污水汽提系统的化学除臭清洗

文章简要介绍了化学除臭清洗剂JX-518的组成,并对采用该清洗剂对污水汽提系统进行化学除臭清洗的清洗过程及注意事项进行了详细介绍。实践证明,清洗后系统残液中硫化物及氨氮可降至很低,取得了很好的清洗效果。     

Magnetic Properties of Fe-Doped Rutile

Ball-milling method was applied to dissolve Fe into titanium dioxide (TiO₂). X-ray diffraction indicated the starting anatase changed to a rutile-type structure with oxygen deficiency after ball milling. Transmission electron microscopy and X-ray absorption experiments were conducted to examine the possible existence of magnetic impurities in the ball-milled powders after they were leached in HCl solutions. Temperature dependence of the resistivity shows semiconducting behavior and the magnetic hysteresis loops at 5 and 300 K exhibit ferromagnetic characteristics. Fe-doped TiO₂ films were also prepared by pulsed laser deposition. The magnetic properties of the films are discussed.     

Reliability studies of MOCVD TiSiN and EnCoRe Ta(N)/Ta

Passivated single damascene copper SiO₂ damascene lines were evaluated in combination with TiSiN and Ta(N)/Ta diffusion barriers. Leakage current, breakdown and time-dependent dielectric breakdown properties were investigated on a wafer level basis for temperatures ranging between room temperature and 150 °C. It is found that the leakage performance of the wafers with a TiSiN barrier is better at room temperature, but at 150 °C the performance levels out with Ta(N)/Ta. Time-dependent dielectric breakdown measurements at 150 °C show that the lifetime of the interconnect is higher with the selected Ta(N)/Ta barrier than for TiSiN.     

陶瓷表面化学镀的前处理工艺新进展

综述了非金属表面化学镀前处理工艺的现状和发展，对陶瓷化学镀的粗化和活化工艺的新进展进行了评述，侧重讨论了离子型、胶体钯型、浆料型、分子自组装吸附钯型、贱金属型活化工艺特点和进展，并展望了今后发展方向。     

PECVD法低温沉积多晶硅薄膜的研究

在玻璃衬底上采用常规的PKCVD法在低温(≤400℃)条件下制得大颗较(直径＞100nm)、择优取向(220)明显的多晶硅薄膜。选用的反应气体为SiF4和H2混合气体。加入少量的SiH4后，沉积速率提高了近10倍。分析认为，在低温时促使多晶硅结构形成的反应基元应是SiFmHn(m n≤3)，而不可能是SiHn(n≤3)基团。     

高密度互连印制板

本文阐述了RCC材料与化学蚀刻法制作高密度互连印制板的工序和详细方法,意在探寻最为经济、简单而又行 之有效的工艺。     

流量比对等离子体基团分布和薄膜结构的影响

使用光强标定的发射光谱(AOES)测量了CHF3／C6H6混合气体的微波电子回旋共振(ECR)放电等离子体中基团的分布状态。实验发现随着CHF3流量的增加，成膜基团CF、CF2、CH等的相对密度增大，而刻蚀基团F的密度也会增加，从而使得a—C：F薄膜的沉积速率降低。同时红外吸收谱(IR)分析表明，在高CHF3流量下沉积的a—C：F薄膜中含有更高的C—F键成分。可见在a—C：F薄膜的制备中CHF3／(CHF3 C6H6)流量比是重要的控制参量。     

铝薄膜CMP影响因素分析

提出了在碱性抛光液中铝薄膜化学机械抛光的机理模型,对抛光液的pH值、磨料、氧化剂浓度对过程参数的影响做了一些试验分析。试验结果表面粗糙度的铝薄膜所需的最优化CMP过程参数:硅溶胶粒径为15～20nm,pH值为10.8～11.2,氧化剂浓度为2.5%～3%。     

铜蒸气激光器种子注入光腔的参数计算

用矩阵光学理论计算了由主振荡器和功率放大器组成的种子注入光腔。主振荡器光腔是由曲率半径R1=-250mm,R2=5000mm,相距L=2375mm的球面镜组成的正支非稳腔;功率非稳腔是由曲率半径R3=400mm,R4=5600mm,相距S=3000mm的球面镜构成的负支非稳腔。理论计算表明,该种子注入光腔可输出光束发散角约几十微弧的激光,可满足铜蒸气激光器主振荡器功率放大器(MOPA)的技术要求。