基于SOI材料的刻蚀光栅分波器的制作工艺

研究了基于绝缘材料上的硅（SOI）材料的平面波导刻蚀光栅分波器的主要制作工艺．利用电感耦合等离子体刻蚀（ICP）技术，在SOI材料上制作了垂直度大于89°的光滑的光栅槽面．氧化抛光后刻蚀侧壁的表面均方根粗糙度（RMS）有3nm的改善，达到7.27nm（采样面积6.2μm×26μm）．通过采用集成波导拐弯微镜代替弯曲波导使1×4分波器的器件尺寸仅为20mm×2.5mm．测试结果表明器件实现了分波功能．     

Modelling,design and optimization of compact taper and gratings for mode coupling to SOI waveguides at C-band

In this work, the design and optimization of compact taper is presented to enable coupling of infrared light in the C-band with the nano-photonic silicon-on-insulator (SOI) integrated optical waveguide. The proposed compact taper results in ～96% transmission efficiency for the taper length of ～5?µm and ～99.5% transmission efficiency for the taper length of 10?µm. The use of the proposed compact taper significantly reduces the foot print of optical coupler (grating and proposed compact taper) to (10?×?5)?µm² with ～96% transmittance and (10?×?10)?µm² with ～99.5% transmittance. The end-to-end coupling loss is less than 0.01?dB in the C-band. The compact taper along with grating presented in this work can be used as an efficient optical coupler for mode coupling from fibre to SOI single-mode optical waveguide in high density optical integrated circuits operating at 1550?nm.     

Alignment measurement of two-dimensional zero-reference marks

Alignment with submicron or even nanometer scale resolution is of vital importance in precision engineering. By superimposing a pair of specially coded two-dimensional gratings, the correct alignment position of the two gratings can be obtained by detecting the maximum output of the sharp intensity peak. In this paper, design and fabrication of such two-dimensional zero-reference gratings are introduced. The arrangement of the experiment system is presented in detail. The alignment measurement of the reference marks is tested, and the results are compared with those obtained by autocorrelation method and diffraction analysis. It is found that experimental results are in good agreement with theoretical analysis.     

InP和InGaAsP晶体上衍射光栅的刻制技术

采用全息光刻的技术,在InP 和InGaAsP晶体上刻制亚微米衍射光栅,获得较好的重复性和均匀性,并已应用于研制长波长分布反馈激光器.     

不同波长激光对计算全息位相光栅空间衍射光束分辨率的影响

针对用于激光阵列探测系统中的计算全息位相光栅，给出了在不同波长激光入射的情况下，衍射光束的空间分辨率随不同入射角的变化情况。用实验验证了用可见光代替红外激光进行初步测试与分析的可行性，为用于红外系统的整形光栅的测试提供了简捷，便利的实验方法。     

用不同周期重叠写入的光纤布拉格光栅传感器 对应力和温度实现同时测量(英文)

用不同周期重叠写入的光纤Brass光栅对应力／温度实现同时区分测量。用应力／温度调制技术和信号解调方法，得到实验结果与理论的误差分别小于40με和0.5℃。可在复合材料、大型建筑物、抽油和输油管线中对应力和温度实现同时分布式智能化传感测量。     

Grating-assisted non-linear directional coupler based optical switch with reduced critical power

We present a novel design of an optical switch based on grating-assisted non-linear directional coupler (GANDC) which consists of two non-identical waveguides, with a periodic refractive index perturbation in between the waveguides, along the direction of propagation. The proposed design of the optical switch reduces the critical power by a factor ~25, as compared to the conventional non-linear directional coupler-based switch, with potential applications in photonics.     

基于光纤环形激光器的传感技术研究与应用

基于光纤环形激光器的新一代光纤传感系统通过解调激光波长偏移来检测外界参量变化,得利于激光光谱窄线宽及高信噪比的特性,可实现高分辨率、高灵敏度、大动态范围的传感监测。文章介绍了包括基于光纤光栅、迈克尔逊干涉仪、法布里-珀罗腔、萨格奈克环以及马赫-曾德尔干涉仪等多种结构的光纤传感器工作原理,以及进一步构成光纤环形激光传感器的特性和多种应用案例,并对未来该领域的关键技术发展进行了分析。     

基于 FBG 改进泄压阀的旋叶式压缩机 排气压力感知研究

针对旋叶式压缩机排气压力精准监测难问题,提出了基于光纤布拉格光栅(fiber Bragg grating, FBG)改进泄压阀的旋叶 式压缩机排气压力感知方法。 首先,依据旋叶式压缩机泄压阀结构特点,结合 FBG 传感理论,建立了膜片式压力传感器模型, 揭示了压力与中心波长的映射关系;其次,设计了基于泄压阀的三段式 FBG 压力温度复合传感器,理论分析表明该传感器灵敏 度为 304. 26 pm/ MPa;最后通过仿真实验分析,研究了膜片半径、厚度对传感器灵敏度的影响,得到了最优半径与厚度组合(R = 5 mm, h = 0. 6 mm),实验灵敏度为 330. 78 pm/ MPa,研究对旋叶式压缩机状态监测及功耗控制具有重要的理论和实际工程 价值。