国际微电子专用关键设备的现状和发展趋势（考察报告）

讲述了参观Ｓｅｍｉｃｏｎ／ｗｅｓｔ９４′展览会及考察美国和西德的５个公司、１所大学所了解到的投影光刻技术、电子束曝光技术、透镜面形测试技术的发展。     

MICROSTRUCTURE AND FATIGUE PROPERTIES OF A WELDED DUPLEX STAINLESS STEEL

Abstract— In response to the increasing structural applications in duplex steels for welded structures, fatigue behaviour of a SAF 2304 grade duplex stainless steel was investigated, considering both the base metal and GTAW welded joints. Fatigue curves and fatigue limits under rotary bending fatigue were obtained. The study focused attention on the microstructural features of fatigue crack propagation of the two series of experiments, thereby permitting an evaluation of the tortuous crack path of welded joints and the mechanisms related to threshold microstructural barriers.     

锁相技术在电子束曝光机工件台稳速控制中的应用

采用锁相技术，对电子束曝光机工件台运动实现速度环的全数字控制。设计了数字差频积分回路和数字差频比例控制器，能有效消除速度的静态误差和改善系统的动态特性。     

Selective area epitaxy of CdTe

We have performed selective area epitaxy (SAE) of CdTe layers grown by molecular beam epitaxy using a shadow mask technique. This technique was chosen over other SAE techniques due to its simplicity and its compatibility with multiple SAE patterning steps. Features as small as 50 microns × 50 microns were obtained with sharp, abrupt side walls and flat mesa tops. Separations between mesas as small as 20 microns were also obtained. Shadowing effects due to the finite thickness of the mask were reduced by placing the CdTe source in a near normal incidence position. Intimate contact between the mask and the substrate was essential in order to achieve good pattern definition.     

微型电磁继电器的制作和仿真分析

介绍了一种基于MEMS技术的微型电磁继电器的制作过程和仿真分析.这种微继电器的大小约是4mm×4mm×0.5mm,主要采用普通的微加工技术来完成全部制作工艺.与传统继电器相比,这种继电器采用平面线圈来代替螺线管线圈,有利于MEMS工艺,并且提出了一种双支撑的悬臂梁结构做为活动电极,具有较高的灵敏性和稳定性.另外,还进行了一些有关线圈通过激励电流后对活动电极产生电磁力的理论计算和仿真分析,利用这些结果可以对这种电磁继电器的结构和参数进一步优化.     

氢/空气火焰在半开口有障碍管道中的传播特性

针对氢／空气混合物，通过实验研究了其预混火焰在半开口管道中的火焰传播加速现象。结果表明，火焰传播状态随着氢气当量比的变化而发生改变。当氢／空气混合物被点燃后，由于障碍物的扰动，火焰在管道中不断加速传播，并最终到达一准稳态传播。在氢气当量比0．34附近时，火焰速度发生跃变。当氢气当量比足够大时，火焰传播由爆燃态转变为爆轰态。在本实验条件下，爆燃转准爆轰的临界条件是d/λ=2.6(d是圆环形障碍物内径，λ是爆轰格胞尺度）。障碍物阻塞比的变化对最大火焰速度和压力提升的影响不明显。     

Application of Galerkin Method to Dynamical Behavior of Viscoelastic Timoshenko Beam with Finite Deformation

The motion equations governing the dynamical behavior of a viscoelasticTimoshenko beam with finite deformation are derived and simplified byGalerkin method. The viscoelastic material is assumed to obey thethree-dimensional fractional derivative constitutive relation. Thedynamical behaviors of the simplified systems with order 1 and order 2are numerically computed and compared by using the computational methodpresented by the authors. The dynamical behaviors of the systems areuniform qualitatively, but there is a little deviation quantitatively.And the truncated system with order 1 is safer than the one of order 2.It is also shown that the lower order system is reasonable. Theinfluences of the load parameter and the fractional derivative parameter(material parameter) on the deflection of the beam are consideredrespectively. The numerical methods in nonlinear dynamics, such as phasediagram, and Poincaré section, are applied to reveal dynamical behaviorsof the nonlinear viscoelastic Timoshenko beam. There are plenty ofdynamical behaviors, such as periodicity, bifurcation, quasi-periodicityand chaos in the dynamical system.     

Suitable test structures for submicron ion beam analysis

For the precise determination of the sizes of submicron beam spots test structures with an excellent edge definition are required. For this purpose a semiconductor heterostructure consisting of an 1.62 μm GaInP epi-layer grown on (0 0 1) GaAs has been made, which provides atomically sharp edges for beam spot size measurements. Since the sample has been thinned down by standard transmission electron microscope (TEM) preparation techniques, it can be used for both PIXE and STIM. The sample has been investigated with a TEM and the ion nanoprobe LIPSION. A one-dimensional beam profile in the low current mode was determined by a STIM measurement using 2 MeV protons and yielded a FWHM of (41±4) nm, which is the smallest value reported so far for high energy nuclear micro- and nanoprobes. Furthermore we present nickel nanowhiskers produced at the GSI Darmstadt by electrochemical preparation of etched ion track membranes that have been used to obtain two-dimensional images of the shapes of submicron beam spots. For these measurements a scan over a single nickel nanowhisker having a diameter of 220 nm and a height of about 6 μm was performed.     

Accurate Cross Sections for Microanalysis

To calculate the intensity of x-ray emission in electron beam microanalysis requires a knowledge of the energy distribution of the electrons in the solid, the energy variation of the ionization cross section of the relevant subshell, the fraction of ionizations events producing x rays of interest and the absorption coefficient of the x rays on the path to the detector. The theoretical predictions and experimental data available for ionization cross sections are limited mainly to K shells of a few elements. Results of systematic plane wave Born approximation calculations with exchange for K, L, and M shell ionization cross sections over the range of electron energies used in microanalysis are presented. Comparisons are made with experimental measurement for selected K shells and it is shown that the plane wave theory is not appropriate for overvoltages less than 2.5 V.     

特大型地下厂房岩壁梁锚杆和混凝土施工技术及质量控制

岩壁梁是一种新型结构，为通过一定深度的锚杆将钢筋混凝土梁固定在地下厂房两侧的岩壁上，而吊车荷载则通过锚杆和钢筋混凝土与岩石接触面的摩擦力传到岩体上，形成岩壁梁和岩体共同受力的结构。岩壁梁是地下厂房施工和运行的核心建筑物，岩壁梁锚杆和混凝土的施工质量是直接关系到岩壁梁成败的关键，所以施工技术和施工质量均要求极高，是地下厂房系统施工的重点和难点。本文介绍了瀑布沟水电站地下厂房岩壁梁锚杆和混凝土施工的关键技术及质量控制经验，可供同类工程借鉴参考。