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101.
本文研究了采用锁定放大相干检测技术的等离子体光发射谱检测系统。用该系统检测了仅用CF4作为刻蚀气体刻蚀非晶硅基薄膜的等离子体光发射谱。分析了检测结果和刻蚀机理。 相似文献
102.
Keizo Uematsu Masayori Miyashita Jin-Young Kim Zenji Kato Nozomu Uchida 《Journal of the American Ceramic Society》1991,74(9):2170-2174
Green bodies prepared by compaction of alumina granules were made transparent by an immersion liquid technique, and the internal structure was characterized with an optical microscope to study the effect of forming pressure on the internal structure. Clear images obtained by the technique provide more detailed information than other existing methods for structures ranging from one to tens of micrometers. Intergranular pores were present between unfractured granules. Their sizes and concentration tended to decrease with increasing forming pressure. However, pores were clearly present even in the green body prepared at 600 MPa. A rod- and needlelike feature was also found and was concluded to correspond to a high-density region. The significance of large pores and high-density regions on processing as well as the details of the technique is discussed. 相似文献
103.
104.
A new principle and arrangement for directly determining the angle of incidence of an optical beam on an object are proposed and demonstrated. The novelty of the approach lies in the realization of a ‘smart object’, which extracts a portion of the incident beam's power into an optical waveguide attached to the object's surface or embedded in its body for converting the angle of incidence into the position of a guided beam with finite lateral extent. This ‘integrated optical light pointer’ beam is accomplished by means of creating additional degrees of freedom on the target in two different ways. While a first type is based on introducing spatial variations of the waveguide thickness, a second type makes use of a chirp of the grating periodicity. The feasibility for practical applications has been experimentally demonstrated by a direct comparison with a commercial high-resolution encoder, resulting in an r.m.s. error of <30′'. Measurements have been performed for chips fabricated based on replicated polycarbonate substrates and with no external optics, showing the great potential of this approach for realizing low-cost yet high-performance miniature goniometers. 相似文献
105.
Eight-year exploration of shrinkage in high-performance concrete 总被引:1,自引:0,他引:1
Bertil Persson 《Cement and Concrete Research》2002,32(8):1229-1237
In this paper, an experimental and analytical exploration on the effect of water-binder ratio (w/b), silica fume and age on autogenous, carbonation, drying and total shrinkage of high-performance concrete (HPC) is outlined. Eight types of HPC were studied. Carbonation, internal relative humidity (RH) and strength were studied on specimens from the same batch of HPC that was used in the studies of shrinkage. The results indicate fairly good correlation between carbonation, shrinkage, w/b and RH. The type and amount of silica fume affected shrinkage. 相似文献
106.
本文主要根据电子整机的发展要求,从集成化、高性能和高可靠等三方面分析国外模似IC的发展,进而说明模拟IC总的发展趋势及其表现。最后指出,模拟IC正面临一个新的变革时期。 相似文献
107.
周海光 《红外与毫米波学报》2002,21(Z1):112-114
对布满液晶微粒的聚合物(PDLC)进行了简并四波混频及光学双稳态的研究,并在文中对相关的PDLC中的分子重取向和热效应的非线性光学效应进行了讨论. 相似文献
108.
�ݼ����߷����������Ϸ� 总被引:2,自引:0,他引:2
通过对J.J.Arps方程的推导,提出了油气藏产量递减曲线分析的最佳拟合法。用该法可直接求出递减指数N、初始递减率D1及油气递减前的稳定产量Qi,避免了使用试差法的大量运算过程,大大提高了油气藏工程中指标预测的精度。 相似文献
109.
Optical measurements of thermal diffusivity of a material 总被引:2,自引:0,他引:2
The measurement of thermal diffusivity of a material (in particular, a thin film) is important for various reasons, e.g., to predict the heat transfer in the solid subjected to a thermal process, to monitor surface composition or morphology, or to detect invisible subsurface defects like delaminations. This measurement can be done in a noncontact manner using various photothermal methods. Such methods typically involve pulsed heating of the surface by small amounts using a laser source; the decay of the surface temperature after this pulsed photothermal heating is then probed to provide the thermal diffusivity. Various probing methods have been developed in the literature, including the probing of reflection, refraction, and diffraction from the pulsed heated area, infrared thermal radiometry, and surface deformation. This paper provides an overview of such techniques and some examples of their applications. 相似文献
110.