一种基于压电薄膜逆压电效应的新型集成微镜

设计了一种采用锆钛酸铅(PZT)压电薄膜悬臂梁作为驱动机理的500μm×500μm微镜结构。该微镜主要由4个悬臂梁与1个反射镜组成,4个悬臂梁起支撑微镜的作用,即微镜主要利用微悬臂梁自由端头的小挠度来实现垂直方向的位移。提出了与互补金属氧化物半导体(CMOS)工艺相兼容的制作方法,利用有限元软件ANSYS7.0对压电微镜的反射镜平整度、结构机械强度、线性度、响应速度和功耗等性能进行了研究,并与数值计算结果进行了比较,结果表明此微镜达到了快速、高精度、低功耗的设计要求。     

高速MEMS扫描微镜动态变形特性研究

扭转镜面的动态形变是影响显示成像用MEMS扫描微镜光学分辨率的主导因素,研究了高速转动的MEMS扫描微镜的动态形变特性,得到了相关有用的结论。结果表明当MEMS扫描微镜镜面几何尺寸一定时,如果要获得系统衍射极限光学分辨率,需要对转动频率,扭转角度和镜面厚度进行优化设计和选择,简单通过增加镜面厚度保证光学分辨率的方法不利于MEMS扫描微镜综合性能的改善和提高。     

MOEMS扫描微镜的测试实验与分析

针对集成角度传感器微镜在实际使用过程中的要求,在分析研究MOEMS扫描微镜结构与工作原理的基础上,进行了MOEMS扫描微镜最大偏转角度、驱动电压、谐振频率和传感器输出参数的测试.并且为了提高数据的可靠性,利用几何光学理论和误差理论的方法对该测试系统进行了详细分析,以此作为测试的系统误差与测试随机误差进行了误差合成.误差分析表明,该微镜在驱动电压为0.7 V时,最大偏转角为±8.704 15°,测试误差为±0.045 605°.此外,还对测试过程中扫描微镜谐响应频率随扫描模式及扫描电压而变化的现象进行了分析.     

Programmable Imaging: Towards a Flexible Camera

In this paper, we introduce the notion of a programmable imaging system. Such an imaging system provides a human user or a vision system significant control over the radiometric and geometric characteristics of the system. This flexibility is achieved using a programmable array of micro-mirrors. The orientations of the mirrors of the array can be controlled with high precision over space and time. This enables the system to select and modulate rays from the scene’s light field based on the needs of the application at hand. We have implemented a programmable imaging system that uses a digital micro-mirror device (DMD), which is used in digital light processing. Although the mirrors of this device can only be positioned in one of two states, we show that our system can be used to implement a wide variety of imaging functions, including, high dynamic range imaging, feature detection, and object recognition. We also describe how a micro-mirror array that allows full control over the orientations of its mirrors can be used to instantly change the field of view and resolution characteristics of the imaging system. We conclude with a discussion on the implications of programmable imaging for computer vision.