亚洲“四小龙”半导体光电技术及其产业的发展

半导体光电技术与器件是当代信息社会中一个高科技领域,它对民族工业的许多部门产生深远的影响。近十年来,亚洲“四小龙”把它列为优先发展的项目并采取一系列重要措施以增强经济实力。本文着重介绍韩国、新加坡和台湾、香港等国家和地区在半导体光电领域研究和生产的现状、进展。同时,也介绍了他们在半导体材料、光电技术和器件及主要产品方面所采取的某些策略和措施。     

Electrochemical C——V Characteristics and Photoluminescence of a—C ： N Films

Amorphous carbon (a—C) films and amorphous carbon films incorporating with the nitrogen (a-C : N) were deposited on silicon substrates in a radio-frequency driven plasma enhanced chemical vapour deposition system, while the surface electrical properties of films were investigated by electrochemical capacitance-voltage measurements. It was examined the effect of the interface defects on the properties and deduced that the conducting type of a--C : N films was n--type. Subsequently, a comparative studies of a--C and a- C : N films were performed by photoluminescence spectra depending on the temperature. With the decrease of the temperature, the main band with peak energy of 2.48 eV in the a-C：N films was more intense compared with the other three bands caused by amorphous C in the a-C films.     

宽带半导体材料分子束外延的最新进展

本文评述了分子束外延在以 ZnSe 为代表的宽带半导体材料及其超晶格结构研究中的最新进展。介绍了在晶格匹配和不匹配的衬底上分子束外延生长 ZnSe等Ⅱ-Ⅵ族宽带半导体和有关的材料分析。叙述了在 ZnTe,Zn(S、Se)以及磁性半导体 MnSe 和低磁性半导体 Zn_(1-x)Mn_xSe 上生长 ZnSe 所形成的超晶格和多量子阱结构,并在此基础上说明了一些相关的物理现象。     

ESD in integrated circuits

A review of the effects of electrostatic discharge (ESD) on semiconductor integrated circuits is presented. The principles of the human body model (HBM), the machine model (MM) and the charged device model (CDM) test methods are outlined, and their relative merits and drawbacks are discussed. Techniques, such as the transmission line pulse method, which may be used to characterise ESD protection circuit elements are also presented. The concept of ESD protection circuit designs and some typical ESD protection circuit elements are presented. The main design and process parameters are identified, and the main categories of damage under ESD conditions are shown. Models of the behaviour of the protection circuit elements under high current conditions are presented, and the boundary conditions for damage are discussed. The issues that will influence ESD protection circuit behaviour in the future are discussed.     

提高切片机刀片寿命的探讨

实验指出,内圆切片机切片时,采用负向切片,对提高硅片均匀性及便于机械手取片是可取的,但会增加修刀次数,降低刀片寿命。掌握刀片刃口和基面的修磨技术是提高刀片寿命的关键。     

热电子晶体管的截止频率

本文分析了热电子晶体管的截止频率,指出通过合理选择参数,f_T可达到600GHz,是一种有希望的固体亚毫米波源。     

Rubber-coupled acoustic microscopy for dry inspections of industrial products

This paper describes the transduction of high-frequency ultrasound via rubber membranes. Four kinds of rubber membranes with Young's moduli of 0.91–9.59 MPa and thickness of 0.2 mm are prepared, and the ultrasound exited with the 50 MHz focused ultrasonic transducer is transmitted into the acrylic resin targets with various surface roughness through the membrane/target interfaces with an applied pressure of about 0.1 MPa. The rubber membrane with low Young's modulus realizes small coupling loss at the membrane/target interfaces, and the lateral resolution of the rubber-coupled acoustic microscopy is found to be governed by ultrasonic attenuation in the membrane. Finally, we repeatedly demonstrate the acoustic imaging of a semiconductor package in a dry environment via the selected membrane.     

Development of a practical model for capacity evaluation of ultrapure water systems

Modern ultrapure water (UPW) systems designed for the semiconductor manufacturing industry are very complex nowadays, especially when wastewater recycling is part of the configuration. In this paper, we developed a practical model for system evaluation by correlating the actual UPW consumption rate, TI, with the velocity of water level changes (ν) in the storage tank. It was found that the UPW consumption rate is a sole function of the velocity of water level changes in the water storage tank that could be described by the following equation: ν 1-Kv. The model was then applied to a standardized UPW system to examine its accuracy and found good agreement between the estimated and actual results. When process-to-process recycling is included in the model, the equation is still valid; however, the system-related coefficient K decreases with increasing recycling capacity. By properly estimating the engineering parameters of an UPW system, a generic ν graph can also be plotted based on this equation. This ν graph provides accurate UPW flowrate information as the variation ofwater levels in the DI storage tank is monitored online, which can be easily used for capacity evaluation of an UPW system operating with or without wastewater recycling at the outset of any UPW expansion project.     

半导体微结构材料的发展

超晶格的概念与先进的材料生长技术相结合产生了半导体微结构材料。目前，材料设计、材料生长和深微米技术的一体化，推动着半导体微结构材料向着低维化方向发展。     

玻璃中的非线性光学原理及材料

本文简要介绍了玻璃中产生非线性光学效应的基本原理及其应用,并介绍了均质玻璃、含有机化合物及含半导体量子点玻璃的非线性光学性能、应用前景和研究动态。