Highly reliable ECR N2O-plasma polyoxide grown on heavily phosphorus-doped polysilicon films

Reliability of polyoxide grown by electron cyclotron resonance (ECR) N₂O-plasma on heavily phosphorus-doped polysilicon has been investigated for the interpoly dielectrics (IPDs) of nonvolatile memories (NVMs). ECR N₂O-plasma polyoxide grown on polysilicon with phosphorus of 1 × 10²¹ cm⁻³ exhibits a significantly high breakdown field of 10 MV/cm and low electron trapping rate of 0.5 V, which are regardless of phosphorus concentration. The improvements are attributed to the smooth polyoxide/polysilicon interface, low phosphorus concentration, and nitrogen-rich layer with strong silicon-nitrogen bonds at the polyoxide/polysilicon interface.     

周期极化掺镁铌酸锂光参量振荡器的输出光谱特性

实验研究了基于多周期的掺镁铌酸锂晶体光参量振荡器(OPO),分析了光学参量振荡器的输出光谱特性.实验中,采用激光二极管(LD)端面抽运的声光调Q Nd:YVO4激光器作为光参量振荡器的抽运源,谐振腔采用双凹腔结构.在调Q开关重复频率为10 kHz,周期极化掺镁铌酸锂(PPMgLN)晶体的温度为25.4℃的条件下,实验测得光学参量振荡器的振荡阈值为110 mW.当输入的抽运光的平均功率为325 mW时,获得了平均功率为84 mW的信号光输出,其光-光转换效率为25.8%.通过改变周期极化掺镁铌酸锂晶体的温度(25.4～120℃)和极化周期(28.5～30.5 μm),实现了信号光在1449.6～1635 nm范围内的可调谐输出.在室温25.4℃时,观测到了抽运光与信号光的和频光的光谱.实验结果表明.光参量振荡器输出光谱的半峰全宽(FWHM)小于0.5 nm.     

N~+型重掺杂硅快速氧化新方法──氟化氢增强氧化之二

本文对重掺杂单晶硅和多晶硅薄膜的加HF增强氧化的行为进行了研究。氧气中HF含量为480ppm,温度为750至900℃。发现重掺磷或砷的硅的氧化反应速率很快,速率常数比轻掺杂硅的干氧氧化提高了几十倍至几百倍。而重掺硼的硅单晶对氧化速率并无明显影响。文中对重掺杂元素和HF增强硅氧化的机理作了分析,并提出了一个物理模型,可以较好地解释实验现象。     

掺Er~(3+)、掺Nd~(3+)光纤的光谱及其最佳泵浦波长和光源

本文给出掺Er~(3+)、掺Nd~(3+)和普通单模光纤在3800A——18000A波段上的吸收谱,以及关于半导体激光器激发掺Nd~(3+)光纤荧光曲线的实验结果,并对它们的吸收谱进行相互比较,讨论光纤激光器、放大器的最佳泵浦波长,建议用NYAB自倍频激光器作为掺Er~(3+)和Nd~(3+)光纤泵浦光源。     

一种亚微米垂直硅墙的刻蚀方法

亚微米垂直硅墙的制备是垂直硅薄膜耦合约瑟夫逊结的关键工艺.本文作者在普通光刻设备基础上,开发了一种在〈100〉硅片上制备亚微米硅墙的刻蚀方法:首先用普通光刻手段刻出较宽的墙区;其次,对非墙区进行迭加注入掺杂;第三,杂质高温横向扩散,第四,掺杂选择性刻蚀;第五,高温氧化减薄.实验结果表明,这种方法可以获得墙宽为0.29μm,墙高为1μm左右的硅墙,而且还有一定的改进潜力.     

Electrical properties of HgCdTe epilayers doped with silver using an AgNO3 solution

We employed AgNO₃ solutions for doping Ag in liquid phase epitaxy (LPE) grown Hg_0.78Cd_0.22Te epilayers and found that the minority carrier lifetimes became longer so that the diode properties improved. After annealing LPE grown Hg(1-x)Cd(x)Te layers (x=0.22) in Hg atmosphere, the epilayers were immersed in an AgNO₃ solution at room temperature. The typical carrier concentrations of holes was 3 × 10¹⁶ cm⁻³ at 77K. These values were almost the same as for the nondoped wafers. Also, its acceptor level was 3 to 4 meV. This shows that the Ag was activated. The doped crystals have lifetimes several times longer than those of the nondoped crystals. Numerical fitting showed the lifetime was limited mostly by the Auger 7 process. The Shockley-Read-Hall recombination process was not effective. To examine the Ag-doped wafer, we fabricated photodiodes using standard planar technology. The diodes have an average zero-bias resistance of several MΩ and a shunt resistance of about 1 GΩ for a 10 μm cutoff wavelength at 78K. These values are about four times higher than those of nondoped diodes. The photo current is also two times higher at the same pixel size. This shows that the quantum efficiency is increased. The extension of the lifetime contributes to the high resistance and the high quantum efficiency of the photodiode.     

ZnS/CuInS2/Mo/钠钙玻璃衬底上射频溅射ZnO∶Al薄膜的SEM研究

结合ZnO薄膜在Cu-III-VI2基薄膜太阳电池上的应用，采用射频磁控溅射技术以陶瓷ZnO∶Al2O3为靶材在ZnS/CuInS2/Mo/钠钙玻璃衬底上于固定沉积条件下低温（200℃）制备了铝掺杂氧化锌（ZnO∶Al）薄膜. 运用扫描电子显微镜研究了底层材料特别是ZnS和CuInS2的生长参数对沉积的ZnO∶Al薄膜的表面形貌的影响. 实验发现，衬底材料中硫含量的增加（无论来自ZnS还是来自CuInS2) ，都会引起沉积ZnO∶Al薄膜结晶质量的提高，而金属含量的增大将有利于薄膜均匀性的改进.     

单一偏振的多波长环形腔掺镱光纤激光器

在环形腔掺镱光纤激光器中加入一段G .6 5 2光纤作为多模光纤 ,依靠其中导模的空间模式跳变构成动态梳状滤波器 ,于室温下实现了掺镱光纤激光器 1 0 3μm波长附近稳定的 6波长激光同时输出。激光线宽为 0 15nm ,边模抑制比达到 4 0dB以上。通过调整腔内的偏振控制器 ,可以得到不同波长个数和波长间隔的多波长激光输出     

液晶染料填充一维光子晶体局域模的电场调控及其光激发特性研究

基于液晶的电场调控特性及激光染料作为增益介质的增益模型,通过传输矩阵法理论研究了液晶染料填充一维光子晶体局域模的电场调控及其光激发特性。数值结果表明:随着垂直入射光和电场方向的夹角θ的增大,局域模波长向短波方向移动;当角度θ在(0°,90°)范围内变化时,局域模波长最大调控量达56.7nm;激光染料泵浦后不改变局域模的位置,但局域模的透射率变大了;随着增益系数的增大,局域模透射率先增大后减小,不同局域模对应不同的泵浦阈值,并且随着夹角θ的增大局域模对应的泵浦阈值将减小。     

掺铒光纤放大器光谱特性和噪声特性的研究

报道了利用 980nm波长的单抽运光源抽运掺铒光纤得到的放大自发辐射谱 (ASE谱 )特性 ,对在较小抽运功率条件下得到的掺铒光纤荧光谱特征图进行了探讨 ;在此基础上对采用两个980nmLD作抽运光源的掺铒光纤放大器 (EDFA)的噪声特性进行了实验研究 ,得到具有良好噪声特性的结果