An electron beam lithography and digital image acquisition system for scanning electron microscopes

A low‐cost microcontroller based control and data acquisition unit for digital image recording of scanning electron microscope (SEM) images and scanning electron microscope based electron beam lithography (EBL) is described. The developed microcontroller low‐level embedded software incorporates major time critical functions for image acquisition and electron beam lithography and makes the unit an intelligent module which communicates via USB with the main computer. The system allows recording of images with up to 4096 × 4096 pixel size, different scan modes, controllable dwell time, synchronization with main power frequency, and other user controllable functions. The electron beam can be arbitrary positioned with 12‐bit precision in both dimensions and this is used to extend the scanning electron microscope capabilities for electron beam lithography. Hardware and software details of the system are given to allow its easy duplication. Performance of the system is discussed and exemplary results are presented.     

The effect of some instrument operating conditions on the x-ray microanalysis of particles in the environmental scanning electron microscope

The objective of this investigation was to evaluate the practical effects of electron beam broadening in the environmental scanning electron microscope (ESEM) on particle x-ray microanalysis and to determine some of the optimum operating conditions for this type of analysis. Four sets of experiments were conducted using a Faraday cage and particles of copper, glass, cassiterite, andrutile. The accelerating voltage and chamber pressure varied from 20 to 10 kV and from 665–66 Pa (5.0 to 0.5 torr), respectively. The standard gaseous secondary electron detectors (GSED) and the long environmental secondary dectectors (ESD) for the ESEM were evaluated at different working distances. The effect of these parameters on the presence of artifact peaks was evaluated. The particles were mounted on carbon tape on an aluminum specimen mount and were analyzed individually and as a mixture. Substrate peaks were present in almost all of the spectra. The presence of neighboring particle peaks and the number of counts in these depended upon the operating conditions. In general, few of these peaks were observed with the long ESD detector at 19 mm working distance and at low chamber pressures. More peaks and counts were observed with a deviation from these conditions. The most neighboring peaks and counts were obtained with the GSED detector at 21.5 mm working distance, 10 kV accelerating voltage, and 665 Pa (5.0 torr) chamber pressure. The results of these experiments support the idea that the optimum instrumental operating conditions for EDS analysis in the ESEM occur by minimizing the gas path length and the chamber water vapor pressure, and by maximizing the accelerating voltage. The results suggest that the analyst can expect x-ray counts from the mounting materials. These tests strongly support the recommendation of the manufacturer to use the long ESD detector and a 19 mm working distance for EDS analysis. The results of these experiments indicate that neighboring particles millimeters from the target may contribute x-ray counts to the spectrum.     

Repair of notched beam under dynamic load using piezoelectric patch

In this paper, the repair of a cracked beam under an external dynamic load employing the electro-mechanical characteristic of piezoelectric material to induce a local moment is presented. Conceptually, an external voltage is applied to actuate a piezoelectric patch bonded on the beam to effect closure of a crack so that the singularity at the crack tip under dynamic load may be decreased. Globally, this has the effect of altering the resonant frequency of the cracked beam towards that of the healthy beam, which is the criterion used for the repair. To demonstrate the repair methodology, a cantilever beam is used as an illustration, where the repair moment coefficient and the voltage required are mathematically derived. The relationship between repair moment coefficient, crack parameters and length of piezoelectric patch is investigated. The difference between the proposed repair criterion and an earlier published criterion for cracked beam under static load is also shown. A numerical example is used to study the effectiveness of the proposed repair methodology and its results are compared with those from 3-D finite element analyses using ABAQUS 6.4 as one means of verification.     

竞技体操运动员平衡木项目平衡能力影响因素研究

本研究运用文献资料法、专家访谈法、问卷调查法、测试法、数理统计等方法,以24名女运动员为研究对象,对不同水平竞技体操运动员平衡木项目平衡能力影响因素进行研究,得出结论：竞技体操运动员平衡木项目向前比向侧平衡容易保持;平衡木的高度、前庭机能和视觉对平衡能力均有影响。     

碳纤维材料在梁板加固工程中的应用

以南京某高校教学楼卫生间梁板加固工程为例，阐述了应用碳纤维材料对混凝土梁板进行结构补强加固的设计原理、施工工序，提出了应用碳纤维布进行结构加固时应注意的事项。     

BEPC试验束数据获取系统改进及离线数据分析

运行在BEPC电子直线加速器上的试验束,主要利用在线探测器和离线数据分析选择单粒子事例,满足多种单粒子束流试验.本文介绍了试验束改进后的数据获取系统,以及离线数据分析中的飞行时间谱分析,单粒子判选和粒子击中位置定位等.     

离子束技术应用于腐蚀科学

离子束技术(包括离子注入、离子束混合、离子束分析等)在腐蚀科学领域中的应用是近十年来一个引人注目的新发展。 据工业发达国家估计,每年因材料、设备腐蚀造成的直接损失约为当年国民经济总产值的2—4％,例如美国1982年全国因腐蚀而造成的经济损失就高达1260亿美元,我国在1980年估算的腐蚀损失约200亿人民币。随着我国四化建设的迅速发展,金属腐蚀与防护的研究已成为当前一个急待进行的重要课题。     

20 m跨径后张预应力混凝土空心板梁变形的试验研究

介绍了二十米跨径预应力混凝土空心板梁的荷载试验结果,并对该梁的裂缝开展及挠度发展等变形行为进行了分析研究。此外,通过该梁的非线性计算结果与实测结果的分析对比,对预应力混凝土空心板梁的非线性破坏规律进行了有益探索。     

具有边梁的悬臂矩形板的弯曲问题

本文建议一个求解具有边梁悬臂矩形板弯曲问题的解析解法。该法将有边梁和无边梁悬臂矩形板弯曲问题的解融为一体,在有边梁悬臂矩形板的解中令边梁弯曲刚度为零即得到无边梁悬臂矩形板的解。