Electrolyte composition and removal mechanism of Cu electrochemical mechanical polishing

The optimization of electrolytes and the material removal mechanisms for Cu electrochemical mechanical planarization （ECMP） at different pH values including 5-methyl-1H-benzotriazole （TTA）, hydroxyethylidenediphosphoric acid （HEDP）, and tribasic ammonium citrate （TAC） were investigated by electrochemical techniques, X-ray photoelectron spectrometer （XPS） analysis, nano-scratch tests, AFM measurements, and polishing of Cu-coated blanket wafers. The experimental results show that the planarization efficiency and the surface quality after ECMP obtained in alkali-based solutions are superior to that in acidic-based solutions, especially at pH=8. The optimal electrolyte compositions （mass fraction） are 6% HEDP, 0.3% TTA and 3% TAC at pH=8. The main factor affecting the thickness of the oxide layer formed during ECMP process is the applied potential. The soft layer formation is a major mechanism for electrochemical enhanced mechanical abrasion. The surface topography evolution before and after electrochemical polishing （ECP） illustrates the mechanism of mechanical abrasion accelerating electrochemical dissolution, that is, the residual stress caused by the mechanical wear enhances the electrochemical dissolution rate. This understanding is beneficial for optimization of ECMP processes.     

铝镁防锈铝合金塑变组织显示方法研究

采用电解抛光和阳极复膜的方法显示铝镁防锈铝合金塑变前后的晶粒（界）组织，实践表明该方法简单，方便，在正交偏振光下观察，效果良好，晶粒（界）显示清晰。     

纳米金刚石的应用

纳米金刚石不仅具有金刚石所固有优异特性，而且还具有纳米材料所拥有的奇异性能。正是这些综合技术特性，使得它在传统的和新的技术领域中得到应用，并初见成效，本文从超精抛光、润滑、复合镀、磁性录音系统和医疗等方面的应用做了扼要的叙述，指出，纳米金刚石颗粒具有球形和准球形的特点，使得摩擦表面形成滚珠轴承效应，而表现出良好的润滑性，从而避免于摩现象的发生，而对一些主要因接触疲劳或高温磨损而失效的工件，纳米金刚石金属的复合涂层，则具有明显的优越性。     

Automatic classification of defects on the product surface in grinding and polishing

Grinding and polishing are standard operations in material processing. It is important to inspect and classify the potential defects existing on the product surfaces after grinding and polishing in order to obtain high quality in both functionality and aesthetics. Post-processing handling can be carried out after the defects have been correctly classified. A vision system already exists to detect and classify defects based on captured grayscale images automatically. The system is able to find and locate the defects precisely, but is incapable of placing those defects into the right predefined classes. The old system classifies the defects 30% of the time into the 15 predefined classes based on shape features. In this paper, a new classification strategy has been introduced using diverse extracted features. In addition to shape features, some other feature extraction methods were tried, e.g. Laws filter bank, DCT (Discrete Cosine Transformation) filter bank, Gabor filter bank, and statistical features based on co-occurrence matrix. The Support Vector Machine (SVM) was used as a multi-class classifier with input of the extracted features. By combining the Gabor filter features and the statistical features, the classification rate of the system can reach 82% overall right rate, which is applicable practically.     

不锈钢板镜面抛光技术

介绍一种适用于不锈钢抛光用的 ZH-1抛光乳化液,该液具有抛光、润滑、防锈和冷却等多种功能;讨论抛光工艺的操作条件,采用本技术用SUS321板抛制镜面板时,抛光速度可提高24倍,抛光质量可达 R_n<0.04μm。     

Finishing effects of spiral polishing method on micro lapping surface

This study presents a spiral polishing method and a device for micro-finishing purposes. This novel finishing process has wider application than traditional processes. This offers both automation and flexibility in final machining operations for deburring, polishing, and removing recast layers, thereby producing compressive residual stresses even in difficult to reach areas. Applying of this method can obtain a fine polished surface by removing tiny fragments via a micro lapping generated by transmission of an abrasive medium through a screw rod. The effect of the removal of the tiny fragments can be achieved due to the function of micro lapping. The method is not dependent on the size of the work-piece's application area in order to carry out the ultra precise process. The application of this research can be extended to various products of precision ball-bearing lead screw. The proposed method produces products with greater precision and more efficiently than traditional processes, in terms of processing precisions and the surface quality of products. These parameters used in achieving maximum material removal rate (MRR) and the lowest surface roughness (SR) are abrasive particle size, abrasive concentration, gap, revolution speed and machining time.     

钒及钒基合金金相试样的制备方法

介绍了一种钒及钒基合金金相试样的常规制样方法,即试样的机械磨光,机械化学抛光,化学侵蚀等技术和经验。     

晶片材料的超精密加工技术现状

文章介绍了晶片材料的超精密加工设备以及几种典型晶片材料加工工艺的最新发展 ,综述了几种典型超精密加工设备的特点以及单晶硅片、石英晶体、K9玻璃、钽酸锂单晶材料的加工工艺方法 ,探讨了晶片材料的超精密加工技术的发展趋势。     

基于介电泳效应的高速抛光电极分布仿真研究与实验验证

目的解决传统平面环抛过程中存在的两种问题:(1)抛光液受抛光盘和工件旋转离心力作用而抛光液在加工区域分布不均,导致加工工件高平面度差;(2)抛光液受到的离心力作用限制了抛光盘转速,导致抛光效率低。方法提出一种基于介电泳效应的平面抛光方法(DEPP),在抛光区域增加一个非均匀电场,利用中性粒子在非均匀电场中极化后受介电泳力的作用,使其具有向电极和抛光区域中心运动的现象,降低旋转离心力对抛光液的甩出作用,实现对平面工件的高速、高精度抛光。采用有限元分析软件数值模拟极化后磨粒所受介电泳力对离心力的抑制作用,优化产生非均匀电场的不同电极宽度,得到最优非均匀电场电极分布参数,实际测量优化电极后抛光液所受介电泳力的大小和方向,最后搭建试验平台验证介电泳效应高速抛光平面工件的有效性。结果提高抛光盘转速,进行抛光磨砂玻璃对比实验,加工1 h以后,采用介电泳效应抛光能完全去除玻璃磨砂层,工件平整度好,最终RMS值为0.276λ;无介电泳效应抛光后,工件中心部分磨砂层仍有存在,工件平整度相对较差,最终RMS值为0.694λ。通过测量加工去除量,介电泳效应抛光比无介电泳效应抛光的去除率提升了18%结论通过仿真模拟和实验验证,证明了调整电极布置形式以及优化电极分布参数后,介电泳效应高速平面抛光的方法能够有效提升抛光效率和抛光后工件表面平面度。     

蓝宝石晶片纳米级超光滑表面加工技术研究

本文提出以蓝宝石塑性磨削和化学机械抛光为主要手段，以原子力显微镜为主要检测工具，来制备满足光电子领域要求的纳米级超光滑蓝宝石晶片的新方法。在高刚性磨床上，用W7的金刚石砂轮以f=1μm／r进给量，实现了蓝宝石晶片的浅损伤塑性域磨削。配制了以SiO2溶胶为抛光料的监宝石晶片专用抛光液，稳定地获得了无损伤层的RMS小于0.2nm的超光滑蓝宝石晶片表面。GaN外延生长所需蓝宝石晶片的合理抛光参数是：SiO2的粒子直径为7nm、浓度为3％、pH=11、压力P=200Pa。