plasmas showed a significant reduction in the barrier height compared to the diodes with surfaces etched in CF4 containing plasma. Control devices exhibited high leakages when reverse biased, which is attributed to the presence of a
thin (∼2 nm) oxide layer at the metal-semiconductor interface. However, under reverse bias diodes with CHF3-etched surfaces showed improvement in leakage current compared to diodes with CF4-etched surfaces and the control diodes. 相似文献
60.
文中对入射电子能量等于一维方势垒高度时,电子对势垒的透射情况进行了理论分析,导出了这一条件下的电子透射系数与势垒高度及势垒宽度之间的关系,并证明了电子对一维方势垒的透射系数T是入射电子能量E的连续函数。 相似文献