A prototype optical encoder system with nanometer measurement capability

Optical gratings are becoming available with precision down to the 2 nm level, or below. Such gratings can be employed to make highly accurate measuring tools such as optical encoders and coordinate measuring tools which can find numerous applications in precision machining applications and integrated circuit industry such as image placement inspection. Such tools are significantly less expensive than interferometers because of the relaxed mechanical tolerances required on the associated stages. In this paper, a novel prototype optical encoder system is developed for grating-based measurement tools with nanometer accuracy. The location of the grating was determined with an error of 0.09 nm. This is comparable to the accuracy of state-of-the-art interferometers, but at much lower cost.     

基于Moldflow的汽车散热格栅浇注系统优化设计

分析了浇注系统对成型大型格栅质量的影响。针对塑件原成型方案进行模拟分析,找出塑件表面产生熔接痕的原因。对浇注系统进行优化后,熔体充模过程均衡,型腔内各格栅端部几乎同时充满,避免了格栅上熔接痕的产生,型腔所需的充模压力不高、型腔温度分布比较均匀、塑件产生的翘曲变形较小,提高了塑件的外观质量。     

Viscosity of silica optical fibres characterized using regenerated gratings

The viscosity of an optical fibre over 1000–1150 °C is studied by inscribing an optical fibre Bragg grating that can withstand temperatures up to 1200 °C and monitoring fibre elongation under load through the Bragg wavelength shift. This optical interrogation offers high accuracy and reliability compared with direct measurements of elongation, particularly at lower temperatures, thus avoiding significant experimental error. An excellent Arrhenius fit is obtained from which an activation energy for viscous flow of E_a = 450 kJ mol^?1 is extracted; addition of an additional temperature-dependent pre-exponential does not change this value. The log plot of viscosity is found overall to be consistent with that reported in the literature for silica measurements on rods and beams, but substantially higher than past work reported for optical fibres. The annealing and strain temperatures for an optical fibre were derived as 1114 °C and 1010 °C. However, it is shown that, because regenerated gratings already involve a post-annealing process at higher temperature, the structures are equilibrated and much more relaxed compared with normal fibres, making viscosity measurements meaningful. This work highlights the need to stabilize components for operation in harsh environments before their application, despite some mechanical compromise. Given the increasing expectation of all-optical waveguide technologies operating >1000 °C, the need to study the behaviour of glass over the long term brings added significance to the basic understanding of glass in this regime.     

Influence of extrinsic and intrinsic parameters onto the formation of surface relief gratings in polar azo molecular glasses

Polar azo derivatives exhibiting stable glass-forming properties displayed efficient migration properties as thin films when subjected to interferential illumination, and formed time-stable and rewritable surface relief gratings as high as the initial film thickness. Intrinsic (film thickness, structure bulkiness) as well as extrinsic (laser fluence and polarization) parameters dramatically influenced the rate of the relief growth as well as the maximum relief amplitude. The superimposition of +45°/−45°-polarized beams unexpectedly conducted to a diffraction efficiency ten times as high as the combination of two p/p (parallel to the incident plane) polarized beams. The introduction of bulky anthryl Diels-Alder substituents showed net increase in the modulation amplitude due to the creation of large free volume around each azo unit, facilitating the azo migration within the less densely packed material.     

一种数字光栅无掩模光刻对准方法

针对数字微反射镜装置(DMD)无掩模光刻系统,提出并研究了一种数字光栅无掩模光刻对准方法,将硅片的微位移放大显示在数字光栅与硅片物理光栅叠加产生的叠栅条纹中。建立了基于DMD的数字光栅无掩模光刻对准模型,设计了对准标记以及具体的实现方案,并对模型进行了数值仿真和初步的实验验证。结果表明,采用频率可变、图像干净、具有良好周期性结构的数字光栅代替传统的真实掩模光栅,真正实现了零掩模成本;并且采用变频率数字光栅可以扩大测量范围,减小位移测量误差。最终可以实现深亚微米的对准精度,满足目前无掩模光刻对准精度的要求。     

基于光纤布拉格光栅偏振相关损耗的温度与侧向力的同时测量

由耦合模理论分析得出,光纤布拉格光栅反射偏振相关损耗峰值位置对于温度和侧向力的作用有不同的响应特性。可通过相关灵敏度系数矩阵,用单根光纤光栅实现对温度和侧向力的同时测量,此方法解决了温度应力交叉敏感问题。实验测得反射偏振相关损耗左峰和右峰的温度灵敏度分别为0.0101nm/℃和0.0100nm/℃,侧向力灵敏度分别为0.0071nm/N和0.0005nm/N,温度和侧向力测量精度分别为±1℃和±0.6N。此方法具有核心传感元件简单、稳定性好、易于埋入被测材料内部进行实时监测等优点,是一种检测材料内部结构和环境温度变化的新方法。     

光栅拼接技术研究进展

大面积衍射光栅的研制一直是研究的重大课题之一,同时大面积衍射光栅的制作以及获取是光栅研制的一个技术难点,啁啾脉冲放大(CPA)技术的出现更加加剧了对米级光栅的需求.由于大口径光栅制造技术难实现和经济代价高昂的限制,因此采用拼接的方法增大光栅的尺寸成为公认的经济有效的途径.详细介绍了光栅拼接的理论研究,并在此理论指导下,...     

Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection

We combine interferometric lithography and inductively coupled plasma etching to fabricate GaAs subwavelength grating (SWG) which mimics the moth eye structures. Through the modification of morphology parameters, including profile, height and packing fraction, tapered, high-aspect-ratio and closely-packed GaAs SWGs are obtained. The measurement of spectral reflectance of the fabricated SWGs shows that reflection has been dramatically reduced compared to the polished GaAs surface. Particularly, the optimized SWG structures exhibit an average reflection below 5% in the wavelengths ranging from 350 to 900 nm. Furthermore, the angular-independent property is demonstrated by measuring the reflectance versus varying angles of incidence at 532 and 632.8 nm wavelengths.     

激光诱导银纳米颗粒薄膜和微结构

利用可见激光诱导化学沉积方法在玻璃基底上制备纳米银薄膜和微结构。玻璃样品池中装满柠檬酸钠和硝酸银的混合透明溶液,当一束可见连续激光正入射样品池一段时间后,在辐照区域的玻璃内壁上便可以形成一层光亮的银膜。银膜沉积的速度受到激光功率密度、激光波长、辐照时间以及混合溶液的浓度等条件的影响。利用X射线衍射、原子力显微镜和拉曼光谱仪等手段对制备的薄膜的成分、表面形貌和拉曼活性等性质进行了表征和分析。利用此方法制备的银膜具有良好的表面增强拉曼散射活性。同时,利用双光束干涉的方法在玻璃基底上诱导出不同周期的银纳米颗粒光栅。     

Generation and transmission of dispersion tolerant 10-Gbps RZ-OOK signal for radio over fiber link

We proposed and demonstrated the generation and transmission of 10-Gbps return-to-zero ON/OFF keying (RZ-OOK) signal using a new technique without pulse carving at transmitter.The new technique is char...